• 한국전기전자재료학회논문지
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• 제26권9호
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• pp.669-676
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• 2013

In this study, we introduce a polymer(polyimide) based pressure sensor to measure real-time heart beat and blood pressure. The sensor have been designed with consideration of skin compatibility of material, cost effectiveness, manufacturability and wireless detection. The designed sensor was composed of inductor coils and an air-gap capacitor which generate self-resonant frequency when electrical source is applied on the system. The sensor was obtained with metalization, etching, photolithography, polymer adhesive bonding and laser cutting. The fabricated sensor was shaped in circular type with 10mm diameter and 0.45 mm thickness to fit radial artery. Resonant frequencies of the fabricated sensors were in the range of 91~96 MHz on 760 mmHg pressurized environment. Also the sensor has good linearity without any pressure-frequency hysteresis. Sensitivity of the sensor was 145.5 kHz/mmHg and accuracy was less than 2 mmHg. Real-time heart beat measurement was executed with a developed hand-held measurement system. Possibility of real-time blood pressure measurement was showed with simulated artery system. After installation of the sensor on skin above radial artery, simple real blood pressure measurement was performed with 64 mmHg blood pressure variation.

• 전자통신동향분석
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• 제30권6호
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• pp.21-30
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• 2015

압력센서란 두 물체 간의 상호 작용하는 힘의 크기를 나타내는 물리적 양을 측정하는 디바이스로서 힘의 전달 크기, 힘의 방향 등을 측정하는 데 매우 광범위하게 사용되고 있는 센서이다. 사용하는 분야는 의료, 자동차, 항공, 공업계측, 가전, 환경제어분야 등의 전반적 산업제품과 산업시설에 응용되고 있으며, 측정원리는 힘의 변화에 따른 재료의 변위, 변형, 진동수, 변화, 열전도율 변화 등을 이용하는 것으로 종전의 기계식 감지방법에서 현재는 센서장치의 소형화를 위하여 반도체소자 제작기술과 Micro Electro Mechanical System(MEMS)기술을 이용하는 초소형, 저전력형 센서개발로 계속 발전하고 있다. 본고에서 멤스(MEMS) 압력센서의 최근 제품 기술 개발과 시장 및 산업동향을 알아보고 향후 더욱더 확장될 압력센서제품 기술의 기초 정보를 제공하고자 한다.

• 대한의용생체공학회:의공학회지
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• 제37권5호
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• pp.168-177
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• 2016

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.

• 센서학회지
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• 제23권5호
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• pp.326-331
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• 2014

In this study, a MEMS microphone that uses $Si_3N_4$ as the vibration membrane was produced for application as an auditory device using a sound visualization technique (sound visualization) for the hearing impaired. Two sheets of 6-inch silicon wafer were each fabricated into a vibration membrane and back plate, after which, wafer bonding was performed. A certain amount of charge was created between the bonded vibration membrane and the back plate electrodes, and a MEMS microphone that functioned through the capacitive method that uses change in such charge was fabricated. In order to evaluate the characteristics of the prepared MEMS microphone, the frequency flatness, frequency response, properties of phase between samples, and directivity according to the direction of sound source were analyzed. The MEMS microphone showed excellent flatness per frequency in the audio frequency (100 Hz-10 kHz) and a high response of at least -42 dB (sound pressure level). Further, a stable differential phase between the samples of within -3 dB was observed between 100 Hz-6 kHz. In particular, excellent omnidirectional properties were demonstrated in the frequency range of 125 Hz-4 kHz.

• 센서학회지
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• 제24권1호
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• pp.10-14
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• 2015

This paper reports the results of a study on the optimization of the etching profile, which is an important factor in deep-reactive-ion etching (DRIE), i.e., dry etching. Dry etching is the key processing step necessary for the development of the Internet of Things (IoT) and various microelectromechanical sensors (MEMS). Large-area etching (open area > 20%) under a high-frequency (HF) condition with nonoptimized processing parameters results in damage to the etched sidewall. Therefore, in this study, optimization was performed under a low-frequency (LF) condition. The HF method, which is typically used for through-silicon via (TSV) technology, applies a high etch rate and cannot be easily adapted to processes sensitive to sidewall damage. The optimal etching profile was determined by controlling various parameters for the DRIE of a large Si wafer area (open area > 20%). The optimal processing condition was derived after establishing the correlations of etch rate, uniformity, and sidewall damage on a 6-in Si wafer to the parameters of coil power, run pressure, platen power for passivation etching, and $SF_6$ gas flow rate. The processing-parameter-dependent results of the experiments performed for optimization of the etching profile in terms of etch rate, uniformity, and sidewall damage in the case of large Si area etching can be summarized as follows. When LF is applied, the platen power, coil power, and $SF_6$ should be low, whereas the run pressure has little effect on the etching performance. Under the optimal LF condition of 380 Hz, the platen power, coil power, and $SF_6$ were set at 115W, 3500W, and 700 sccm, respectively. In addition, the aforementioned standard recipe was applied as follows: run pressure of 4 Pa, $C_4F_8$ content of 400 sccm, and a gas exchange interval of $SF_6/C_4F_8=2s/3s$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2015년도 제46회 하계학술대회
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• pp.1229-1230
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• 2015

Monitoring of mechanical properties of tissues as well as direction/quantities of forces is considered as an essential way for disease diagnosis and haptic feedback systems. There are extensively increasing interests for measuring normal/shear force and touch feelings, especially for surgery systems. Highly sensitive and flexible tactile sensor is needed in palpation for detecting cancer cyst as well as real time pressure monitoring in minimally invasive surgery (MIS). Importantly, MEMS technique with miniaturized fabrication technique is essential for the on-chip integration with biopsy and biomedical grasper. Here, we propose the flexible tactile sensor with high sensitivity based on piezoresistive effect. We analyzed the sensitivity according to the pressure and directions and showed the ability of discrimination of the different materials surfaces, illustrating the feasibility of the flexible tactile sensor for biomedical grasper by mimicking human skin.

• Transactions on Electrical and Electronic Materials
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• 제18권1호
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• pp.25-29
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• 2017

This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2001년도 ICCAS
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• pp.103.6-103
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• 2001

Glaucoma is an eye disease which is caused by abnormal high IOP (Intra Ocular Pressure) in the eye. High IOP is caused by the aqueous humor which is produced consistently but not drained due to the malfunction of the trabecular system which has a role of draining the aqueous humor into the venous system. Currently, there are some methods to treat glaucoma, Among these, the use of implants is increasing in these days due to many problems in other methods. However, conventional implants are passive implants and have critical disadvantage. Therefore, it is needed to develop a new implant using MEMS structure which is capable of controlling the IOP actively and copes with personal difference of patients. An active glaucoma implant consists of the valve actuator, pressure sensor, controller, and power supply. In this paper the valve actuator is considered. We make experiments and simulations with the fabricated ...

• 한국지반환경공학회 논문집
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• 제14권3호
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• pp.51-60
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• 2013

본 연구에서는 기압 센서의 특성과 기존의 차분 기법을 결합하여 임의의 건설현장에서 작업자의 절대고도를 확보하는 방법을 제안하고, 다양한 특성을 가진 다양한 건설 현장에서 이 방법을 적용한 결과를 분석하여 그 타당성을 검증하였다. 본 연구 결과물은 실제 건설 현장에서 작업자의 3D좌표 추출에 적용하기 위한 실용 기술로 개발된 것으로써 스마트폰에 내장된 각종 MEMS 센서들의 사양과 특징을 분석하고 데이터를 획득하여 단말기의 위치를 실내외에서 어떻게 결정할 수 있는지를 각종 시험을 통해 검증하였다. 이를 위해 다양한 실제 스마트폰으로부터 센서정보를 추출하는 프로그램을 개발하고 PC인터페이스 방법을 제시하였으며 개발과정에서 발생한 여러 문제점들을 극복하는 방안 등을 소개한다.

• 한국정보과학회논문지:컴퓨팅의 실제 및 레터
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• 제13권7호
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• pp.433-441
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• 2007

바이오센서는 생명공학 또는 의학 분야에서 사용되는 인간의 생체 신호를 감지할 수 있는 센서들로 의료기기에 주로 사용되는데, 최근 MEMS 기술의 발달로 작은 크기의 하드웨어에 센서 인터페이스, 프로세서, 무선통신, 배터리 등을 포함한 모듈을 센서노드(모트 : Mote)들로 구성된 센서기반 네트워크에서 바이오센서 네트워크로 응용분야를 확장하고 있다. 이에 본 논문에서는 바이오센서 기술과 센서네트워크 기술을 융합한 기술인 바이오 센서네트워크를 활용한 응급 구조 시스템의 설계 및 구현을 제안한다. 제안된 시스템에 사용된 바이오센서는 근전도(EKG), 혈압(Blood Pressure), 맥박(Heart Rate), 산소포화도(Pulse Oximeter), 혈당(Glucose)센서들로, 바이오센서에서 측정된 생체 신호를 센서네트워크 모트를 통해 데이타를 수집하고, 수집된 데이타를 이용하여 건강관리 측정 데이타로 활용하였으며 측정된 데이터는 무선단말기(PDA, 휴대폰), 전자액자 디스플레이장치 등에서 확인 가능하도록 구성하였다. 아울러, 제안한 u- 응급 구조 시스템의 유효성을 실험하기 위해서 사용자의 바이탈사인 정보와 주변 환경정보를 고려한 실험을 수행하였다.