Growth Characteristics of AlN by Plasma-Assisted Molecular Beam Epitaxy with Different Al Flux |
Lim, Se Hwan
(Graduate School of Green Energy Technology, Chungnam National University)
Lee, Hyosung (Department of Material Science and Engineering, Chungnam National University) Shin, Eun-Jung (Graduate School of Green Energy Technology, Chungnam National University) Han, Seok Kyu (Department of Material Science and Engineering, Chungnam National University) Hong, Soon-Ku (Graduate School of Green Energy Technology, Chungnam National University) |
1 | R. Dingle, D. D. Sell, S. E. Stokowski and M. Ilegems, Phys. Rev. B, 4, 1211 (1971). DOI |
2 | J. Wu, W. Walukiewicz, K. M. Yu, J. W. Ager, E. E. Haller, H. Lu, W. J. Schaff, Y. Saito and Y. Nanishi, Appl. Phys. Lett., 80, 3967 (2002). DOI ScienceOn |
3 | P. B. Perry and R. F. Rutz, Appl. Phys. Lett., 33, 319 (1978). DOI |
4 | Y. Taniyasu, M. Kasu and T. Makimoto, Nature, 441, 325 (2006). DOI ScienceOn |
5 | H. X. Jiang and J. Y. Lin, Opto-Electronics Review, 10, 271 (2002). |
6 | T. Onuma, S. F. Chichibu, T. Sota, K. Asai, S. Sumiya, T. Shibata and M. Tanaka, Appl. Phys. Lett., 81, 652 (2002). DOI ScienceOn |
7 | W. M. Yim, E. J Stofko, P. J. Zanzucchi, J. I. Pankove, M. Ettenbergm and S. L. Gilbert, J. Appl. Phys., 44, 292 (1973). DOI ScienceOn |
8 | L. Chen and B. J. Skromme, R. F. Dalmau, R. Schlesser, Z. Sitar, C. Chen, W. Sun, J. Yang, M. A. Khan, M. L. Nakarmi, J. Y. Lin and H. -X. Jiang, Appl. Phys. Lett., 85, 4334 (2004). DOI ScienceOn |
9 | A. Kinoshita, H. Hirayama, M. Ainoya, Y. Aoyagi and A. Hirata, Appl. Phys. Lett., 77, 175 (2000). DOI ScienceOn |
10 | H. Hirayama, S. Fujikawa, N. Noguchi, J. Norimatsu, T. Takano, K. Tsubaki and N. Kamata, Phys. Status Solidi A, 206, 1176 (2009). DOI ScienceOn |
11 | M. Kneissl, T. Kolbe, C. Chua, V. Kueller, N. Lobo, J. Stellmach, A. Knauer, H. Rodriguez, S. Einfeldt, Z. Yang, N. M. Johnson and M. Weyers, Semicond. Sci. Technol., 26, 014036 (2011). DOI ScienceOn |
12 | Y. Liao, C. Thomidis, C. Kao and T. D. Moustakas, Appl. Phys. Lett., 98, 081110 (2011). DOI ScienceOn |
13 | N. Grandjean, J. Massies, Y. Martinez, P. Vennegues, M. Leroux, M. Laugt, J. Cryst. Growth, 178, 220 (1997). DOI ScienceOn |
14 | S. K. Han, J. H. Kim, S. K. Hong, J. H. Song, J. H. Song, J. W. Lee, J. Y. Lee, S. I. Hong and T. Yao, J. Cryst. Growth, 312, 2196 (2010). DOI ScienceOn |
15 | H. Lee, S. K. Han, D. S. Lim, E. J. Shin, S. H. Lim, S. K. Hong, M. Jeong, J. Y. Lee and T. Yao, Kor. J. Mat. Res., 21, 634 (2011) (in Korean). DOI ScienceOn |