• Title/Summary/Keyword: MEMS

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CMOS Programmable Interface Circuit for Capacitive MEMS Gyroscope (MEMS 용량형 각속도 센서용 CMOS 프로그래머블 인터페이스 회로)

  • Ko, Hyoung-Ho
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.9
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    • pp.13-21
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    • 2011
  • In this paper, the CMOS programmable interface circuit for MEMS gyroscope is presented, and evaluated with the MEMS sensing element. The circuit includes the front-end charge amplifier with 10 bit programmable capacitor arrays, 9 bit DAC for accurate offset calibration, and 10 bit PGA for accurate gain calibration. The self oscillation loop with automatic gain control operates properly. The offset error and gain error after calibration are measured to be 0.36 %FSO and 0.19 %FSO, respectively. The noise equivalent resolution and bias instability are measured to be 0.016 deg/sec and 0.012 deg/sec, respectively. The calibration capability of this circuit can reduce the variations of the output offset and gain, and this can enhance the manufacturability and can improve the yield.

Study on MEMS based IMU & GPS Performance in Urban Area for Light-Weighted Mobile Mapping Systems (경량 모바일매핑시스템을 위한 도심지 내 MEMS 기반 IMU/GPS 통합센서(MTi-G) 특성 연구)

  • Woo, Hee-Sook;Kwon, Kwang-Seok;Kim, Byung-Guk
    • Journal of Korean Society for Geospatial Information Science
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    • v.20 no.1
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    • pp.65-72
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    • 2012
  • With the development of MEMS, small and low-priced sensors integrating IMU and GPS have produced and exploited for diverse field. In this research, we have judged that MEMS-based IMU/GPS sensor is suitable for light-weighted mobile mapping system and carried out experiments to analyze the characteristics of MTi-G, which was developed from XSens company. From a sensor which fixed to dashboard, coordinates results with no post-processing were achieved for test area. On the whole, the results show satisfactory performances but some errors also were discovered from parts of the road due to sensor properties, XKF characteristics and GPS reception environment. We could confirm the potential of light-weighted mobile mapping system. Experiments considering various GPS reception environments and road condition and more detailed level of accuracy analysis will be performed for further research.

Optimization of Thermo-optical Property for Electrostatic Actuating MEMS-based Variable Emissivity Radiator (정전 구동형 MEMS 기반 가변 방사율 라디에이터의 광학 물성치 최적화 설계)

  • Ha, Heon-Woo;Kang, Soo-Jin;Han, Sung-Hyeon;Kim, Tae-Gyu;Oh, Hyun-Ung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.43 no.2
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    • pp.149-155
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    • 2015
  • MEMS-based louver and shutter type conventional variable emissivity radiators change their emissivity properties in accordance with a temperature condition to achieve efficient thermal control performance. However, there are some drawbacks such as a structural safety of the mechanical moving parts under sever launch environment and constant power consumption to maintain the intended emissivity. In this study, to overcome above drawbacks, we proposed a MEMS-based variable emissivity radiator, which can change the emissivity property according to the polarity change of electrodes by using electric charge of the bead. The effectiveness of the optimized radiator design has been demonstrated through the comparison of efficiency with the fixed emissivity radiator.

Increase of Side-lobe Level Difference of Spherical Microphone Array by Implementing MEMS Sensor

  • Lee, Jae-Hyung;Choi, Si-Hong;Choi, Jong-Soo
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2011.04a
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    • pp.816-820
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    • 2011
  • A method for increasing the difference of side-lobe level in spherical microphone array is presented. In array signal processing, it is known that narrow interval between sensors can increase the difference between main lobe and side-lobe of array response which eventually increase the source recognition capability. Recent commercial array being used, however, have shown certain limitation in using the number of sensors due to its costs and geometrical size of array. To overcome this problem, we have adapted MEMS sensors into spherical microphone array. To check out the improvement, two different types of spherical microphone array were designed. One array is composed with 32 regular instrument microphones and the other one is 85 MEMS sensors. Simulation and experiments were conducted on a sinusoidal noise source with two arrays. The time history data were analyzed with spherical harmonic decomposition and beamforming technique. 85 MEMS sensors array showed the improved side-lobe level suppression by more than 4 dB above the frequency content of 2 kHz compared to 32-sensor array.

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Fabrication, Performance Evaluation of Components of Planar Type MEMS Solid Propellant Thruster (평판형 MEMS 고체 추진제 추력기 요소 제작 및 성능 평가)

  • Park, Jong-Ik;Kwon, Se-Jjin
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.36 no.6
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    • pp.581-586
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    • 2008
  • The MEMS solid propellant thrusters have very low thrust level for applying to the propulsion system of micro/nano satellites or the side jet thruster of smart bombs. In this research, the fabrication possibility of planar type MEMS solid propellant thrusters that have enlarged burning surface area was examined and the safety of the structure of thruster during the firing test was confirmed. The performance of a micro igniter which is the key component of the MEMS solid propellant thruster was estimated by the ANSYS Icepak and evaluated by the experiment. Finally, the thrust was measured by the micro force sensor. The levels of thrust were 300, 600 mN in the case of K=15, 20.

Experimental Study on Performance of MEMS(Multi-Effect-Multi-Stage) Distiller for Solar Thermal Desalination (태양열 해수담수화를 위한 증발식 MEMS(Multi-Effect-Multi-Stage)담수기 성능 실험 연구)

  • Joo, Hong-Jin;Jeon, Yong-Han;Kwak, Hee-Youl
    • Journal of the Korean Solar Energy Society
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    • v.33 no.3
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    • pp.91-98
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    • 2013
  • In this study, we have carried out development and performance evaluation of optimized MEMS(Multi-Effect-Multi-Stage) fresh water generator with $7m^2/day$ for solar thermal desalination system. The developed MEMS was composed of high temperature part and low temperature part. This arrangement has the advantage of increasing the availability of solar thermal energy. The MEMS consists of 2 steam generators, 5 evaporators, and 1 condenser. Tubes of heat exchanger used for steam generators, evaporators and condenser were manufactured by corrugated tubes. The performance of the MEMS was tested through in-door experiments, using an electric heater as heat source. The experimental conditions for each parameters were $20^{\circ}C$ for sea water inlet temperature to condenser, $8.16m^2$ /hour sea water inlet volume flow rate, $70^{\circ}C$ for hot water inlet temperature to generator of high temperature part, 3.6 4.8, 6.0 $m^2/hour$ for hot water inlet volume flow rate. As a result, The developed MEMS was required about 85 kW heating source to produce $7m^2/day$ of fresh water. It was analyzed that the performance ratio of MEMS was about 2.6.

A Study on Word Selection Method and Device Improvement for Improving Speech Recognition Rate of Speech-Language-impaired in Severe Noise Environment (심한 소음환경에서 언어장애인 음성 인식률 향상을 위한 단어선정 방법 및 장치 개선에 관한 연구)

  • Yang, Ki-Woong;Lee, Hyung-keun
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.23 no.5
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    • pp.555-567
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    • 2019
  • Speech recognition rate is lowered even in a noisy environment, and it is difficult for a person with a speech disability or an inconvenient language to use it in a social life. In addition to improving the inconvenience of using the language, 280 words were selected using the word selection method which was improved when the word was selected considering the pronunciation characteristics of the language impaired. The MEMS development device used in the experiment was made considering material, lead wire type, length and direction. We improved the speech recognition rate by using the developed word selection method and the MEMS device developed to improve the speech recognition rate due to incorrect pronunciation and severe noise. The new method of selecting words and the mems device were improved and the results were included.