• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.10
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• pp.1017-1025
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• 2008

The air data system(ADS) was developed for unmanned aerial vehicle(UAV) in this paper. Generally, the ADS helps flight control computer(FCC) to control the UAV above the stall speed and to hold the given altitude. The accurate measurement of airspeed and altitude of UAV is important because it indicates a flight performance and assures a safe flight. The ADS consists of MEMS pressure sensors, a lowpass filter, a micro controller unit and a pitot-tube. The ADS errors were reduced by pressure and temperature compensation of MEMS sensors. Finally, the altitude and airspeed data of the ADS was compared with GPS data in the flight test.

• Journal of the Korea institute for structural maintenance and inspection
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• v.15 no.2
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• pp.170-178
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• 2011

In this paper, a research was performed to develop a wireless measurement system for bridge monitoring using MEMS sensor and bluetooth wireless communication module. First, in order to prove the suitability of MEMS sensor for the bridge measurement, its ranges of measuring acceleration and of frequency response were experimented. Also, the quality of wireless communication was tested by an experiment on long-distance communication for the knowledge of maximum communication distance, and also by an experiment on the data transmit-receive capability both inside and outside of a steel box bridge. Later, placing the wireless acceleration sensor system that had been developed in our lab on a bridge in public service, we acquired vibration data from the bridge under traffic load and analyzed its dynamic characteristics in realtime. For the analysis of the data, NExT & ERA algorithm were employed. The result of analysis was compared to the FE analysis of the same bridge, and the comparison made it possible to evaluate the performance of wireless acceleration sensor system. As a result, it was proven that the wireless acceleration sensor system developed with the use of MEMS sensor and bluetooth wireless communication module could be effectively applied to the measurement of structure whose vibration feature was low frequency like a bridge.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.15 no.4
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• pp.905-912
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• 2011

Interaocular pressure (IOP) sensor and external coil to detect the resonance frequency of the IOP sensor are designed and implemented using MEMS technology. The IOP sensor is designed using 3-D electromagnetic (EM) simulation. The resonance frequency of IOP sensor needs to be lower than that of the external coil. Additionally, the resonance frequency of the IOP sensor needs to be located near the resonance frequency of the coil to get the sufficient amplitude of phase variation. The frequency where the phase peak appears must be constant according to the distance between the IOP sensor and the external coil. From the measurement results, we demonstrated that the designed IOP sensor has the same resonance frequency with various distances between the IOP sensor and the coil.

• Asia-pacific Journal of Multimedia Services Convergent with Art, Humanities, and Sociology
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• v.7 no.1
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• pp.177-186
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• 2017

Recently, Autonomous vehicles are getting hot attention. Amazon, the biggest online shopping service provider is developing a delivery system that uses drones. This kinds of platforms are need accurate attitude information for navigation. In this paper, a structure design of AHRS using low-cost inertia sensor is proposed. To estimate attitudes a Kalman filter which uses a quaternion based dynamic model, bias-removed measurements from MEMS Gyro, raw measurements from MEMS accelerometer and magnetometer, is designed. To remove bias from MEMS Gyro, an additional Kalman filter which uses raw Gyro measurements and attitude estimates, is designed. The performance of implemented AHRS is compared with high price off-the-shelf 3DM-GX3-25 AHRS from Microstrain. The Gyro bias was estimated within 0.0001[deg/s]. And from the estimated attitude, roll and pitch angle error is smaller than 0.2 and 0.3 degree. Yaw angle error is smaller than 6 degree.

• The Journal of the Korea institute of electronic communication sciences
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• v.6 no.5
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• pp.709-716
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• 2011

Recently, there are many difficult for maintenance in the power in established sensor networks. In order to solve this problems, the power development has been interested using vibration in MEMS that insert the MEMS oscillator. In this paper, we propose the MEMS system with Duffing equation to generate vibration signal that can be use power signal in MEMS and confirm and verify the chaotic behaviors in vibration signal of MEMS by computer simulation. As a verification methods, we confirm the existence of period motion and chaotic motion by parameter variation through the time series, phase portrait, power spectrum and poincare map.

• Journal of Sensor Science and Technology
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• v.19 no.4
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• pp.259-270
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• 2010

MEMS(micro electro mechanical systems) is a technology for the manufacture hyperfine structure, as a micro-sensor and a driving device, by a variety of materials such as silicon and polymer. Many study for utilizing the MEMS applications have been performed in variety of fields, such as light devices, high frequency equipments, bio-technology, energy applications and other applications. Especially, the field of Bio-MEMS related with bio-technology is very attractive, because it have the potential technology for the miniaturization of the medical diagnosis system. Bio-MEMS, the compound word formed from the words 'Bio-technology' and 'MEMS', is hyperfine devices to analyze biological signals in vitro or in vivo. It is extending the range of its application area, by combination with nano-technology(NT), Information Technology(IT). The LOC(lab-on-a-chip) in Bio-MEMS, the comprehensive measurement system combined with Micro fluidic systems, bio-sensors and bio-materials, is the representative technology for the miniaturization of the medical diagnosis system. Therefore, many researchers around the world are performing research on this area. In this paper, the application, development and market trends of Bio-MEMS are investigated.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.09a
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• pp.55-85
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• 2000

MEMS(Micro Electro Mechanical System) technology. MEMS Inertial Sensors promise a new wide market for many areas -Challenge. significant cost reduction by wafer level packaging and testing. decreasing of power consumption by miniaturization. enhancing of performance and reliability. on-chip integration for multiplicity. MEMS is newly emerging technology.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.9
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• pp.13-21
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• 2011

In this paper, the CMOS programmable interface circuit for MEMS gyroscope is presented, and evaluated with the MEMS sensing element. The circuit includes the front-end charge amplifier with 10 bit programmable capacitor arrays, 9 bit DAC for accurate offset calibration, and 10 bit PGA for accurate gain calibration. The self oscillation loop with automatic gain control operates properly. The offset error and gain error after calibration are measured to be 0.36 %FSO and 0.19 %FSO, respectively. The noise equivalent resolution and bias instability are measured to be 0.016 deg/sec and 0.012 deg/sec, respectively. The calibration capability of this circuit can reduce the variations of the output offset and gain, and this can enhance the manufacturability and can improve the yield.

• Journal of the Korea Institute of Information Security & Cryptology
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• v.31 no.3
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• pp.411-422
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• 2021

The autonomous driving system mounted on the unmanned vehicle recognizes the external environment through several sensors and derives the optimum control value through it. Recently, studies on physical level attacks that maliciously manipulate sensor data by performing signal-injection attacks have been published. signal-injection attacks are performed at the physical level and are difficult to detect at the software level because the sensor measures erroneous data by applying physical manipulations to the surrounding environment. In order to detect a signal-injection attack, it is necessary to verify the dependability of the data measured by the sensor. As so far, various methods have been proposed to attempt physical level attacks against sensors mounted on autonomous driving systems. However, it is still insufficient that methods for defending and detecting the physical level attacks. In this paper, we demonstrate signal-injection attacks targeting MEMS sensors that are widely used in unmanned vehicles, and propose a method to detect the attack. We present a signal-injection detection model to analyze the accuracy of the proposed method, and verify its effectiveness in a laboratory environment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.2
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• pp.132-136
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• 2004

A flat type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up gas sensing material such as $WO_3$ to a target temperature, a micro hotplate was built on the gas sensor. The temperature distribution of micro gas sensor was analyzed by a CFD program, FLUENT. The results showed that the temperature of silicon wafer base was almost similar to that of the room temperature, which indicates that the heat generated at the micro hotplate heated up effectively the sensing material and its thermal isolation was kept. The uniformity of temperature on the sensing material can be improved by modifying the shape of micro hotplate.