Optical Properties of SiNx Thin Films Grown by PECVD at 200℃
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Lee, Kyung-Su
(University of Seoul, Department of Nano Science and Technology)
Kim, Eun-Kyeom (University of Seoul, Department of Nano Engineering) Son, Dae-Ho (University of Seoul, Department of Nano Science and Technology) Kim, Jeong-Ho (University of Seoul, Department of Nano Science and Technology) Yim, Tae-Kyung (University of Seoul, Department of Nano Science and Technology) An, Seung-Man (University of Seoul, Department of Nano Science and Technology) Park, Kyoung-Wan (University of Seoul, Department of Nano Science and Technology) |
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