• Journal of the Microelectronics and Packaging Society
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• v.6 no.4
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• pp.1-7
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• 1999

We developed Fabrication process of embedded passive components in MCM-D substrate. The proposed MCM-D substrate is based on Cu/photosensitive BCB multilayer. The substrate used is Si wafer and Ti/cu metallization is used to form the interconnect layer. Interconnect layers are formed with 1000$\AA$ Ti/3000$\AA$ Cu by sputtering method and 3$\mu\textrm{m}$ Cu by electrical plating method. In order to form the vias in photosensitive BCB layer, the process of BCB and plasma etch using $C_2F_6$ gas were evaluated. The MCM-D substrate is composed of 5 dielectric layers and 4 interconnect layers. Embedded resistors are made with NiCr and implemented on the $2^{nd}$ dielectric layer. The sheet resistance of NiCr is controlled to be about 21 $\Omega$/sq at the thickness of 600$\AA$. The multi-turn sprial inductors are designed in coplanar fashion on the $4^{th}$ interconnect layer with an underpass from the center to outside using the lower $3^{rd}$ interconnect layer. Capacitors are designed and realized between $1^{st}$ interconnect layer and $2^{nd}$ interconnect layer. An important issue in capacitor is the accurate determination of the dielectric thickness. We use the 900$\AA$ thickness of PECVD silicon nitride film as dielectric. Capacitance per unit area is about 88nF/$\textrm {cm}^2$at the thickness of 900$\AA$. The advantage of this integration process is the compatibility with the conventional semiconductor process due to low temperature PECVD silicon nitride process and thermal evaporation NiCr process.

• Journal of Practical Agriculture & Fisheries Research
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• v.22 no.2
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• pp.123-133
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• 2020

Four LEDs (blue, green, red, and white light) were tested to identify the most attractive wave length to utilize as the forecasting tools for the B. tabaci in glass houses. Attractiveness was evaluated by the total number of the B. tabaci attached to a yellow sticky trap. In the condition of no host plant supplement, the attraction efficacy was ordered from high to low as blue light (107.3±2.5), white light (83.0±12.1), red light (58±21.8), and green light (39.7±8.1). In the supplement of the host plant, the attraction was observed in the order of blue light (52±17.4), red light (38.7±5.8), green light (12.7±1.5), and white light (11.7±5.0). In both experimental conditions, blue light showed the highest attraction. In terms of the host plant effect to LED attraction, it varied following as white light (85.9%), green light (68.1%), blue light (51.6%), and red light (33.3%). This result suggests that red light is the least affected by the host plant. In the evaluation of the relative control efficacy, it was determined following as red light (66.7%), blue light (48.5%), green light (31.9%) and white light (14.1%) (F_3,8 = 14.7, P = 0.001). Taken together, blue light had a very high initial attraction, and red light was revealed low attraction effect by the supplement of the host plant. In field demonstration experiments, a high attractive efficacy was not observed due to low-temperature conditions, but similar higher attractive efficacy was observed in blue and red lights compared to the control. The commercialization of LEDs using red and blue in the future is expected to provide important information regarding B. tabaci population density forecast in glass house.

• Electrical & Electronic Materials
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• v.12 no.7
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• pp.7-11
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• 1999

Fully sealed field emission display in size of 4.5 inch has been fabricated using single-wall carbon nanotubes-organic vehicle com-posite. The fabricated display were fully scalable at low temperature below 415$^{\circ}C$ and CNTs were vertically aligned using paste squeeze and surface rubbing techniques. The turn-on fields of 1V/${\mu}{\textrm}{m}$ and field emis-sion current of 1.5mA at 3V/${\mu}{\textrm}{m}$ (J=90${\mu}{\textrm}{m}$/$\textrm{cm}^2$)were observed. Brightness of 1800cd/$m^2$ at 3.7V/${\mu}{\textrm}{m}$ was observed on the entire area of 4.5-inch panel from the green phosphor-ITO glass. The fluctuation of the current was found to be about 7% over a 4.5-inch cath-ode area. This reliable result enables us to produce large area full-color flat panel dis-play in the near future. Carbon nanotubes (CNTs) have attracted much attention because of their unique elec-trical properties and their potential applica-tions [1, 2]. Large aspect ratio of CNTs together with high chemical stability. ther-mal conductivity, and high mechanical strength are advantageous for applications to the field emitter [3]. Several results have been reported on the field emissions from multi-walled nanotubes (MWNTs) and single-walled nanotubes (SWNTs) grown from arc discharge [4, 5]. De Heer et al. have reported the field emission from nan-otubes aligned by the suspension-filtering method. This approach is too difficult to be fully adopted in integration process. Recently, there have been efforts to make applications to field emission devices using nanotubes. Saito et al. demonstrated a car-bon nanotube-based lamp, which was oper-ated at high voltage (10KV) [8]. Aproto-type diode structure was tested by the size of 100mm $\times$ 10mm in vacuum chamber [9]. the difficulties arise from the arrangement of vertically aligned nanotubes after the growth. Recently vertically aligned carbon nanotubes have been synthesized using plasma-enhanced chemical vapor deposition(CVD) [6, 7]. Yet, control of a large area synthesis is still not easily accessible with such approaches. Here we report integra-tion processes of fully sealed 4.5-inch CNT-field emission displays (FEDs). Low turn-on voltage with high brightness, and stabili-ty clearly demonstrate the potential applica-bility of carbon nanotubes to full color dis-plays in near future. For flat panel display in a large area, car-bon nanotubes-based field emitters were fabricated by using nanotubes-organic vehi-cles. The purified SWNTs, which were syn-thesized by dc arc discharge, were dispersed in iso propyl alcohol, and then mixed with on organic binder. The paste of well-dis-persed carbon nanotubes was squeezed onto the metal-patterned sodalime glass throuhg the metal mesh of 20${\mu}{\textrm}{m}$ in size and subse-quently heat-treated in order to remove the organic binder. The insulating spacers in thickness of 200${\mu}{\textrm}{m}$ are inserted between the lower and upper glasses. The Y\ulcornerO\ulcornerS:Eu, ZnS:Cu, Al, and ZnS:Ag, Cl, phosphors are electrically deposited on the upper glass for red, green, and blue colors, respectively. The typical sizes of each phosphor are 2~3 micron. The assembled structure was sealed in an atmosphere of highly purified Ar gas by means of a glass frit. The display plate was evacuated down to the pressure level of 1$\times$10\ulcorner Torr. Three non-evaporable getters of Ti-Zr-V-Fe were activated during the final heat-exhausting procedure. Finally, the active area of 4.5-inch panel with fully sealed carbon nanotubes was pro-duced. Emission currents were character-ized by the DC-mode and pulse-modulating mode at the voltage up to 800 volts. The brightness of field emission was measured by the Luminance calorimeter (BM-7, Topcon).

• Journal of the Korean Vacuum Society
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• v.20 no.1
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• pp.42-49
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• 2011

We deposited $SiN_x$ thin films by using PECVD technique at $200^{\circ}C$ with various flow ratios of the $SiH_4/N_2$ gases. The photoluminescence measurements revealed that the maximum emission wavelength shifted to long wavelength as the ratio increased, however, positions of the several peak wavelengths, such as 1.9, 2.2, 2.4, and 3.1 eV, were independent on the ratio. Changes of the photoluminescence spectra were measured in the $N_{2}-$, $H_{2}-$, and $O_2$-annealed films. The luminescence intensities increased after the annealing process. In particular, the maximum emission wavelength shifted to short wavelength after $H_{2}-$ or $O_2$-annealing. But there were still several peaks on the spectra of all annealed films, several peak positions remained to be unchanged after the annealing. As for the light emission mechanism, we have considered the defect states of the Si- and N- dangling bonds in the $SiN_x$ energy gap, so that the energy transitions from/to the conduction/valence bands and the defect states in the gap were attributed to the light emission in the $SiN_x$ films. The experimental results point to the possibility of a Si-based light emission materials for flexible Si-based electro-optic devices.

• Journal of Animal Science and Technology
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• v.52 no.4
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• pp.337-346
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• 2010

We report non-specific immune responses and disease resistance against Vibrio anguillarum, Streptococcus iniae and Edwardsiella tarda by dietary supplementation of fermented garlic powder (FGP) in olive flounder for the first time. Four isonitrogenous (45% crude protein) and isocaloric (17.1 MJ/kg) diets were formulated to have 0%, 0.5%, 1% and 2% of the FGP (G-0, G-0.5, G-1 and G-2). The experimental diets were fed to juvenile olive flounder averaging 23.4 g in triplicate groups (90 fish/group) in a flow-through system. After a five-week feeding trial, healthy fish with similar sizes from each tank were selected and injected with 1 ml of three bacteria each to evaluate disease resistance of the fish. During the 5-week feeding trial, the weight gain, specific growth rate, feed conversion ratio, protein efficiency ratio, and survival of the fish were not significantly affected by the experimental diets. However, feed intake was significantly lower (P<0.05) in the fish fed the G-2 diet compared with the control group. Hemoglobin, myeloperoxidase activity, cholesterol and HDL-cholesterol were not different between the dietary groups. However, hematocrit, nitroblue tetrazolium (NBT) activity, and lysozyme activity were increased (P<0.05) with an increment of dietary FGP. Plasma triglyceride of the fish fed the G-0.5 diet was significantly lower than that of fish fed the control diet. The cumulative mortality was lower in the fish fed diets containing FGP compared with the control group in the challenge test except for the bacteria Edwardsiella tarda. The results in this study indicate that dietary supplementation of FGP can enhance the non-specific immune responses and disease resistance of olive flounder against V. anguillarum and S. iniae.