• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.107.1-107.1
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• 2014

We have developed and commercialize a time-of-flight - medium energy ion scattering spectrometry (TOF-MEIS) system (model MEIS-K120). MEIS-K120 adapted a large solid acceptance angle detector that results in high collection efficiency, minimized ion beam damage while maintaining a similar energy resolution. In addition, TOF analyzer regards neutrals same to ions which removes the ion neutralization problems in absolute quantitative analysis. A TOF-MEIS system achieves $7{\times}10^{-3}$ energy resolution by utilizing a pulsed ion beam with a pulse width 350 ps and a TOF delay-line-detector with a time resolution of about 85 ps. TOF-MEIS spectra were obtained using 100 keV $He^+$ ions with an ion beam diameter of $10{\mu}m$ with ion dose $1{\times}10^{16}$ in ordinary experimental condition. Among TOF-MEIS applications, we report the quantitative compositional profiling of 3~5 nm CdSe/ZnS QDs, As depth profile and substitutional As ratio of As implanted/annealed Si, Ionic Critical Dimension (CD) for FinFET, Direct Recoil (DR) analysis of hydrogen in diamond like carbon (DLC) and InxGayZnzOn on glass substrate.

• Journal of the Korean Association of Geographic Information Studies
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• v.2 no.2
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• pp.9-14
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• 1999

This paper describes an algorithm for the correction of major radiometric errors shown in MEIS (Multi-spectral Earth Imaging System) images on board KITSAT-3. MEIS images contain various radiometric errors as also shown in the images obtained from other remote sensing sensors. This paper introduces the two major radiometric error sources shown in MEIS images and the corresponding correction algorithm. The proposed algorithm was integrated to an operational preprocessing software and validated by applying the algorithm to several tens of MEIS images. This algorithm will therefore applied operationally to raw MEIS images before they are distributed to users.

• Journal of the Korean Society for Marine Environment & Energy
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• v.8 no.1
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• pp.46-52
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• 2005

A marine environmental information system (MEIS) useful for optimal route planning of ships running in the ocean was developed. Utilizing the simulated marine environmental data produced by the European Center for Medium-Range Weather Forecasts based on global environmental data observed by satellites, the real-time forecast and long-term statistics of marine environments around planned and probable ship routes are provided. The MEIS consists of a land-based data acquisition and analysis system(MEIS-Center) and a onboard information display system(MEIS-Ship) for graphic description of marine information and optimal route planning of ships. Also, it uses of satellite communication system for data transfer. The marine environmental components of winds, waves, air pressures and storms are provided, in which winds are described by speed and direction and waves are expressed in terms of height, direction and period for both of wind waves and swells. The real-time information is characterized by 0.5° resolution, 10 day forecast in 6 hour interval and daily update. The statistic information of monthly average and maximum value expected for a return period is featured by 1.5° resolution and based on 15 year database. The MEIS-Ship include an editing tool for route simulation and the forecasting and statistic information on planned routes can be displayed in graph or table. The MEIS enables for navigators to design an optimal navigational route that minimizes probable risk and operational cost.

• Proceedings of the KSRS Conference
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• 1999.11a
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• pp.37-42
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• 1999

A compact imaging system, the Multi-spectral Earth Imaging System (MEIS) was developed and operated on an engineering test satellite, KITSAT-3 at the orbital altitude of 720 km. The MEIS takes multi-spectral images of the earth's surface with the swath width of 48 km and the ground sampling distance of 13.8 m in three spectral bands. A brief technical description of the KITSAT-3 MEIS and the result from its initial operation since early June, 1999 are presented. The quality of images produced by the KITSAT-3 MEIS was found comparable to that of images from existing commercial earth observation satellites from its preliminary assessment.

• Vacuum Magazine
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• v.2 no.2
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• pp.17-23
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• 2015

Medium Energy Ion Scattering (MEIS) has been successfully used for ultrathin film analysis such as gate oxides and multilayers due to its single atomic depth resolution in compostional and structural depth profiling. Recently, we developed a time-of-flight (TOF) MEIS for the first time, which can analyze a $10{\mu}m$ small spot. Small spot analysis would be useful for test pattern analysis in semiconductor industry and various thin film technology. The ion beam damage problem is minimized due to its improved collection efficiency by orders of magnitude and the ion beam neutralization problem is removed completely for quantitative analysis. Newly developed TOF-MEIS has been applied for gate oxides, ultra shallow junctions, nanoparticles, FINFET structures to provide compositional and structural profiles. Further development for submicron spot analysis and applications for functional nano thin films and nanostructured materials are expected for various nanotechnology and biotehnology.

• Journal of the Korean Magnetic Resonance Society
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• v.24 no.4
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• pp.117-122
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• 2020

Transcription factors are proteins that bind specific sites or elements in regulatory regions of DNA, known as promoters or enhancers, where they control the transcription or expression of target genes. MEIS1 protein is a DNA-binding domain present in human transcription factors and plays important roles in various biological functions. The hydrogen exchange rate constants of the imino protons were determined for the wild-type containing the consensus DNA-binding site for the MEIS1 and those of the mutant DNA duplexes using NMR spectroscopy. The G2A-, A3G- and C4T-mutant DNA duplexes lead to clear changes in thermal stabilities of these four consensus base pairs. These unique dynamic features of the four base pairs in the consensus 5'-TGAC-3' sequence might play crucial roles in the effective DNA binding of the MEIS1 protein.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.129-129
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• 1998

Most of the surface/interface analysis tools have limited depth profiling c capability in terms of the profiling range and the depth resolution. However, M MEIS can profile the surface and subsurface composition and structure q quantitatively and non-destructively with atomic layer depth resolution. I In this presentation, the MEIS system developed at KRISS will be briefly d described with an introduction on the principle of MEIS. Recent MEIS r results on the surface and interface composition and structural change due to i ion bombardment will be presented for preferential sputtering of T:없Os and d damage depth profiles of SHooD, Pt(l11), and Cu(l1D due to Ar+ ion b bombardment. Direct observation of strained Si lattices and its distribution i in the SHool)-SiCh interface and the initial stage of Co growth on Pt(l11) w will be reported. H surfactant effects on epitaxial growth of Ge on Si(ooD w will be discussed with STM results from SND.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.284-284
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• 2013

중 에너지 이온 산란 분석법(Medium Energy Ion Scattering Spectrometer, MEIS)은 50~500 keV로 이온을 가속 후 시료에 입사시켜 시료의 원자와 핵간 충돌로 산란되는 일차이온의 에너지를 측정하여 시료를 분석하는 기법으로, 원자층의 깊이 분해능으로 초박막의 표면 계면의 조성과 구조를 분석 할수 있는 유용한 미세 분석기술이다. 본 실험에서 에너지 70~100 keV의 He+ 이온을 사용하여 Pulse Width 1 ns의 Pulsed ion beam을 만들어 Start 신호로 사용하고 Delay-line-detector에 검출된 신호를 End 신호를 이용한 TOF-MEIS System을 개발하였다. 활용 가능한 분석시편으로 Ultra thin film 시편으로 1, 1.5, 2, 2.5, 3, 4 nm의 HfO2, 1.8, 4nm의 SiO2 시편을 분석 하였으며 Ultra Shallow Junction 시편으로 As Doped Si, Cs Doped Si 시편 및 Composition, Core/shell 구조의 Q-dot 시편으로 CdSe, CdSe/ZnS등 다양한 분석 실험을 진행 하였다. Composition, Core/shell 구조의 Q-dot 시편은 Diamond Like Carbon(DLC)의 Substrate에 Mono-layer로 형성하여 분석하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.51.2-51.2
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• 2015

Understanding interfacial phenomena has been one of the main research issues not only in semiconductors but only in life sciences. I have been trying to meet the atomic scale surface and interface analysis challenges from semiconductor industries and furthermore to extend the application scope to biomedical areas. Optical imaing has been most widely and successfully used for biomedical imaging but complementary ion beam imaging techniques based on mass spectrometry and ion scattering can provide more detailed molecular specific and nanoscale information In this presentation, I will review the 27 years history of medium energy ion scattering (MEIS) development at KRISS and DGIST for nanoanalysis. A electrostatic MEIS system constructed at KRISS after the FOM, Netherland design had been successfully applied for the gate oxide analysis and quantitative surface analysis. Recenlty, we developed time-of-flight (TOF) MEIS system, for the first time in the world. With TOF-MEIS, we reported quantitative compositional profiling with single atomic layer resolution for 0.5~3 nm CdSe/ZnS conjugated QDs and ultra shallow junctions and FINFET's of As implanted Si. With this new TOF-MEIS nano analysis technique, details of nano-structured materials could be measured quantitatively. Progresses in TOF-MEIS analysis in various nano & bio technology will be discussed. For last 10 years, I have been trying to develop multimodal nanobio imaging techniques for cardiovascular and brain tissues. Firstly, in atherosclerotic plaque imaging, using, coherent anti-stokes raman scattering (CARS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS) multimodal analysis showed that increased cholesterol palmitate may contribute to the formation of a necrotic core by increasing cell death. Secondly, surface plasmon resonance imaging ellipsometry (SPRIE) was developed for cell biointerface imaging of cell adhesion, migration, and infiltration dynamics for HUVEC, CASMC, and T cells. Thirdly, we developed an ambient mass spectrometric imaging system for live cells and tissues. Preliminary results on mouse brain hippocampus and hypotahlamus will be presented. In conclusions, multimodal optical and mass spectrometric imaging privides overall structural and morphological information with complementary molecular specific information, which can be a useful methodology for biomedical studies. Future challenges in optical and mass spectrometric imaging for new biomedical applications will be discussed.

• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.97-102
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• 1997

A medium energy ion scattering spectroscopy(ME1S) system has been developed and tested.In the MEIS system a toroidal electrostatic energy analyzer(TEA) and a two dimensional position sensitivedetector(PSD) were used. The energy resolution of MEIS system was estimated to be less than $4\times 10^{-3}$ and the overall angular resolution was less than 0.3". From the MEIS spectrum of $Ta_2O_5$(300 $\AA$)/ onSi analyzedousing 60 keV $H^+$, the energy loss factor(S.1 and depth resolution were estimated to he 42 eV/$\AA$ and 9.7 $\AA$, respectively. Also Si(100) surface was analyzed using the MEIS system. A random MElSspectrum was obtained from thc Si(100) covered with native oxide layers. At the double alignment condition, MElS spectrum showed ;i Si surface peak, a oxygen peak and a carbon peak.nd a carbon peak.