Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Electrohemical and optical properties of Ta$_2$O$_5$ thin film electrolyte EC windows

Ta$_2$O$_5$ 박막전해질 EC 창의 전기화학 및 광학적 특성에 관한 연구

  • 김용혁 (한국과학기술연구원 화공연구부) ;
  • 백지흠 (한국과학시술원 화공연구부) ;
  • 조원일 (한국과학시술원 화공연구부) ;
  • 윤경석 (한국과학시술원 화공연구부) ;
  • 박인철 ((현)현대전자 TFT-LCD) ;
  • 주재백 (홍익대학교 공과대학 화학공학과)
  • Published : 1997.08.01
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Abstract

Tantalum oxide thin filme has an amorphous structure and a high resistivity. Its stoichiometric structure was $Ta_2O_{5.3}$ and the transmission ratio was 80%. The high resistivity of $Ta_2O_{5.3}$ thin film electrolyte made an EC windows without electrical shottness, but the bleached/colored cur rent was very low because of the low ion conductivith. Upon adding moisture into the system, the $\Delta$T increased upto 25 %. proton concentration increase was the main cases to improve optical property. The influence of adding precious or transition metal film(~100 $\AA$ thickness) in $Ta_2O_5$layer on the color change performance was observed. The metal insertion layers had formed hydroxide and they behaved as a stable proton source. The transmission diffrnece and cycle life were greatly enhanced in the case of Ti inssertion.The $\Delta$T was 50% and the cycle life was 18, 000.

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