• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.14-17
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• 2006

This paper describes a novel processing technique for fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for super-temperature MEMS applications. PDMS (polydimethylsiloxane) mold is fabricated on SU-8 photoresist using standard UV photolithographic process. Liquid precursor is injected into the PDMS mold. Finally, solid polymer structure is cross-linked using HIP (hot isostatic pressure) at $400^{\circ}C$, 205 bar Optimum pyrolysis and anneal ins conditions are determined to form a ceramic microstructure capable of withstanding over $1400^{\circ}C$. The fabricated SiCN ceramic microstructure has excel lent characteristics, such as shear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$) and BDV (min. 1.2 kV) under optimum process condition.

• International Journal of Aeronautical and Space Sciences
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• v.18 no.3
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• pp.555-564
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• 2017

In this paper, a new technique for attitude and heading reference system (AHRS) using low-cost MEMS sensors of the gyroscope, accelerometer, and magnetometer is addressed particularly in vibration environments. The motion of MEMS sensors interact with the scale factor and cross-coupling errors to produce random errors by the harsh environment. A new adaptive attitude estimation algorithm based on the Kalman filter is developed to overcome these undesirable side effects by analyzing windowed measurement error covariance. The key idea is that performance degradation of accelerometers, for example, due to linear vibrations can be reduced by the proposed measurement error covariance analysis. The computed error covariance is utilized to the measurement covariance of Kalman filters adaptively. Finally, the proposed approach is verified by using numerical simulations and experiments in an acceleration phase and/or vibrating environments.

• IEIE Transactions on Smart Processing and Computing
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• v.6 no.1
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• pp.1-9
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• 2017

This paper proposes to improve the performance of a strap down inertial navigation system using a foot-mounted low-cost inertial measurement unit/magnetometer by configuring an attitude and heading reference system. To track position accurately and for attitude estimations, considering different dynamic constraints, magnetic measurement and a zero velocity update technique is used. A conventional strap down method based on integrating angular rate to determine attitude will inevitably induce long-term drift, while magnetometers are subject to short-term orientation errors. To eliminate this accumulative error, and thus, use the navigation system for a long-duration mission, a hybrid configuration by integrating a miniature micro electromechanical system (MEMS)-based attitude and heading detector with the conventional navigation system is proposed in this paper. The attitude and heading detector is composed of three-axis MEMS accelerometers and three-axis MEMS magnetometers. With an absolute algorithm based on gravity and Earth's magnetic field, rather than an integral algorithm, the attitude detector can obtain an absolute attitude and heading estimation without drift errors, so it can be used to adjust the attitude and orientation of the strap down system. Finally, we verify (by both formula analysis and from test results) that the accumulative errors are effectively eliminated via this hybrid scheme.

• IEMEK Journal of Embedded Systems and Applications
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• v.17 no.4
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• pp.239-247
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• 2022

The existing studies on the localization in the GNSS (Global Navigation Satellite System) denied environment usually exploit low-cost MEMS IMU (Micro Electro Mechanical Systems Inertial Measurement Unit) sensors to replace the GNSS signals. However, the navigation system still requires GNSS signals for the normal environment. This paper presents an integrated GNSS/INS (Inertial Navigation System) navigation system which combines GNSS and multiple IMU sensors using extended Kalman filter in partially GNSS-denied environments. The position and velocity of the INS and GNSS are used as the inputs to the integrated navigation system. The Mahalanobis distance is used for novelty detection to detect the outlier of GNSS measurements. When the abnormality is detected in GNSS signals, GNSS data is excluded from the fusion process. The performance of the proposed method is evaluated using MATLAB/Simulink. The simulation results show that the proposed algorithm can achieve a higher degree of positioning accuracy in the partially GNSS-denied environment.

• International Journal of Aeronautical and Space Sciences
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• v.17 no.2
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• pp.222-231
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• 2016

This paper proposes a new method achieving computationally efficient attitude reference system for low cost strapdown sensors and microprocessor platform. The main idea in this method is to define and compare velocity differential vectors, geometrically computed from INS and GPS data with different update rate, for generating attitude error measurements which is further used for filter construction. A quaternion based Kalman filter configuration is applied for the attitude estimation with the adapted measurement model of differential vector comparison. Linearized model for Extended Kalman Filter and low pass filtered characteristics of measurement greatly extend the affordability of the proposed algorithm to the field of simple low cost embedded systems. For performance verification, experiment are done employing a practical low cost MEMS IMU and GPS receiver specification. Performance comparison with a high grade navigation system demonstrated good estimation result.

• Journal of Advanced Navigation Technology
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• v.25 no.1
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• pp.68-77
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• 2021

In this paper, a GPS/MEMS IMU integrated navigation receiver module capable of operating in a high dynamic environment is designed and fabricated, and the results is confirmed. The designed module is composed of RF receiver unit, inertial measurement unit, signal processing unit, correlator, and navigation S/W. The RF receiver performs the functions of low noise amplification, frequency conversion, filtering, and automatic gain control. The inertial measurement unit collects measurement data from a MEMS class IMU applied with a 3-axis gyroscope, accelerometer, and geomagnetic sensor. In addition, it provides an interface to transmit to the navigation S/W. The signal processing unit and the correlator is implemented with FPGA logic to perform filtering and corrrelation value calculation. Navigation S/W is implemented using the internal CPU of the FPGA. The size of the manufactured module is 95.0×85.0×.12.5mm, the weight is 110g, and the navigation accuracy performance within the specification is confirmed in an environment of 1200m/s and acceleration of 10g.

• Journal of Advanced Navigation Technology
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• v.16 no.6
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• pp.927-934
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• 2012

In this paper, we present relative positioning algorithm for moving land vehicle using GPS, MEMS IMU and B-CDMA module. This algorithm does not calculate precise absolute position but calculates relative position directly, so additional infrastructure and I2V communication device are not required. Proposed algorithm has several steps. Firstly, unbiased relative position is calculated using pseudorange difference between two vehicles. Simultaneously, the algorithm estimates position of each vehicle using GPS/INS integration. Secondly, proposed algorithm performs filtering and finally estimates relative position and relative velocity. Using proposed algorithm, we can obtain more precise relative position for moving land vehicles with short time interval as IMU sensor has. The simulation is performed to evaluate this algorithm and the several field tests are performed with real time program and miniature vehicles for verifying performance of proposed algorithm.

• Journal of the Korean GEO-environmental Society
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• v.14 no.8
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• pp.45-51
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• 2013

In the construction site of underground buildings which have severe environment such as dust, noise, vibration, the technology of rescue the builders in the construction site when accident occurs by tracking the location of the builders and express the mission of supervisor smoothly. In this study, in order to acquire the location information of the builders in the construction site of underground buildings by using MEMS INS and air pressure sensor, we firstly performed the field test in construction site, analyzed the location and the elevation accuracy based on the detected results, and then verified its practicality and rationality after all. As a result, we could acquire worker's position-accuracy within 10m in horizontal direction and 4m in vertical direction. Therefore we could judge availability in construction fields of underground structure.