• IT SoC Magazine
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• s.22
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• pp.46-51
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• 2007

• Electrical & Electronic Materials
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• v.24 no.1
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• pp.23-33
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• 2011

• Journal of Sensor Science and Technology
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• v.12 no.6
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• pp.265-272
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• 2003

This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2012.10a
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• pp.221-224
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• 2012

This paper presents a CMOS interface circuit for MEMS acceleration sensor. It consists of a capacitance to voltage converter(CVC), a second-order switched-capacitor (SC) integrator and comparator. A bandgap reference(BGR) has been designed to supply a stable bias to the circuit and a ${\Sigma}{\Delta}$ Modulator with chopper - stabilization(CHS) has also been designed for more suppression of the low frequency noise and offset. As a result, the output of this ${\Sigma}{\Delta}$ Modulator increases about 10% duty cycle when the input voltage amplitude increases 100mV and the sensitivity is x, y-axis 0.45v/g, z-axis 0.28V/g. This work is designed and implemented in a 0.35um CMOS technology with a supply voltage of 3.3V and a sampling frequency of 3MHz sampling frequency. The size of the designed chip including PADs is $0.96mm{\times}0.85mm$.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2014.10a
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• pp.569-572
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• 2014

This paper presents a CMOS switched-capacitor interface circuit for MEMS capacitive sensors. It consist of a capacitance to voltage converter(CVC), a second-order ${\Sigma}{\Delta}$ modulator, and a comparator. A bias circuit is also designed to supply constant bias voltages and currents. This circuit employes the correlated-double-sampling(CDS) and chopper-stabilization(CHS) techniques to reduce low-frequency noise and offset. The designed CVC has a sensitivity of 20.53mV/fF and linearity errors less than 0.036%. The duty cycle of the designed ${\Sigma}{\Delta}$ modulator output increases about 5% as the input voltage amplitude increases by 100mV. The designed interface circuit shows linearity errors less than 0.13%, and the current consumption is 0.73mA. The proposed circuit is designed in a 0.35um CMOS process with a supply voltage of 3.3V. The size of the designed chip including PADs is $1117um{\times}983um$.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.16 no.4
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• pp.133-137
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• 2016

The video and audio information occupies a large portion of the IoT information. Various sensors can be used in a more accurate situation awareness and the absence of the main information has been required. Increasing in resource management in accordance with the use of various sensors. As a method to reduce the resources required in the communication of the various sensors and find the possibility to process the sensor information that can take the place of the other sensor. In this paper, using the LIS302 DL MEMS motion sensor to measure the data in the ping-pong ball, shuttlecock, tennis ball falling into table tennis. Data measured in the three object was confirmed that in proportion to the amount of impact. This experiment using the accelerometer can be confirmed that changes in the amount of impact. The results using a single multi-function sensor showed a possible implementation. In addition, the recognized in consideration of the situation in the early development stage of the multi-function sensor.

• 전자공학회논문지 IE
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• v.45 no.4
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• pp.11-18
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• 2008

This study is implementation of attitude control system(ACS - Attitude Control System). for a multi legs robot. This study designs H/W of Inertial Measurement Unit (IMU) and attitude control algorithm S/W. Compare performance with Mtx and MTx in order to verify action performance of this system after implementation, and will verify a system integrated IMU of a multi-legs robot. ACS uses Gyro and an accelerometer and an earth magnetism sensor, and it is a system controlling a roll, pitch angle attitude of an object. Generally, low price MEMS is difficult to calculate a correct situation of an object as an error occurs severely the Inertial sensor. This study implements IMU in order to develop ACS as use MEMS, accelerometer, Gyro sensor and earth magnetism sensor. Design algorithm each a roll, pitch, yaw attitude guaranteeing regular performance, and do poling in a system as include an attitude calculation program in an IMU system implemented. Mixed output of Gyro and an accelerometer, and recompensed a roll, pitch angle, and loaded in this study on a target platform in order to implement the ACS which guaranteed performance more than a continuously regular level, and operated by real time, and did porting, and verified.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.3.1-3.1
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• 2005

• Electrical & Electronic Materials
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• v.17 no.8
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• pp.25-32
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• 2004

센서는 인간의 오감에 해당하는 감지기로서 온도, 소리, 빛 등의 물리, 화학적 신호를 전기적 신호로 변환시켜주는 일련의 장치를 말한다. 물론 센서에 대한 정의 및 분류 방법은 다양하게 표현될 수 있으나 본 논문에서는 MEMS(Micro Electro-Mechanical System) 기술을 적용하여 Smart화 혹은 Wireless화에 필요한 Micro 센서로 그 범위를 한정하고자 한다. 만일 센서를 아주 작게(Micro Sensor) 만들 수 있고 그것들끼리 무선으로 연결될 수(Wireless Network) 있다면 우리의 삶의 형태는 지금과는 매우 다른 모습으로 전개 될 것이다. 그림 1은 2004년에 정보통신부가 발표한 Ubiquitous Sensor Network의 개념도이다.(중략)

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.267-268
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• 2006

전력소모를 감소시키기 위해 MEMS 기술을 이용하여 마이크로 히터를 제작하고 그 위에 감지물질을 도포하여 마이크로 센서를 제작하였다. 마이크로 가스센서는 $SnO_2$를 모물질로 하였으며 가스 감도를 향상시키기 위해 Pd와 Rh, ${\alpha}-Fe_2O_5$, $V_2O_5$를 첨가하여, CO 가스 강도를 조사하였다. $SnO_2$에 촉매로서 Pd만을 첨가하였을 때보다 Rh, ${\alpha}-Fe_2O_5$. $V_2O_5$등을 첨가하였을 때 CO가스에 대한 감도 반응이 우수하였다. 마이크로 가스센서의 소비전력은 42mW이었다.