• Title/Summary/Keyword: Low $O_2$ concentration

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Effect of CH4 Concentration on the Dielectric Properties of SiOC(-H) Film Deposited by PECVD (CH4 농도 변화가 저유전 SiOC(-H) 박막의 유전특성에 미치는 효과)

  • Shin, Dong-Hee;Kim, Jong-Hoon;Lim, Dae-Soon;Kim, Chan-Bae
    • Korean Journal of Materials Research
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    • v.19 no.2
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    • pp.90-94
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    • 2009
  • The development of low-k materials is essential for modern semiconductor processes to reduce the cross-talk, signal delay and capacitance between multiple layers. The effect of the $CH_4$ concentration on the formation of SiOC(-H) films and their dielectric characteristics were investigated. SiOC(-H) thin films were deposited on Si(100)/$SiO_2$/Ti/Pt substrates by plasma-enhanced chemical vapor deposition (PECVD) with $SiH_4$, $CO_2$ and $CH_4$ gas mixtures. After the deposition, the SiOC(-H) thin films were annealed in an Ar atmosphere using rapid thermal annealing (RTA) for 30min. The electrical properties of the SiOC(-H) films were then measured using an impedance analyzer. The dielectric constant decreased as the $CH_4$ concentration of low-k SiOC(-H) thin film increased. The decrease in the dielectric constant was explained in terms of the decrease of the ionic polarization due to the increase of the relative carbon content. The spectrum via Fourier transform infrared (FT-IR) spectroscopy showed a variety of bonding configurations, including Si-O-Si, H-Si-O, Si-$(CH_3)_2$, Si-$CH_3$ and $CH_x$ in the absorbance mode over the range from 650 to $4000\;cm^{-1}$. The results showed that dielectric properties with different $CH_4$ concentrations are closely related to the (Si-$CH_3$)/[(Si-$CH_3$)+(Si-O)] ratio.

Responses in Net Photosynthetic Rate of Quercus mongolica Leaves to Ozone (오존에 대한 신갈나무 잎의 순광합성능의 반응)

  • Kim, Jong Wook;Joon-Ho Kim
    • The Korean Journal of Ecology
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    • v.18 no.2
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    • pp.265-273
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    • 1995
  • Net photosynthetic rate (Pn) of Quercus mongolica leaves was determined under the controlled O₃concentrations of 0, 20, 30, 40, 50 or 60 ppb at every 10 min for 7 hr. Under the fumigation of the different O₃concentrations the relative net photosynthetic rate (RNPR) of the leaves decreased rapidly until 1 hr and thereafter decreased slowly. At below 20 ppb O₃the decrease of the RNPR was scarce but at above 20 ppb O₃the RNPR was inversely proportional to O₃concentration on a logarithmic curve. The RNPR at 60 ppb O₃, for example, was reduced 30% less than that without O₃. Under the different O₃concentrations fumigated for the short period of time the Pn dependent upon PPFD was depicted as saturation equation and Pn dependent upon temperature as quadratic equation. Results of this study suggest that short-term low O₃of less than 60 ppb concentration may lead to reductions of Pn in Q. mongolica leaves.

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Electrohemical and optical properties of Ta$_2$O$_5$ thin film electrolyte EC windows (Ta$_2$O$_5$ 박막전해질 EC 창의 전기화학 및 광학적 특성에 관한 연구)

  • 김용혁;백지흠;조원일;윤경석;박인철;주재백
    • Journal of the Korean institute of surface engineering
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    • v.30 no.4
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    • pp.231-238
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    • 1997
  • Tantalum oxide thin filme has an amorphous structure and a high resistivity. Its stoichiometric structure was $Ta_2O_{5.3}$ and the transmission ratio was 80%. The high resistivity of $Ta_2O_{5.3}$ thin film electrolyte made an EC windows without electrical shottness, but the bleached/colored cur rent was very low because of the low ion conductivith. Upon adding moisture into the system, the $\Delta$T increased upto 25 %. proton concentration increase was the main cases to improve optical property. The influence of adding precious or transition metal film(~100 $\AA$ thickness) in $Ta_2O_5$layer on the color change performance was observed. The metal insertion layers had formed hydroxide and they behaved as a stable proton source. The transmission diffrnece and cycle life were greatly enhanced in the case of Ti inssertion.The $\Delta$T was 50% and the cycle life was 18, 000.

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A Scientific Analysis on the Glass Beads Excavated from the Daho-ri site NO. 6, Changwoen (창원 다호리 유적 6호분 출토 유리구슬의 과학적 분석)

  • Yun, Eunyoung;Kang, Hyungtae
    • Conservation Science in Museum
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    • v.13
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    • pp.45-49
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    • 2012
  • A scientific analysis was carried out on the 14 pieces of glass beads excavated from the Daho-ri site NO. 6, Changweon. Most of the glass pieces were made of light blue transparent glass with round bubbles aligned in a regular direction. As a result of the SEM-EDS analysis, all the glass pieces turned out to be within the potash glass group (K2O-SiO2) and were identified to be the LCA (Low CaO, Low Al2O3) series glass, of which the concentration is 5% or below for CaO and Al2O3 respectively. In addition, it is presumed that plant materials were refined or a mineral (saltpetre, KNO3) was used as the raw materials for making potash and also that the ingredient acting as a colorants for light blue color was affected deeply by CuO.

Synthesis of Fe-Mn Bimetallosilicate and Its Catalytic Performance on NO Decomposition

  • Kang, Misook
    • Journal of Korean Society for Atmospheric Environment
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    • v.15 no.E
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    • pp.9-16
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    • 1999
  • This study has been focused on NO conversion for metal-incorporated silicates(Fe-silicate, Mn-silicate, and Fe-Mn-bimetallosilicate) with a similar MFI type. Used metallosilicates were prepared by the rapid crystallization method. Their catalytic performance for the conversion of NO under excess O2(10%) condition with the addition of hydrocarbon of low concentration(1,100ppm n-C8H18) were investigated. As a result, the NO conversion on the Fe-Mn-bimetallosilicate was enhanced compared with on the Fe- or Mn-silicates. Furthermore, the performances for NO concentration on Fe-Mn-bimetallosilicate more increased with an increased in n-C8H18 concentration, a decrease in NO concentration, and an increase in O2 concentration.

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A Study on the Removal of Chloro-Phenols by Photocatalytic Oxidation (광촉매(光觸媒) 산화(酸化) 반응(反應)을 이용한 클로로페놀 분해(分解)에 관한 연구(硏究))

  • Lee, Sang Hyup;Park, Ju Seok;Park, Chung Hyun
    • Journal of Korean Society of Water and Wastewater
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    • v.9 no.4
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    • pp.87-96
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    • 1995
  • The Electron/Hole Pair is generated when the activation energy produced by ultraviolet ray illuminates to the semiconductor and OH- ion produced by water photocleavage reacts with positive Hole. As a results, OH radical acting as strong oxidant is generated and then Photocatalytic oxidation reaction occurs. The photocatalytic oxidation can oxidate the non-degradable and hazardous organic substances such as pesticides and aromatic materials easier, safer and shorter than conventional water treatment process. So in this study, many factors influencing the oxidation of chlorophenols, such as inorganic electrolytes addition, change of oxygen and nitrogen atmosphere, temperature, pH, oxygen concentration, chlorophenol concentration, were throughly examined. According to the experiments observations, it is founded that the rate of chlorophenol oxidation follows a first-order reaction and the modified Langmuir-Hinshelwood relationship. And the photocatalytic oxidation occurs only when activation energy acting as Electron/Hole generation, oxygen acting as electron acceptor to prevent Electron/Hole recombination, $TiO_2$ powder acting as photocatalyst are present. The effects of variation of dissolved oxygen concentration, temperature and inorganic electrolytes concentration on 2-chlorophenol oxidation are negligible. And the lower the organic concentration, the higher the oxidation efficiency becomes. Therefore, the photocatalytic oxidation is much effective to oxidation of hazardous substances at very low concentration. The oxidation is effective in the range of 0.1 g/L-10 g/L of $TiO_2$. Finally when the ultra-violet ray is illuminated to $TiO_2$, the surface characteristics of $TiO_2$ change and Adsorption/Desorption reaction on $TiO_2$ surface occurs.

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The Effect of L-cysteine, EDTA in Papain Treatment of Wool Fabrics (양모직물에 파파인 처리 시 L-cysteine, EDTA의 영향)

  • Sung, Jong-Mi;Song, Wha-Soon;Kim, In-Young
    • Textile Coloration and Finishing
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    • v.20 no.2
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    • pp.9-18
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    • 2008
  • Wool has excellent properties, such as heat retention, absorbency, and elasticity, but it has a disadvantage in washability because the fabric will felt and shrink greatly. Felting causes the interlocking of the fiber surface scales with one another. Therefore, the studies on wool finishing have been focused on shrink proofing. Precedent researches on wool shrink proofing are mostly on eco-friendly method. using enzyme. The purpose of this study is to examine the effect of L-cysteine, EDTA in papain treatment of wool fabrics. The specific contents of study are as follows. Depending on pH, temperature, treatment time, enzyme concentration and L-cysteine, EDTA concentration, weight loss, tensile strength, whiteness, SEM were examined. Each papain treatment conditions depending on L-cysteine, EDTA were optimized from these properties. Papain had very low activation without activators. The optimum conditions of papain treatment were pH 7.5, temperature $75^{\circ}C$, time 30minutes(L-cysteine), 180minutes(EDTA) and papain concentration 5%(o.w.f.). In the use of papain 5%(o.w.f.), the activators optimum concentration was L-cysteine 2%(o.w.f.), EDTA 7%(o.w.f.)

NO REDUCTION PROPERTY OF Pt-V2O5-WO3/TiO2 CATALYST SUPPORTED ON PRD-66 CERAMIC FILTER

  • Kim, Young-Ae;Choi, Joo-Hong;Bak, Young-Cheol
    • Environmental Engineering Research
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    • v.10 no.5
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    • pp.239-246
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    • 2005
  • The effect of Pt addition over $V_2O_5-WO_3/TiO_2$ catalyst supported on PRO-66 was investigated for NO reduction in order to develop the catalytic filter working at low temperature. Catalytic filters, $Pt-V_2O_5-WO_3/TiO_2/PRD$, were prepared by co-impregnation of Pt, V, and W precursors on $TiO_2$-coated ceramic filter named PRD (PRD-66). Titania was coated onto the pore surface of the ceramic filter using a vacuum aided-dip coating method. The Pt-loaded catalytic filter shifted the optimum working temperature from $260-320^{\circ}C$(for the catalytic filter without Pt addition) to $190-240^{\circ}C$, reducing 700 ppm NO to achieve the $N_x$ slip concentration($N_x\;=\;NO+N_2O+NO_2+NH_3$) less than 20 ppm at the face velocity of 2 cm/s. $Pt-V_2O_5-WO_3/TiO_2$ supported on PRD showed the similar catalytic activity for NO reduction with that supported on SiC filter as reported in a previous study, which implies the ceramic filter itself has no considerable interaction for the catalytic activity.

Electrical and Optical Properties of Ti-ZnO Films Grown on Glass Substrate by Atomic Layer Deposition (원자층 증착법을 통하여 유리 기판에 증착한 Ti-ZnO 박막의 전기적 광학적 특성)

  • Lee, U-Jae;Kim, Tae-Hyeon;Gwon, Se-Hun
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.57-57
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    • 2018
  • Zinc-oxide (ZnO), II-VI semiconductor with a wide and direct band gap (Eg: 3.2~3.4 eV), is one of the most potential candidates to substitute for ITO due to its excellent chemical, thermal stability, specific electrical and optoelectronic property. However, the electrical resistivity of un-doped ZnO is not low enough for the practical applications. Therefore, a number of doped ZnO films have been extensively studied for improving the electrical conductivities. In this study, Ti-doped ZnO films were successfully prepared by atomic layer deposition (ALD) techniques. ALD technique was adopted to careful control of Ti doping concentration in ZnO films and to show its feasible application for 3D nanostructured TCO layers. Here, the structural, optical and electrical properties of the Ti-doped ZnO depending on the Ti doping concentration were systematically presented. Also, we presented 3D nanostructured Ti-doped ZnO layer by combining ALD and nanotemplate processes.

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Cathodoluminescence Properties of Novel $Mg_2SnO_4$:Mn Phosphor under Low-Voltage Electron Excitation

  • Kim, Kyung-Nam;Jung, Ha-Kyun;Park, Hee-Dong;Kim, Do-Jin
    • Journal of Information Display
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    • v.2 no.3
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    • pp.13-17
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    • 2001
  • The manganese-doped magnesium tin oxide with spinel structure was selected as a green phosphor for FED application and was synthesized by the solid state reaction. Its luminescence properties were investigated under low-voltage electron excitation. The $Mg_2SnO_4$:Mn phosphor showed green emission with the spectrum centered at 500 nm due to energy transfer from $^4T_1$ to $^6A_1$ of $Mn^{2+}$ ion. Optimum Mn concentration was 0.6 mole % and the decay time was shorter than 10 ms.

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