The effect on formation of ITO by magnetic field and applied vol tape in cylindrical magnetron sputtering (원통형 스퍼터링에서 자계와 인가전압이 ITO형성에 미치는 영향)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1995.11a
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- pp.302-305
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- 1995