• Journal of IKEEE
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• v.24 no.1
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• pp.59-66
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• 2020

In this study, the characteristics of ITO thin film was investigated to finding a low cost and highly transparent electrodes for display of mobile communication devices. The ITO film was deposited by DC magnetron sputter. The experimental conditions were changed as follows: 1. ambient pressure changed 1 to 3 mTorr with 1mTorr step, 2. bias electric voltage changed with 10V step. The chamber was pumped out by rotary pump until 10^-3Torr then the diffusion pump was used to lower the pressure of 10^-6Torr. The results shows us the film growth was obvious when the bias voltage was larger than 300V, but the overall thickness tendency was existed: the more voltage is the thicker thickness. At 330V bias voltage condition, the deposition rate was the largest and apparent grain was showed.

• Journal of the Korean Society of Industry Convergence
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• v.24 no.6_2
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• pp.801-808
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• 2021

In this paper, a numerical analysis was conducted on the effect of the flow control valve of a oscillation water column(OWC) type wave power generator turbine. The OWC wave power turbine operates with compressed air in the air chamber according to the change of wave height. When the wave height changes rapidly, a flow control valve is required due to overload of the turbine and reduced efficiency. Therefore, in this paper, a flow control valve with an opening angle of 60 degrees was installed in the front of the turbine, and the pressure drop, torque, and overall performance were calculated according to the change of turbine RPM and flow rate of turbine inlet. In conclusion, the flow control valve with an opening angle of 60 degrees affects when the turbine rotates at low rotation and the inlet flow rate is large. But it does not have a significant effect on overall turbine performance and it is necessary to find the optimal angle in the future works.

• Food Science and Preservation
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• v.22 no.6
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• pp.859-866
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• 2015

The purpose of this study was to develop a supplemental healthy food that can help prevent high blood pressure-related diseases caused due to the excessive consumption of sodium in salt. This was achieved by using ion-displacement techniques to produce mineral salt with lower sodium content by using fermented brown rice by-products rich in minerals. Mineral salt containing 2019.2 mg/100 g of potassium, 678.5 mg/100 g of magnesium, 48.7 mg/100 g of calcium, and 19.5 mg/100 g of sodium was obtained by fermenting brown rice by-products to create a culture medium for the mineral salt. Mineral salt containing 1769.7 mg/100 g of potassium, 573.6 mg/100 g of magnesium, 35.3 mg/100 g of calcium, and 19.5 mg/100 g of sodium was obtained by filtering and refining the by-product extract of fermented brown rice. The results showed that when the stream velocity of the instrument used for electrolysis was 200 mL/min and the current and the concentration of the reactive liquid in the purified water chamber were higher, the effect of electrolysis was greater. Ion hot water extraction of the fermented brown rice by-products improved by up to 95% and was collected as purified water within 90 min of the reaction time. Chloride ions with pH 7.4 were produced by mixing sodium hydroxide in a purified saline water chamber with electro-analyzed water. The salt produced in this study contained low sodium, 5.7~30%, as compared to 40% sodium content of the normal salt.

• Korean Journal of Materials Research
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• v.17 no.1
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• pp.31-36
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• 2007

Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.

• Journal of the Korean Society of Hazard Mitigation
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• v.11 no.3
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• pp.97-103
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• 2011

In this research, a small-scaled laboratory test and FEM analysis have been carried out to evaluate the feasibility of field construction with couple of recycled materials, such as in-situ soil, water-treatment sludge, and crumb rubbers. A static loading, which simulates the real traffic load, was adopted in lab test. The test was carried out, according to simulated field construction stages, such as excavation, bedding materials and pipe installation, placing and curing of controlled low strength materials, and simulated traffic loading. Couple of measuring instruments were adopted. The maximum vertical and horizontal deformations were 0.83% and 1.09%, during placing the CLSM. The measured vertical and horizontal deformations with curing time were 0.603mm and 0.676mm, respectively. The reduction effect of vertical and lateral earth pressure was relatively big. Also, FEM analysis was carried out to get the deformation, earth pressure and strain of PVC with different Controlled Low Strength Materials(CLSM) materials.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.2
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• pp.93-98
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• 2001

YMnO$_3$ films are excellent gate dielectric materials of ferroelectric random access memories (FRAMs) with MFSFET (metal -ferroelectric-semiconductor field effect transistor) structure because YMnO$_3$ films can be deposited directly on Si substrate and have a relatively low permittivity. Although the patterning of YMnO$_3$ thin films is the requisite for the fabrication of FRAMs, the etch mechanism of YMnO$_3$ thin films has not been reported. In this study, YMnO$_3$thin films were etched with Cl$_2$/Ar gas chemistries in inductively coupled plasma (ICP). The maximum etch rate of YMnO$_3$ film is 285$\AA$/min under Cl$_2$/(Cl$_2$+Ar) of 1.0, RF power of 600 W, dc-bias voltage of -200V, chamber pressure of 15 mTorr and substrate temperature of $25^{\circ}C$. The selectivities of YMnO$_3$ over CeO$_2$ and $Y_2$O$_3$ are 2.85, 1.72, respectively. The selectivities of YMnO$_3$ over PR and Pt are quite low. Chemical reaction in surface of the etched YMnO$_3$ thin films was investigated with X-ray photoelectron spectroscopy (XPS) surface of the selected YMnO$_3$ thin films was investigated with X-ray photoelectron spectroscopy(XPS) and secondary ion mass spectrometry (SIMS). The etch profile was also investigated by scaning electron microscopy(SEM)

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.186-196
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• 2009

Since it is difficult to extract a high flux ion beam directly at an energy of hyperthermal range ($1{\sim}100\;eV$), especially, lower than 50 eV, the ions should be neutralized into neutral particles and extracted as a neutral beam. A plasma source required to generate and efficiently transport high flux hyperthermal neutral beams should be easily scaled up and produce a high ion density (${\ge}10^{11}\;cm^{-3}$) even at a low working pressure (${\le}$ 0.3 mTorr). It is suggested that the required plasma source can be realized by Electron Cyclotron Resonance (ECR) plasmas with diverse magnetic field configurations of permanent magnets such as a planar ECR plasma source with magnetron field configuration and cylindrical one with axial magnetic fields produced by permanent magnet arrays around chamber wall. In both case of the ECR sources, the electron confinement is based on the simple mirror field structure and efficiently enhanced by electron drifts for producing the high density plasma even at the low pressure.

• The Journal of the Acoustical Society of Korea
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• v.37 no.6
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• pp.396-403
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• 2018

In this paper, a high-performance and low-noise centrifugal fan is developed for cooling automotive seats which provide a driver with pleasant driving environment. First, the flow characteristics of the existing fan unit was analyzed using a fan performance tester and CFD (Computational Fluid Dynamics) simulations. The analysis of the predicted flow field indicated vortex flow near the tip of fan hub and stagnation flow on the top of fan hub. Two design points are devised to reduce the vortex flow and the stagnation flow observed in the existing fan unit. First, the cut-off clearance which is the minimum distance between the fan blade and the fan housing is increased to reduce the vortex strength and, as a result, to reduce the overall sound pressure level. Second, the hub shape is more modified to eliminate the stagnation flow. The validity of proposed design is confirmed through the numerical analysis. Finally, a prototype is manufactured with a basis on the numerical analysis result and its improved flow and noise performances are confirmed through the P-Q curves measured by using the Fan Tester and the SPL (Sound Pressure Level) levels measured in the anechoic chamber.

• Journal of Aerospace System Engineering
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• v.14 no.5
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• pp.33-41
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• 2020

The landing gear of an aircraft is a device that absorbs and dissipates shock energy transmitted from the ground to the fuselage. Among the landing gears, the semi-active MR damper landing gear is supposed to show high-shock absorption efficiency under various landing conditions and secure the stability when out of control. In the case of the MR damper landing gear using an annular channel rather than orifice, Amesim, a commercial multi-physics program, is considered as more useful than the conventional two-degree-of-freedom model because the damping force generated by the pressure drop through the flow annular path can cause cavitation in the low-pressure chamber of the MR damper with a specific internal structure. In this paper, the main dynamic characteristics of the MR damper landing gear with an annular type flow path structure has been analyzed under the condition of cavitation. Based on the analysis results using Amesim, a design guideline for the MR damper flow path that prevents cavitation has been proposed based on the modification of the arrangement of internal components of the damper. The guideline was verified through a drop simulation.

• Analytical Science and Technology
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• v.27 no.4
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• pp.187-195
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• 2014

It is very important to minimize the damage of latent fingerprints at enhancing the contrast. This study proves the enhancement effects of cyanoacrylate-fumed latent fingerprints using p-dimethylaminobenzealdehyde (DMAB) on semi-porous surfaces and the influence factors. The latent fingerprints in experiment were developed for cyanoacrylate treatment in a vacuum chamber and used after drying at room temperature for 24 hours. For fluorescence staining, the cyanoacrylate-developed marks using DMAB were sublimated during 48 hours under the different conditions of surface area, temperature, atmospheric pressure. First experiment showed how surface area effects on the sublimation rate and fluorescence intensity by DMAB of particle size and container size. In addition, the fluorescence staining using DMAB with solvent-free contact method had the greatest fluorescence intensity after 36 hours and a low fluorescence intensity over a certain size of surface area. Second experiment showed that the evaporation of DMAB solid crystals got a satisfying result in a temperature of $20^{\circ}C$ and reduced time to get the greatest fluorescence intensity. It took a long time to get a optimum level of fluorescence intensity at $30^{\circ}C$ or more and it was less effective in fluorescence intensity. Third experiment on the pressure indicated that the fluorescence intensity of vacuum was weaker than nonvacuum but it was inapplicable to very high variations in pressure.