• The Journal of Korea Robotics Society
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• v.8 no.1
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• pp.29-36
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• 2013

This paper presents a sensitivity optimization of a MEMS (microelectromechanical systems) gyroscope for a magnet-gyro system. The magnet-gyro system, which is a guidance system for a AGV (automatic or automated guided vehicle), uses a magnet positioning system and a yaw gyroscope. The magnet positioning system measures magnetism of a cylindrical magnet embedded on the floor, and AGV is guided by the motion direction angle calculated with the measured magnetism. If the magnet positioning system does not measure the magnetism, the AGV is guided by using angular velocity measured with the gyroscope. The gyroscope used for the magnet-gyro system is usually MEMS type. Because the MEMS gyroscope is made from the process technology in semiconductor device fabrication, it has small size, low-power and low price. However, the MEMS gyroscope has drift phenomenon caused by noise and calculation error. Precision ADC (analog to digital converter) and accurate sensitivity are needed to minimize the drift phenomenon. Therefore, this paper proposes the method of the sensitivity optimization of the MEMS gyroscope using DEAS (dynamic encoding algorithm for searches). For experiment, we used the AGV mounted with a laser navigation system which is able to measure accurate position of the AGV and compared result by the sensitivity value calculated by the proposed method with result by the sensitivity in specification of the MEMS gyroscope. In experimental results, we verified that the sensitivity value through the proposed method can calculate more accurate motion direction angle of the AGV.

• Transactions on Electrical and Electronic Materials
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• v.17 no.3
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• pp.150-154
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• 2016

Contact electrodes pose threats like inflammation, metal poisoning, and allergic reaction to the user during long term ECG procedure. Therefore, we present a novel noncontact electrocardiographic electrode designed through microelectromechanical systems (MEMS) process. The proposed ECG electrode consists of small inner and large outer circular copper plates separated by thin insulator. The inner plate enables capacitive transduction of bio-potential variations on a subject’s chest into a voltage that can be processed by a signal processing board, whereas the outer plate shields the inner plate from environmental electromagnetic noise. The electrode lead wires are also coaxially designed to prevent cables from coupling to ground or electronic devices. A prototype ECG electrode has an area of about 2.324 cm², is very flexible and does not require power to operate. The prototype ECG electrode could measure ECG at about 500 um distance from the subject’s chest.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.216-216
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• 2009

This paper describes a novel processing technique for the fabrication of polymer-derived SiCN (silicone carbonitride) microstructures for extreme microelectromechanical system (MEMS) applications. A polydimethylsiloxane (PDMS) mold was formed on an SU-8 pattern using a standard UV photolithographic process. Next, the liquid precursor, polysilazane, was injected into the PDMS mold to fabricate free-standing SiCN microstructures. Finally, the solid polymer SiCN microstructure was cross-linked using hot isostatic pressure at $400^{\circ}C$ and 205 bar. The optimal pyrolysis and annealing conditions to form a ceramic microstructure capable of withstanding temperatures over $1400^{\circ}C$ were determined. Using the optimal process conditions, the fabricated SiCN ceramic microstructure possessed excellent characteristics includingshear strength (15.2 N), insulation resistance ($2.163{\times}10^{14}\;{\Omega}$, and BDV (1.2 kV, minimum). Since the fabricated ceramic SiCN microstructure has improved electrical and physical characteristics compared to bulk Si wafers, it may be applied to harsh environments and high-power MEMS applications such as heat exchangers and combustion chambers.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.12
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• pp.1844-1852
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• 2001

Recent developments in microfluidic devices based on microelectromechanical systems (MEMS) technique find many practical applications, which include electronic chip cooling devices, power MEMS devices, micro sensors, and bio-medical devices among others. For the design of such micro devices, flows characteristics inside a microchannel have to be clarified which exhibit somewhat different characteristics compared to conventional flows in a macrochannel. In the present study microchannels of various hydraulic diameters are fabricated on a silicon wafer to study the pressure drop characteristics. The effect of abrupt contraction and expansion is also studied. It is found from the results that the friction factor in a straight microchannel is about 15% higher than that in a conventional macrochannel, and the loss coefficients in abrupt expansion and contraction are about 10% higher than that obtained through conventional flow analysis.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.34 no.4
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• pp.1343-1351
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• 2014

Recent technological advances in wireless networks and microelectromechanical systems (MEMS) have led to the development of different types of mini-UAVs and their utilizations in various ways. This study endeavors to develop a low-cost mini-UAV with autonomous flight capability, in order to obtain geospatial information of a small or medium-sized area, and also assess its flight stability by comparing the predetermined flight paths against the actual flight paths. Based on a post-development flight test, stable flight has been proven achievable as follows: the maximum endurance speed is 1 hour, the flying distance is 50km, the horizontal accuracy of flight paths is about ${\pm}6{\sim}8m$, and the altitude accuracy is about ${\pm}8m$. Therefore, it is deemed that high-resolution images which can be utilized for geospatial information are obtainable. This indicates that a UAV flying at an altitude of 200m can acquire images across a $2km{\times}3km$ area on the ground within 25 minutes, which validates its high usability for obtaining high-solution images at low altitudes in the future.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.5
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• pp.111-116
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• 2018

Thermal fusion bonding is a method to enclose open microchannels fabricated on polymer chips for use in lab-on-a-chip (LOC) devices. Polymethyl methacrylate (PMMA) is utilized in various biomedical-microelectromechanical systems (bio-MEMS) applications, such as medical diagnostic kits, biosensors, and drug delivery systems. These applications utilize PMMAs biochemical compatibility, optical transparency, and mold characteristics. In this paper, we elucidate both the conformational entanglement of PMMA molecules at the contact interfacial regime, and the qualitative nature of the thermal fusion bonding phenomena through systematic molecular dynamics simulations.

• Journal of Sensor Science and Technology
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• v.26 no.5
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• pp.366-369
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• 2017

This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Conventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the device is manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, the commercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the accessories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with the capable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spray coating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.

• Journal of Satellite, Information and Communications
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• v.12 no.2
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• pp.11-14
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• 2017

In this paper, we introduce a method of light focusing effect using prism structure to solve optical discontinuity of conventional external signage LED panels. The prims structures were patterned on a transparent polycarbonate substrate with MEMS and femto-second laser process. We have confirmed that the patterned prism structures on the substrate made artificial LED lights on empty space between the panels by light guide effect of the structure. The artificial light's lateral positions were controlled by thickness of polycarbonate substrate. This cost effective prim patterned transparent film can be utilized on digital signage LED panels to achieve good optical communication.

• The Journal of the Society of Korean Medicine Diagnostics
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• v.15 no.3
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• pp.223-234
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• 2011

Objectives: This study shows feasibility and suitability of a microelectromechanical system inertial measurement unit(MEMS-IMU) as a helpful measurement device for evaluating movement system impairment syndrome. Methods: We reviewed articles of two fields in this study. First, we reviewed articles about movement system impairment syndrome(MSIS) as a brand new viewpoint of diagnosing and treating musculoskeletal pain. Second, we reviewed articles about conventional motion analysis system and inertial measurement unit(IMU) to show the superiority of IMU in analyzing the human movement. All papers were searched by SciVerse, world largest search engine and database about many academic fields including engineering and medicine. Results: Some physical quantities of human motions can be useful to the diagnosis of MSIS, and those data can be obtained by the MEMS-IMU without the weak points of the conventional motion analysis systems. Conclusions: Using MEMS-IMU as a measurement unit for diagnosing and evaluating MSIS is feasible and can be extended to many further studies.

• Tribology and Lubricants
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• v.17 no.5
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• pp.386-390
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• 2001

Monolayers such as self-assembled monolayer (SAM) have received considerable attention to reduce stiction and friction in micro-devices and microelectromechanical systems (MEMS). Various organic molecular films were investigated to obtain better understanding of their tribological behaviors and adhesion property. The organic molecular films studied in this work are: epoxysilane SAMs, octadecyltricholosilane (OST), multi-layers composed of epoxysilane SAMs, poly[styrene-b-(ethylene-co-butylene)-b-styrene](SEBS) and compound of epoxy resin and poly (paraphenylene)(EP/PPP). The pull-off forces of these films were also obtained from force-distance curves measured in static mode of operation of atomic force microscope(AFM). Tribological tests were conducted with a ball-on-flat reciprocating friction tester. The OST showed the lowest pull-off force, indicating its low adhesion property. It was revealed that, the OST, EP/PPP and the multi-layer of epoxysilane SAMs, SEBS and EP/PPP exhibited good tribological properties at the lower load (0.3 N) whereas the OST showed best performance at the higher load (1.8 N).