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Atomic layer chemical vapor deposition of Zr $O_2$-based dielectric films: Nanostructure and nanochemistry

  • Dey, S.K.
    • Electrical & Electronic Materials
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    • v.16 no.9
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    • pp.64.2-65
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    • 2003
  • A 4 nm layer of ZrOx (targeted x-2) was deposited on an interfacial layer(IL) of native oxide (SiO, t∼1.2 nm) surface on 200 mm Si wafers by a manufacturable atomic layer chemical vapor deposition technique at 30$0^{\circ}C$. Some as-deposited layers were subjected to a post-deposition, rapid thermal annealing at $700^{\circ}C$ for 5 min in flowing oxygen at atmospheric pressure. The experimental x-ray diffraction, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and high-resolution parallel electron energy loss spectroscopy results showed that a multiphase and heterogeneous structure evolved, which we call the Zr-O/IL/Si stack. The as-deposited Zr-O layer was amorphous $ZrO_2$-rich Zr silicate containing about 15% by volume of embedded $ZrO_2$ nanocrystals, which transformed to a glass nanoceramic (with over 90% by volume of predominantly tetragonal-$ZrO_2$(t-$ZrO_2$) and monoclinic-$ZrO_2$(m-$ZrO_2$) nanocrystals) upon annealing. The formation of disordered amorphous regions within some of the nanocrystals, as well as crystalline regions with defects, probably gave rise to lattice strains and deformations. The interfacial layer (IL) was partitioned into an upper Si $o_2$-rich Zr silicate and the lower $SiO_{x}$. The latter was sub-toichiometric and the average oxidation state increased from Si0.86$^{+}$ in $SiO_{0.43}$ (as-deposited) to Si1.32$^{+}$ in $SiO_{0.66}$ (annealed). This high oxygen deficiency in $SiO_{x}$ indicative of the low mobility of oxidizing specie in the Zr-O layer. The stacks were characterized for their dielectric properties in the Pt/{Zr-O/IL}/Si metal oxide-semiconductor capacitor(MOSCAP) configuration. The measured equivalent oxide thickness (EOT) was not consistent with the calculated EOT using a bilayer model of $ZrO_2$ and $SiO_2$, and the capacitance in accumulation (and therefore, EOT and kZr-O) was frequency dispersive, trends well documented in literature. This behavior is qualitatively explained in terms of the multi-layer nanostructure and nanochemistry that evolves.ves.ves.

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An Electrochemical Enzyme Immunochip Based on Capacitance Measurement for the Detection of IgG

  • Yi, Seung-Jae;Choi, Ji-Hye;Kim, Hwa-Jung;Chang, Seung-Cheol;Park, Deog-Su;Kim, Kyung-Chun;Chang, Chulhun L.
    • Bulletin of the Korean Chemical Society
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    • v.32 no.4
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    • pp.1298-1302
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    • 2011
  • This study describes the development of an electrochemical array immunochip for the detection of IgG. Interdigitated immunochip platforms were fabricated by sputtering gold on a glass wafer by using MEMS process and then were coated with Eudragit S100, an enteric polymer, forming an insulating layer over the working area of immunochips. The breakdown of the polymer layer was exemplified by the catalytic action of urease which, in the presence of urea, caused an alkaline pH change. This subsequently caused an increase of the double layer capacitance of the underlying electrode. Used in conjunction with a competitive immunoassay format, this allowed the ratio of initial to final electrode capacitance to be directly linked with the concentration of analyte, i.e. IgG. Responses to IgG could be detected at IgG concentration as low as $250\;ngmL^{-1}$ and showed good linearity up to IgG concentration as high as $20\;{\mu}gmL^{-1}$.

Development of Fly Ash/slag Cement Using Alkali-activated Reaction(2) - Reaction products and microstructure - (알칼리 활성반응을 이용한 플라이 애쉬/슬래그 시멘트 개발(2) - 반응생성물과 미세구조 -)

  • Park, Sang-Sook;Kang, Hwa-Young;Han, Kwan-Su
    • Journal of Korean Society of Environmental Engineers
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    • v.29 no.7
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    • pp.810-819
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    • 2007
  • Investigation of alkali activation of fly ash and blast furnace slag was carried out using waterglass and sodium hydroxide. XRD, FTIR, $^{29}Si$ and $^{27}Al$ NMR, TGA and SEM were used to observed the reaction products and microstructure of the fly ash/slag cement (FSC) pastes. The reaction products were amorphous or low-ordered calcium silicate hydrate and aluminosilicate gel produced from alkali activation of blast furnace slag and fly ash, respectively. On the basis of this investigation, waterglass solution with a modulus(Ms) of 1.0 and 1.2 is recommended for alkali activation of fly ash and blast furnace slag. Morphology of FSC pastes alkali-activated with Ms of 1.0 and 1.2 shows a more solid and continuous matrix due to restructuring of gel-like reaction products from alkali-activated fly ash and blast furnace slag together with another hydrolysis product(i.e., silica gel) from water glass.

Electronic, Optical and Electrical Properties of Nickel Oxide Thin Films Grown by RF Magnetron Sputtering

  • Park, Chanae;Kim, Juhwan;Lee, Kangil;Oh, Suhk Kun;Kang, Hee Jae;Park, Nam Seok
    • Applied Science and Convergence Technology
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    • v.24 no.3
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    • pp.72-76
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    • 2015
  • Nickel oxide (NiO) thin films were grown on soda-lime glass substrates by RF magnetron sputtering method at room temperature (RT), and they were post-annealed at the temperatures of $100^{\circ}C$, $200^{\circ}C$, $300^{\circ}C$ and $400^{\circ}C$ for 30 minutes in vacuum. The electronic structure, optical and electrical properties of NiO thin films were investigated using X-ray photoelectron spectroscopy (XPS), reflection electron energy spectroscopy (REELS), UV-spectrometer and Hall Effect measurements, respectively. XPS results showed that the NiO thin films grown at RT and post annealed at temperatures below $300^{\circ}C$ had the NiO phase, but, at $400^{\circ}C$, the nickel metal phase became dominant. The band gaps of NiO thin films post annealed at temperatures below $300^{\circ}C$ were about 3.7 eV, but that at $400^{\circ}C$ should not be measured clearly because of the dominance of Ni metal phase. The NiO thin films post-annealed at temperatures below $300^{\circ}C$ showed p-type conductivity with low electrical resistivity and high optical transmittance of 80% in the visible light region, but that post-annealed at $400^{\circ}C$ showed n-type semiconductor properties, and the average transmittance in the visible light region was less than 42%. Our results demonstrate that the post-annealing plays a crucial role in enhancing the electrical and optical properties of NiO thin films.

Compact AUV platform system designed for the experiment of underwater multi-agent development

  • Watanabe, Keisuke
    • 제어로봇시스템학회:학술대회논문집
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    • 2005.06a
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    • pp.2036-2041
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    • 2005
  • The underwater multi-agent technology has many potential for the various activities related to ocean development/conservation in the near future. For example, in such fields as water pollution investigation, aquaculture control, or coral reef research, we feel a growing need for a system that realizes underwater continuous monitoring in the wide rang e. In this case, the target monitoring area will be sliced planar hierarchically toward the depth as monitoring layers, and many AUVs arranged on each layer track the given trajectory and gather various environmental information continuously, with communicating each other in the layer or with other layers. To realize those systems we need to develop AUV multi-agent technologies. So we are now building basic systems for basin experiment for the development of AUV multi-agent behavior. We must experience many situations and problems to be solved for the development of its elemental technologies by using real systems as well as our computer simulations. In this paper we introduce our concept of the experiment in the near future and the hardware/software design of our two types of handy AUVs and ultrasound ranging/communication system for that experiment. One AUV is designed using a 17inches-diameter glass sphere with DOS/V and RT-Linux based subsystems, which is intended to use not only in the basin but also in the calm real sea. The other AUV is designed for the basin experiment using a 7inches-diameter acrylic sphere with low-cost embedded system with SH-2 based subsystems. The basin experiment to verify the basic AUV facilities and ultrasound ranging for position detection was carried out.

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Characterization of CdS Thin Films for Compound Photovoltaic Applications by Atmospheres of Rapid Thermal Process (급속열처리 분위기에 따른 화합물 태양전지용 CdS 박막의 특성변화)

  • Park, Seung-Beum;Kwon, Soon-Il;Lee, Seok-Jin;Jung, Tae-Hwan;Yang, Kea-Joon;Lim, Dong-Gun;Park, Jae-Hwan;Song, Woo-Chang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.105-106
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    • 2008
  • Structural, optical and electrical properties of CdS films deposited by chemical bath deposition (CBD), which are a very attractive method for low-cost and large-area solar cells, are presented. Cadmium sulfide (CdS) is II-VI semiconductor with a wide band gap of approximately 2.42 eV. CdS films have a great application potential such as solar cell, optical detector and optoelectronics device. In this paper, effects of Rapid Thermal Process (RTP) on the properties of CdS films were investigated. The CdS films were prepared on a glass by chemical bath deposition (CBD) and subsequently annealed at standard temperature $(400^{\circ}C)$ and treatment time (10 min) in various atmospheres (air, vacuum and $N_2$). The CdS films treated RTP in $N_2$ for to min were showed larger grain size and higher carrier density than the other samples.

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Effect of Mixing Ratio of Amphoteric and Anionic Latices on Print Quality of Coated Papers (라텍스의 혼합비율이 도공지 품질에 미치는 영향)

  • 강태근;박규재;이용규
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.31 no.1
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    • pp.72-79
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    • 1999
  • The binder plays important roles in determining the quality of pigment coating. In addition to its primary role of binding the pigment to the base paper, the binder performs several other important functions. The binder, also referred to as the adhesive, is the dominant in the aqueous phase of the formulation. Thus it plays a major role in determining viscosity, rheology, water release, and setting time for the coating. Latices based on styrene-butadiene dominate the market for synthetic paper coating binders. Consumption is high and is expected to increase further due to the present tendeyncy toward high-solids coating. The purpose of this study is understanding the impact of various parameters of latex(i.e. Tg, Particle size) affecting prontabilities and optical properties of the coated papers, as well as providing basic information on the use of amphoteric latex for improving print qualities of coated papers. Recently, amphoteric latices, Which are cationic at low pH's but turn anionic at high pH's have attracted interests of paper scientists and engineers. Therefore we investigated the effect of the Tg(glass transition temperature) and particle size of amphoteric latex on the coating qualities. We also studied the effect of mixing ratios (Amphoteric / Anionic)of latex on the coating qualities. Our results showed that Tg and particle size of amphoteric latex have to be controlled for optimizing coated paper qualities. The formulation consisting of 10 parts of amphoteric latex and 5 parts of anionic latex gave best results in ink receptivity, smoothness, air permeability, opacity and sheet gloss. If the results hold for the industrial paper coatings, the amount of expensive amphoteric latex can be reduced while achieving best available printing quality.

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Evaluation of Sampling and Analytical Methods for the Determination of Polycyclic Aromatic Hydrocarbons in the Ambient Atmosphere (환경대기중 다환방향족탄화수소의 포집과 분석방법에 관한 연구)

  • 백성옥
    • Journal of Korean Society for Atmospheric Environment
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    • v.7 no.1
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    • pp.1-16
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    • 1991
  • In this study, sampling and analytical procedures were evaluated for the determination of ambient levels of atmospheric PAH, both in gaseous and particulate phase. The method involves low-volume sampling and Soxhlet extraction of the filters and Tenax absorbent, followed by a clean-up stage using a silica column prior to analysis by reversed-phase HPLC with wavelength programmable fluorescence and UV detection. A total of 18 PAH were identified and quantified, all of which have been of environmental concern. In order to validate the methodology and to ensure compatibility of the results, the analytical method used for the determination of PAH was evaluated with respect to the efficiencies of extraction and clean-up procedure, HPLC separation, and lower limits of detection. In addition, substrate dependency of PAH recovery was investigated for the two types of fiters, i.e. glass fiber and PTFE filters.

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디지털 프린팅 용액 공정 소재 개발 동향

  • O, Seok-Heon;Son, Won-Il;Park, Seon-Jin;Kim, Ui-Deok;Baek, Chung-Hun
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2010.05a
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    • pp.19.2-19.2
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    • 2010
  • Printed electronics using printing process has broadened in all respects such as electrics (lighting, batteries, solar cells etc) as well as electronics (OLED, LCD, E-paper, transistor etc). Copper is considered to be a promising alternative to silver for printed electronics, due to very high conductivity at a low price. However, Copper is easily oxidized, and its oxide is non-conductive. This is the highest hurdle for making copper inks, since the heat and humidity that occurs during ink making and printing simply accelerates the oxidation process. A variety of chemical treatments including organic capping agents and metallic coating have been used to slow this oxidation. We have established synthetic conditions of copper nanoparticles (CuNPs) which are resistant to oxidation and average diameter of 20 to 50nm. Specific resistivity should be less than $4\;{\mu}{\Omega}{\cdot}cm$ when sintered at lower temperature than $250^{\circ}C$ to be able to apply to conductive patterns of FPCBs using ink-jet printing. Through this study, the parameters to control average diameter of CuNPs were found to be the introduction of additive agent, the feeding rate of reducing agent, and reaction temperature. The CuNPs with various average diameters (58, 40, 26, 20nm) could be synthesized by controlling these parameters. The dispersed solution of CuNPs with an average size of 20 nm was made with nonpolar solvent containing 3 wt% of binder, and then coated onto glass substrate. After sintering the coated substrates at $250^{\circ}C$ for 30 minutes in nitrogen atmosphere, metallic copper film resulted in a specific resistivity of $4.2\;{\mu}{\Omega}{\cdot}cm$.

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The Action and Pacemaker Potential in the Frog Truncus Arteriosus (개구리 대동맥의 활동전압 및 Pacemaker 전압에 관한 연구)

  • Earm, Yung-E;Sung, Ho-Kyung
    • The Korean Journal of Physiology
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    • v.16 no.2
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    • pp.119-128
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    • 1982
  • The frog truncus arterious were studied with conventional glass microelectrode technique in order to elucidate the underlying mechanism of spontaneous pacemaker activity. The analyses were focussed on the ionic nature of pacemaker current by changing the concentrations of extracellular $K^+$ and, $Na^+$, or by using blockers of K- and Ca-current and chronotropic transmitters. 1) The action potential of the spontaneously active truncus arteriosus has some characteristic feature of maximal distolic potential ranged from -65 to -75 mV, resting potential from -45 to -50 mV and overshoot voltage about +30 mV, respectively. Duration of the action potential taken from rapid upstroke to maximal diastolic potential was about 600 msec. Usual discharge rate was $25{\sim}30/min$ at room temperature $(18{\sim}20^{\circ}C)$. 2) The sensitivity of the resting membrane potential to change extracellular potassium concentrations $(0{\sim}12\;mM)$ was relatively low. Transient hyperpolarization was appeared in the 12 mM K Ringer after 10 min exposure to 0 mM K and it could be related to Na-pump reactivation by high potassium. 3) Reduction of extracellular sodium concetrations diminished the amplitude and frequency of the action potential. In Ringer solution containing 30% Na (substituted by equimolar Tris), spontaneous activity stopped but reappeared as very slow and small action potential. There was no spotaneous activity in zero Na Ringer solution. 4) Caesium(10 mM), K-current blocker decreased the frequency of the action potential and also pacemaker depolarization. Manganese (2 mM) known to be Ca-current antagonist, blocked spontaneous activity completely. 5) Adrenaline and acetylcholine had no chronotropic effect. But adrenaline increased the duration of plateau phase and the magnitude of the action potential in the follower cell. It is concluded that K-, Na-and Ca-current components are involved in the genesis of spontaneous activity of the frog truncus arteriosus like cardiac pacemaker tissues. But the insensitivity of truncus arteriosus to adrenaline and acetylcholine indicates that there are some different control mechanisms of spontaneous rhythm in two tissues.

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