• Journal of the Korean Vacuum Society
• /
• 제18권3호
• /
• pp.186-196
• /
• 2009

Since it is difficult to extract a high flux ion beam directly at an energy of hyperthermal range ($1{\sim}100\;eV$), especially, lower than 50 eV, the ions should be neutralized into neutral particles and extracted as a neutral beam. A plasma source required to generate and efficiently transport high flux hyperthermal neutral beams should be easily scaled up and produce a high ion density (${\ge}10^{11}\;cm^{-3}$) even at a low working pressure (${\le}$ 0.3 mTorr). It is suggested that the required plasma source can be realized by Electron Cyclotron Resonance (ECR) plasmas with diverse magnetic field configurations of permanent magnets such as a planar ECR plasma source with magnetron field configuration and cylindrical one with axial magnetic fields produced by permanent magnet arrays around chamber wall. In both case of the ECR sources, the electron confinement is based on the simple mirror field structure and efficiently enhanced by electron drifts for producing the high density plasma even at the low pressure.

• Progress in Medical Physics
• /
• 제26권3호
• /
• pp.178-184
• /
• 2015

The Markus ionization chamber(R) is a small plane parallel ionization chamber widely used in clinical electron beam dosimetry. Plane parallel chambers were recommended for low energy electron dosimetry with the beam quality at $R_{50}<4.0g/cm^2$ (${\bar{E}}{\approx}10MeV$) according to TRS-398 protocol. However, the quality correction factors ($k_{Q,Q_0}$) of the Markus chamber was not presented in TRS-398 protocol for electron beam quality at $R_{50}<2.0g/cm^2$ (${\bar{E}}{\approx}4MeV$). In this study, the $k_{Q,Q_0}$ factors of the Markus chambers (PTW-34045) for beam qualities at $R_{50}=1.0$, 1.4, 2.0, 2.5, 3.0, and $5.0g/cm^2$ were determined by Monte Carlo calculations (DOSRZnrc/EGSnrc) and the dosimetric formalism of quality correction factor. The derived $k_{Q,Q_0}$ values were evaluated using the produced data based on TRS-398 and TG-51 protocols and known values for the Markus chamber.

• Korean Journal of Materials Research
• /
• 제12권3호
• /
• pp.195-199
• /
• 2002

Planar Hall effect of ferromagnetic GaMnAs thin films was investigated for the first time. The films were grown in an optimized growth condition via molecular beam epitaxy at low temperatures. For the optimization of the growth conditions, we used reflection high-energy electron diffraction, electrical conductivity, double crystal x-ray diffraction, and superconducting quantum interference device measurements techniques. We observed that the difference between the longitudinal resistance and the transverse resistance matches the planar Hall resistance. The ratio of the planar Hall resistance at saturation magnetic field to that at zero reached above 500%.

• Korean Journal of Materials Research
• /
• 제22권10호
• /
• pp.539-544
• /
• 2012

We have grown AlN nanorods and AlN films using plasma-assisted molecular beam epitaxy by changing the Al source flux. Plasma-assisted molecular beam epitaxy of AlN was performed on c-plane $Al_2O_3$ substrates with different levels of aluminum (Al) flux but with the same nitrogen flux. Growth behavior of AlN was strongly affected by Al flux, as determined by in-situ reflection high energy electron diffraction. Prior to the growth, nitridation of the $Al_2O_3$ substrate was performed and a two-dimensionally grown AlN layer was formed by the nitridation process, in which the epitaxial relationship was determined to be [11-20]AlN//[10-10]$Al_2O_3$, and [10-10]AlN//[11-20]$Al_2O_3$. In the growth of AlN films after nitridation, vertically aligned nanorod-structured AlN was grown with a growth rate of $1.6{\mu}m/h$, in which the growth direction was <0001>, for low Al flux. However, with high Al flux, Al droplets with diameters of about $8{\mu}m$ were found, which implies an Al-rich growth environment. With moderate Al flux conditions, epitaxial AlN films were grown. Growth was maintained in two-dimensional or three-dimensional growth mode depending on the Al flux during the growth; however, final growth occurred in three-dimensional growth mode. A lowest root mean square roughness of 0.6 nm (for $2{\mu}m{\times}2{\mu}m$ area) was obtained, which indicates a very flat surface.

• Radiation Oncology Journal
• /
• 제7권1호
• /
• pp.85-92
• /
• 1989

Dosimerty based on electron spin resonance (ESR) analysis of radiation induced free radicals in amino acids is relevant to biological dosimetry applications. Alanine detectors are without walls and are tissue equivalent. Therefore, alanine ESR dosimetry looks promising for use in the therapy level. The dose range of the alanine/ESR dosimetry system can be extended down to 1 Gy. In water phantom the absorbed dose of electrons generated by a medical linear accelerator of different initial energies $(6\~21MeV)$ and therapeutic dose levels (1~60 Gy) was measured. Furthermore, depth dose measurements carried out with alanine dosimeters were compared with ionization chamber measurements. As the results, the measured absorbed doses for shallow depth of initial electron energies above 15 MeV were higher by$2\~5\%$ than those calculated by nominal energy $C_E$ factors. This seems to be caused by low energy scattered beams generated from the scattering foil and electron cones of beam projecting device in medical linear accelerator.

• Proceedings of the Korean Vacuum Society Conference
• /
• 한국진공학회 2011년도 제40회 동계학술대회 초록집
• /
• pp.41-41
• /
• 2011

Flash memory에서 tunnel oxide film은 electron tunnelling 현상을 이용하여 gate에 전하를 전달하는 통로로 사용되고 있다. 특히, tunnel oxide film 내부의 charge trap 현상과 불순물이 소자 특성에 직접적인 영향을 주고 있어, 후속 N2O/NO 열처리 공정에서 SiO2/Si 계면에 nitrogen을 주입하여 tunnel oxide film 특성을 개선하고 있다. 따라서 N2O/NO 열처리 공정 최적화를 위해서는 tunnel oxide film 내 N 농도와 분포에 대한 정확한 평가가 필수적이다[1]. 본 실험에서는 low energy magnetic SIMS를 이용하여 N2O로 열처리된 tunnel oxide film 내의 N농도를 보다 정확하게 평가하고자 하였다. 사용된 시료는 Si substrate에 oxidation 이후 N2O 열처리를 진행하여 tunnel oxide를 형성시켰으며, 분석 impact energy는 surface effect최소화와 최상의 depth resolution 확보를 위해 250eV를 사용하였으며, matrix effect와 mass interference를 방지하기 위해 MCs+ cluster mode[2]로 CsN signal를 검출하였다. 실험 결과, 특정 primary beam 입사각도에서 nitrogen depth resolution 저하 현상이 발생하였고, SIMS crater 표면이 매우 거칠게 나타났다. 이에, Depth resolution 저하 현상을 개선하기 위해 극한의 glancing 입사각 조건으로 secondary extraction voltage 변화를 통해 depth resolution이 개선되는 최적의 impact energy와 primary beam 입사각 조건을 확보하였다. 그 결과 nitrogen의 depth resolution은 1.6nm의 depth resolution을 확보하였으며, 보다 정확한 N 농도와 분포를 평가할 수 있게 되었다.

• Progress in Medical Physics
• /
• 제26권1호
• /
• pp.1-5
• /
• 2015

The C-band compact linear accelerator (linac) is being developed at Dongnam Institute of radiological & Medical Sciences (DIRAMS) for medical and industrial applications. This paper was focused on the output measurement of the electron beam generated from the prototype electron linac. The dose rate was measured in unit of cGy/min per unit pulse frequency according to the IAEA TRS-398 protocol. Exradin-A10 Markus type plane parallel chamber used for the measurement was calibrated in terms of dose to water at the reference depth in water. The beam quality index ($R_{50}$) was determined by the radiochromic film with a solid water phantom approximately due to low energy electrons. As a result, the determined electron beam output was $17.0cGy/(min{\cdot}Hz$. The results were used to monitor the accelerator performance during the development procedure.

• 한국가시화정보학회:학술대회논문집
• /
• 한국가시화정보학회 2002년도 추계학술대회 논문집
• /
• pp.31-34
• /
• 2002

Imaging techniques using x-ray beam at high energies (>6KeV) such as contact radiography, projection microscopy, and tomography have been used to nondestructively discern internal structure of objects in material science, biology, and medicine. This paper introduces the x-ray micro-imaging method using 1B2 micro-probe line of PAL (Pohang Accelerator Laboratory). Cross-sectional information on low electron density materials can be obtained by probing a sample with coherent synchrotron x-ray beam in an in-line holography setup. Living organism such as plants, insects are practically transparent to high energy x-rays and create phase shift images of x-ray wave front. X-ray micro-images of micro-bubbles of $20\~120\;{\mu}m$ diameter in an opaque tube were recorded. Clear phase contrast images were obtained at Interfaces between bubbles and surrounding liquid due to different decrements of refractive index.

• Proceedings of the KIEE Conference
• /
• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
• /
• pp.214-216
• /
• 2005

The PAL (Pohang Accelerator Laboratory) is persuading to construct a SASE-XFEL facility (PAL XFEL) that supplies coherent X-rays. The bright and stable electron beam is essential for the PAL XEL. The electron beams has to have an emittance of 1.0 mm-mrad, a peak current of 3 kA, and a low energy spread of 1.0 MeV. In order to provide reasonably stable SASE output, the RF stability of 0.02% rms is required for both RF phase and amplitude. This is a technologically challenging issue for PAL XFEL. An inverter technology is to be applied to charge the PFN of a new modulator. Therefore, a new inverter system should provide very stable charging performances. This paper presents the development of an ultra stable klystron-modulator with an inverter power supply.

• Journal of the Korean Chemical Society
• /
• 제21권4호
• /
• pp.284-292
• /
• 1977

Epoxy-methacrylate prepolymer was synthesized from methacrylic acid and a diglycidyl ether type low molecular weight epoxy resin, and the electron beam curing of the prepolymer was studied using styrene and polyethyleneglycol dimethacrylates as comonomers. The esterification was carried out quantitatively without any side reaction adding more than 250∼300ppm hydroquinone and less than $1{\%}$ (wt) triethanolamine by wt. of methacrylate acid, respectively. In the radiation curing under air atmosphere, the maximum gel fraction was observed at 10∼$30{\%}$ monomer contents. The rate of gel formation was decreased by the presence of unreacted epoxy group and acid in the prepolymer and increased with increasing degree of polymerization of polyethyleneglycol block in the dimethacrylates. Considerable oxygen effect in the curing, particularly when polyethyleneglycol dimethacrylate was used as a comonomer, was recognized through the differences of the product properties, though no remarkable differences were found in the rate of gel formation in air and nitrogen atmosphere.