• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.195-201
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• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.6 s.249
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• pp.622-630
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• 2006

This paper is about the magnetic suspension stage based on the Switched Reluctance propulsion principle. Because the previous studies on contact-free stage adopted the Lorentz force for main force generation mechanism they have suffered from thermal problem deteriorating the precision. Thus, the magnetic suspension stage adopting SR principle which can achieve high force density is proposed. The main operating principle and structure for achieving high resolution and long travel range are represented. The magnetic force analysis of each actuator, providing back data for dynamic modeling and controller design are carried out. By conducting basic experiments, the feasibility of the proposed system is shown. In addition the problems which should be improved and their solutions are represented.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.1
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• pp.11-19
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• 2008

This paper proposes small VCM(voice coil motor) type, auto-focusing and zoom actuators for mobile information devices. In order to meet the large output displacement within small height restriction, the proposed auto-focusing actuator adopts curved suspensions, which are similar to a leaf-spring type suspension of optical disk drives. The sensitivity of design parameters on output displacement and dynamic performance is implemented using ANSYS (3D FEM tool) to determine the optimal geometry and stiffness of the curved suspensions. This paper also investigates a new zoom actuator without a suspension supporting a bobbin. The zoom actuator uses a moving rail and a stoper mechanism by generating rotational force at lens holder. Magnetic flux density of the zoom actuator are calculated by both the FEM and permeance method. Experiments using prototypes of the proposed focusing and zoom models show that both actuators meet the required displacement and performance.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.3
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• pp.452-460
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• 2002

The precision stage using a novel contact-free planar actuator based on magnetic farces, magnetized force and Lorentz farce, is suggested. In the promising magnetic structure, the mover is driven directly without any transmission mechanism, and doesn't need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and a feasibility of the system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.8
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• pp.1119-1127
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• 2010

In this paper, the design and nonlinear simulation of a multistable electromagnetic microactuator, which provides four stable equilibrium positions within its operating range, have been discussed. Quadstable actuator motion has been made possible by using both X- and Y-directional bistable structures with snapping curved beams. Two pairs of the curved beams are attached to an inner frame in both X- and Y-directions to realize independent bistable behavior in each direction. For the actuation of the actuator at the micrometer scale, an electromagnetic actuation method in which Lorentz force is taken into consideration was used. By using this method, micrometer-stroke quadstability in a plane parallel to a substrate was possible. The feasibility of designing an actuator that can realize quadstable motion by using the electromagnetic actuation method has been thoroughly clarified by performing nonlinear static and dynamic analyses and electrothermal coupled-field analysis of the multistable microactuator.

• Smart Structures and Systems
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• v.9 no.5
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• pp.427-439
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• 2012

The present paper deals with the analytical solution of a functionally graded piezoelectric (FGP) cylinder in the magnetic field under mechanical, thermal and electrical loads. All mechanical, thermal and electrical properties except Poisson ratio can be varied continuously and gradually along the thickness direction of the cylinder based on a power function. The cylinder is assumed to be axisymmetric. Steady state heat transfer equation is solved by considering the appropriate boundary conditions. Using Maxwell electro dynamic equation and assumed magnetic field along the axis of the cylinder, Lorentz's force due to magnetic field is evaluated for non homogenous state. This force can be employed as a body force in the equilibrium equation. Equilibrium and Maxwell equations are two fundamental equations for analysis of the problem. Comprehensive solution of Maxwell equation is considered in the present paper for general states of non homogeneity. Solution of governing equations may be obtained using solution of the characteristic equation of the system. Achieved results indicate that with increasing the non homogenous index, different mechanical and electrical components present different behaviors along the thickness direction. FGP can control the distribution of the mechanical and electrical components in various structures with good precision. For intelligent properties of functionally graded piezoelectric materials, these materials can be used as an actuator, sensor or a component of piezo motor in electromechanical systems.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.10
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• pp.1385-1391
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• 2010

In this study, we present small-size, low-power, and high-speed electromagnetic flapping shutters for phone cameras. These shutters are composed of trapezoidal twin blades suspended by H-type torsional springs. The existing electrostatic rolling and flapping shutters need high input voltage, while the existing electromagnetic rotating shutters are too big to be used for phone cameras. To achieve low-power and high-speed angle motion for small-size electromagnetic flapping shutters for camera phones, low-inertia trapezoidal twin blades, each suspended by the low-stiffness H-type torsional springs, are employed. The electromagnetic flapping shutters used in this experimental study have steady-state rotational angles of $48.8{\pm}1.4^{\circ}$ and $64.4{\pm}1.0^{\circ}$ in the magentic fields of 0.15 T and 0.30 T, respectively, for an input current of 60 mA; the maximum overshoot angles are $80.2{\pm}3.5^{\circ}$ and $90.0{\pm}1.0^{\circ}$ in the magentic fields of 0.15 T and 0.30 T, respectively. The rising/settling times of the shutter while opening are 1.0 ms/20.0 ms, while those while closing are 1.7 ms/10.3 ms. Thus, we experimentally demonstrated that the smallsize (${\sim}8{\times}8{\times}2\;mm^3$), low-power (${\leq}60\;mA$), and high-speed (~1/370 s) electromagnetic flapping shutters are suitable for phone cameras.