• 한국신재생에너지학회:학술대회논문집
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• 2009.11a
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• pp.382-382
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• 2009

염료감응형 태양전지의 구성체 중 전극으로 연구 되어 지고 있는 $TiO_2$는 기존에 대량 생산이 가능한 spin coating법, screen printing법, spray법의 연구가 이루어져 왔으나 고 효율 태양전지에 쓰이는 전극 시스템에 비해 고 분산성을 지닌 $TiO_2$페이스트를 제조 하는데 어려움이 있다. 그리고 플렉시블 디스플레이 소자의 응용을 위해서는 소자 공정 온도인 $250^{\circ}C$ 이하의 공정 온도가 요구 되어 지므로 고온공정인 CVD법은 이에 적합하지 않다. 이에 본 연구는 진공 증착 방법인 광원자층증착법을 이용하여 $150^{\circ}C$이하의 저온공정온도에서도 적용이 가능한 $TiO_2$ 박막을 185nm의 UV light를 조사하여 glass 기판위에 제조 하고 그에 따른 박막의 물성 분석을 하였다. Mo source로는 titanium tetraisopropoxide(TTIP)와 reactant gas 로는 $H_2O$를 사용하였으며 불활성 기체인 Ar 가스는 purge 가스로 각각 사용하였다. $100^{\circ}C{\sim}250^{\circ}C$ 공정온도를 변수로 $TiO_2$ 박막을 제조 하였으며 제조된 $TiO_2$ 박막의 물성 분석을 위해 FESEM, TEM을 이용하여 표면 및 두께를 분석하였다. 또한 $100^{\circ}C$ 400 cycles에서 약 12nm 막 두께를 관찰 할 수 있었으며 그 결과 박막의 성장률이 $0.3{\AA}$/cycle 임을 확인 할 수 있었다. 그리고 UV-VIS을 이용하여 박막의 좌외선에 대한 흡수도 및 투과도 분석을 하였다. 또한 XPS 성분 분석을 통하여 $100^{\circ}C$의 저온 공정에서 형성된 박막이 $TiO_2$임을 확인 하였다. 이러한 결과에서 185nm의 UV light에 의한 광원자층 증착법으로 $100^{\circ}C$의 저온에서도 $TiO_2$ 박막이 증착 되는 것을 확인 할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.254-254
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• 2011

The memories with nano-particles are very attractive because they are promising candidates for low operating voltage, long retention time and fast program/erase speed. In recent, various nano-floating gate memories with metal-oxide nanocrystals embedded in organic and inorganic layers have been reported. Because of the carrier generation in semiconductor, induced photon pulse enhanced the program/erase speed of memory device. We studied photo-induced electrical properties of these metal-oxide nanocrystal memory devices. At first, 2~10-nm-thick Sn and In metals were deposited by using thermal evaporation onto Si wafer including a channel with $n^+$ poly-Si source/drain in which the length and width are 10 ${\mu}m$ each. Then, a poly-amic-acid (PAA) was spin coated on the deposited Sn film. The PAA precursor used in this study was prepared by dissolving biphenyl-tetracarboxylic dianhydride-phenylene diamine (BPDA-PDA) commercial polyamic acid in N-methyl-2-pyrrolidon (NMP). Then the samples were cured at 400$^{\circ}C$ for 1 hour in N atmosphere after drying at 135$^{\circ}C$ for 30 min through rapid thermal annealing. The deposition of aluminum layer with thickness of 200 nm was followed by using a thermal evaporator, and then the gate electrode was defined by photolithography and etching. The electrical properties were measured at room temperature using an HP4156a precision semiconductor parameter analyzer and an Agilent 81101A pulse generator. Also, the optical pulse for the study on photo-induced electrical properties was applied by Xeon lamp light source and a monochromator system.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.68-68
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• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.158-158
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• 2012

A new kind of organic-inorganic hybrid polymer, poly(tetraphenyl)silole siloxane (PSS), was invented and synthesized for realization of its unique charge trap properties. The organic portions consisting of (tetraphenyl)silole rings are responsible for electron trapping owing to their low-lying LUMO, while the Si-O-Si inorganic linkages of high HOMO-LUMO gap provide the intrachain energy barrier for controlling electron transport. Such an alternation of the organic and inorganic moieties in a polymer may give an interesting quantum well electronic structure in a molecule. The PSS thin film was fabricated by spin-coating of the PSS solution in THF organic solvent onto Si-wafer substrates and curing. The electron trapping of the PSS thin films was confirmed by the capacitance-voltage (C-V) measurements performed within the metal-insulator-semiconductor (MIS) device structure. And the quantum well electronic structure of the PSS thin film, which was thought to be the origin of the electron trapping, was investigated by a combination of theoretical and experimental methods: density functional theory (DFT) calculations in Gaussian03 package and spectroscopic techniques such as near edge X-ray absorption fine structure spectroscopy (NEXAFS) and photoemission spectroscopy (PES). The electron trapping properties of the PSS thin film of quantum well structure are closely related to intra- and inter-polymer chain electron transports. Among them, the intra-chain electron transport was theoretically studied using the Atomistix Toolkit (ATK) software based on the non-equilibrium Green's function (NEGF) method in conjunction with the DFT.

• Journal of Food Hygiene and Safety
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• v.15 no.1
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• pp.1-4
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• 2000

Electron spin resonance (ESR) spectroscopy was used to investigate the effect of irradiation dose on the ESR signal intensity of irradiated crabs and the stability of these radicals under 9 weeks of storage. Swimming and small crabs were irradiated with doses of 0, 1, 3, 5 and 7 kGy using a Co-60 irradiator at ambient temperature. A claw, a walking leg and a cars- pace of the crab pieced and dried were placed in a resonant quart tube within an EPR X-band spectrometer. The irradiated crabs presented an asymmetric absorption in shape at g$_1$=2.002 $\pm$ 0.003 and g$_2$=1.998$\pm$0.005, and were different from the non-irradiated ones. The intensity of the ESR signals was greatest in the claw, intermediate in the carapace and lowest in the walking leg. Samples given low and high doses of irradiation could also be distinguished. The ESR signal after irradiation was stable, even after a 9-week storage.

• Korean Chemical Engineering Research
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• v.55 no.6
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• pp.830-836
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• 2017

Hydrophilic coating solutions were prepared by reacting a silane coupling agent, GPTMS (3-glycidoxypropyl trimethoxysilane) with colloidal silica. Hydrophilic coating films were also obtained by depositing the hydrophilic coating solutions on polycarbonate substrates by spin-coating and subsequently by thermal curing at $120^{\circ}C$. During this process, the effect of average particle sizes of colloidal silica was studied on the properties of coating films. As a result, coating film, prepared from colloidal silica with average particle size of 25 nm, showed a low contact angle of $20^{\circ}$ and a good pencil hardness of H. On the other hand, coating films, prepared from colloidal silica with average particle sizes of 15 nm and 45 nm, exhibited high contact angles of $27^{\circ}$ and $36^{\circ}$ and pencil hardness of H and B, respectively.

• Journal of the Korean Magnetics Society
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• v.15 no.2
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• pp.106-108
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• 2005

The rutile polycrystal $Ti_{0.99}\;^{57}Fe_{0.01}O_2$ prepared with $^{57}Fe$ enriched iron have been studied by $M\ddot{o}ssbauer$ spectroscopy, X-ray diffraction and VSM. The $M\ddot{o}ssbauer$ spectrum of $Ti_{0.99}\;^{57}Fe_{0.01}O_2$ consists of a ferromagnetic and a paramagnetic phase over all temperature ranging from 4 to 300 K. Isomer shifts indicate $Fe^{2+}$ for the ferromagnetic phase, but $Fe^{3+}$ for the paramagneic phase of $Ti_{0.99}\;^{57}Fe_{0.01}O_2$ sample. It is noted that the magnetic hyperfine field of ferromagnetic phase had the value about 1.48 times as large as that of $\alpha$-Fe. The XRD data for $Ti_{0.99}\;^{57}Fe_{0.01}O_2$ showed a pure rutile phase with tetragonal structures without any segregation of Fe into particulates within the instrumental resolution limit The magnetic hysteresis (M-H) curve at room temperature showed an obvious ferromagnetic behavior and the magnetic moment per Fe atom under the applied field of 1 T was estimated to be about $0.71{\mu}_B$, suggesting a low spin configuration of Fe ions.

• Polymer(Korea)
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• v.35 no.5
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• pp.375-377
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• 2011

$PbTiO_3$/P(VDF/TrFE) 0~3 composites thin films with 0.10 and 0.13 of ceramic volume fraction factor have been fabricated by two-step spin coating technique and analyzed. 0~3 connectivity of $PbTiO_3$/P(VDF/TrFE) composites film was observed successfully by SEM micrography. The SEM picture confirmed 0~3 connectivity. And, in all the properties, 0~3 $PbTiO_3$/P(VDF/TrFE) composites film was superior to P(VDF/TrFE) copolymer. Therefore, with a good low-dielectric constant and a high pyroelectric coefficient, the composite thin films can be used for a new pyroelectric infrared sensor of higher performance.

• Journal of Convergence for Information Technology
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• v.7 no.5
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• pp.53-58
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• 2017

In the age of oil exhaustion, low cost, semi-transparent solar cell, the dye-sensitized solar cell (DSC) has attracted significant attention since 1991 of $Gr{\ddot{a}}tzel$ report. To enhance the light-harvest capability of the photoelectric electrode, and efficiency of photoelectric transformation of the DSC, scattering layer of various structure have been proposed to photoelectric electrode materials. The scattering center of scattering layer needs the large titanium dioxide nanoparticles of 250 - 300 nm in diameter. In this study, the large sized $TiO_2$ nanocyrstals of around 300 nm were synthesized using the modified sol-gel process. According to the analysis of XRD and TEM, the synthesized $TiO_2$ nanoparticles exhibit single crystals of anatase phase. The optical transmittance of the synthesized titanium dioxide film prepared by spin coating is around 50% at 550 nm. It is suitable for scattering layer as a scattering center, and expected to enhance the efficiency of photoelectric transformation of the DSC.

• Journal of the Semiconductor & Display Technology
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• v.4 no.2 s.11
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• pp.15-19
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• 2005

The organic light-emitting devices(OLEDs) based on fluorescence have low efficiency due to the requirement of spin-symmetry conservation. By using the phosphorescent material, the internal quantum efficiency can reach 100$\%$, compared to 25$\%$ in case of the fluorescent material [1]. Thus recently phosphorescent OLEDs have been extensively studied and showed higher internal quantum efficiency than conventional OLEDs. In this study, we have applied a new Ir complex as a red dopant and fabricated a red phosphorescent OLED on a flexible PC(Polycarbonate) substrate. Also, we have investigated the electrical and optical properties of the devices with a structure of A1/LiF/Alq3/(RD05 doped)BAlq/NPB/2-TNAIA/ITO/PC substrate. Our device showed the lightening efficiency of > 30 cd/A at an initial brightness of 1000 cd/$m^{2}$. The CIE(Commission Internationale de L'Eclairage) coordinates for the device were (0.62,0.37) at a current density of 1 mA/$cm^{2}$. In addition, although the sheet resistance of ITO films on PC substrate is higher than that on glass substrate, the flexible OLED showed much better lightening efficiency without much increase in operating voltage.