• Korean Journal of Optics and Photonics
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• v.8 no.1
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• pp.1-6
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• 1997

The amplitude impulse S(x) of an interferometric optical imaging system for λ=193 nm(ArF laser) and NA=0.5 is derived for the pupil with superposed three Gauss pupils $A_1$($\omega$), $A_{2-}$($\omega$) and $A_{2+}$($\omega$). It is shown that FWHM of S(x) can be far less than the Rayleigh's criterion of resolution $\frac{1}{2}{\epsilon}_R$, where ${\epsilon}_R$ is equal to λ=193 nm in the present case of NA=0.5. The three Gauss pupils are provided in an optical system which consists of a Twyman-Green interferometer and an imaging system. The system is proposed and relevent optical components are discussed. Siloxane polymer is suggested for fabrications of amplitude modulation plates. In the present work, we assumed the system is free from aberration and linear. The case that the system has residual aberrations is important, and further work is necessary.

• Applied Chemistry for Engineering
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• v.7 no.1
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• pp.91-100
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• 1996

Condensed ethyl silicate(CES) solutions were prepared from $SiCl_4$ and ethanol which is different in water content(2.5, 5.0 and 7.0wt.% ). To investigate the sol-gel transition behaviors of CES and PHT(partially hydrolyzed TEOS) solutions, the measurement of volume change, density, $SiO_2$ content, intrinsic viscosity and number average molecular weight were conducted with elapsed time. The polymer shapes of CES were discussed from the relation between the intrinsic viscosity[$\eta$] and the number average molecular weight($\bar{Mn}$). CES-3 prepared from ethanol containing 7.0wt.% $H_2O$ had different sol-gel transition behaviors from CES-1 (2.5wt.% $H_2O$) and CES-2(5.Owt.% $H_2O$), but similar behaviors to those of PHT which is used for controlling the hydrolysis rata of TEOS when composite ceramic materials were manufactured from silicon alkoxides. On the basis of Mark-Hawink relation, $[{\eta}]=K\bar{Mn}^{{\alpha}}$, the polymer shape of CES solutions were determined linear siloxane polymers because all solutions had ${\alpha}$ values in the range from 0.53 to 0.84. Especially, CES-3 showed to be a favorable raw materials for composite ceramics due to its similar properties to those of PHT.

• Polymer(Korea)
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• v.36 no.4
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• pp.542-548
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• 2012

Morphological characteristics and formation of symmetric polystyrene-block-poly(1,4-butadiene) copolymer (PS-b-PBD) in thin films upon solvent-annealing were investigated by using atomic force microscopy (AFM). The thin films solvent-annealed in cyclohexane revealed the perforated lamellae of poly(1,4-butadiene) in the matrix of polystyrene while those solvent-annealed in n-hexane exhibited highly disordered patterns. Interestingly, when the thin films of PS-b-PBD were solvent-annealed with binary mixtures of cyclohexane and n-hexane, the morphological transition from the perforated lameallae to the perpendicularly-oriented lamellae of poly(1,4-butadiene) could be induced by changing the mixing ratio of both solvents. We also demonstrated that after microdomians of poly(1,4-butadiene) were successfully degraded by UV-$O_3$, linear poly(dimethyl siloxane) chains were back-filled into the etched regions of the thin film and then converted to silica nano-objects by oxygen plasma treatments.