• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.9
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• pp.2272-2283
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• 1994

In scanning tunneling microscopy, the piezoelectric actuator is popuilarly used in stacked type as it can provide remarkable positioning resolution and stiffness. The actuator, however, exhibits a considerable amount of hystereic nonlinearity, resulting in losses of overall measuring accuracy when a linear model is used for its control and calibration, In this study, a nonlinear model is proposed for predicting the precise relationship between the input connand voltage and the output displacement of the actuator itself, cross-coupled electrical behaviours of the driving circuit with the actuator, and mechanical characteristics of the driven components of the actuator. Finally experimental results prove that the nonlinear model enhances the measuring of scanning tunneling microscopy by an order ten in comparison with a conventional linear model.

• Transactions of the Korean Society of Automotive Engineers
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• v.4 no.1
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• pp.177-186
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• 1996

A convolution alogorithm combined with Fourier transformation is applied to the tomographic reconstruction of the asymmetric spray structure to identify the local drop size and volume concentration. The line of sight intergrated data from Malvern particle analyzer with multiangular scanning form a basic information for the deconvolution. Linear interpolation is tested to obtain the effect of increasing number of scanning angles. This transformation method predicts well the structure of asymmetric spray. The tehnique can be extended to other line of sight combustion diagnostics.

• Archives of Plastic Surgery
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• v.43 no.5
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• pp.430-437
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• 2016

Background Accurate breast volume assessment is a prerequisite to preoperative planning, as well as intraoperative decision making in breast reconstruction surgery. The use of three-dimensional surface imaging (3D scanning) to assess breast volume has many advantages. However, before employing 3D scanning in the field, the tool's validity should be demonstrated. The purpose of this study was to confirm the validity of 3D-scanning technology for evaluating breast volume. Methods We reviewed the charts of 25 patients who underwent breast reconstruction surgery immediately after total mastectomy. Breast volumes using the Axis Three 3D scanner, water-displacement technique, and magnetic resonance imaging (MRI) were obtained bilaterally in the preoperative period. During the operation, the tissue removed during total mastectomy was weighed and the specimen volume was calculated from the weight. Then, we compared the volume obtained from 3D scanning with those obtained using the water-displacement technique, MRI, and the calculated volume of the tissue removed. Results The intraclass correlation coefficient (ICC) of breast volumes obtained from 3D scanning, as compared to the volumes obtained using the water-displacement technique and specimen weight, demonstrated excellent reliability. The ICC of breast volumes obtained using 3D scanning, as compared to those obtained by MRI, demonstrated substantial reliability. Passing-Bablok regression showed agreement between 3D scanning and the water-displacement technique, and showed a linear association of 3D scanning with MRI and specimen volume, respectively. Conclusions When compared with the classical water-displacement technique and MRI-based volumetry, 3D scanning showed significant reliability and a linear association with the other two methods.

• Korean Journal of Optics and Photonics
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• v.10 no.5
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• pp.364-368
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• 1999

We investigate the evaluation items of LSU (Laser Scanning Unit), such as beam size, f$\theta$ characteristics, linearity, skew and bow, optical power ratio between image height of 0mm and $\pm$108 mm, pitch error, Jitter and shift of printing position. Through the measurement of LSU using BSH (Beam Scan Head) installed on LMC (Linear Motion Controller) which moves linearly within the whole scanning range (-108 mm~+108 mm), we can ascertain plastic f$\theta$ lenses, which are manufactured by TVLP (Two-step Variable Low Pressure) molding method, to satisfy 600DPI(Dots Per Inch) performance.

• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.4
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• pp.386-392
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• 2002

Ultrasonic has been proposed as an attractive means of detecting bone loss. There have been several commercial ultrasound devices developed for measuring the heel to predict fracture at other bones. However, these devices select only single point of heel bone as measurement site. It causes poor assessment of bone quality due to the error of transducer positioning. In an effort to improve current ultrasound systems, we evaluated the linear scanning method which provides better prediction of bone quality and an accurate image of bone shape. The system used in this study biaxially scans a heel bone using automated linear scanning technique. The results demonstrated that the values of ultrasound parameters varied with different positions within bone specimen. It has been also found that the linear scanning method could better pre야ct bone quality, eliminating the error of transducer positioning.

• Journal of the Korean Society for Nondestructive Testing
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• v.22 no.6
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• pp.637-642
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• 2002

An arc-shaped line array slit has been used for the laser generation of focused Lamb waves. The spatially expanded Nd:YAG pulse laser was illuminated through the arc-shaped line array slit on the surface of a sample plate to generate the Lamb waves of the same pattern as the slit. Then the generated Lamb waves were focused at the focal point of which distance from the slit position is dependent on the curvature of slit arc. The proposed method showed better spatial resolution than the conventional linear array slit in the detection of laser machined linear defect and drill machined circular defect on aluminum plates of 2mm thickness. Using the focused waves, we could detect the linear defect and the circular defect with the improvement of spatial resolution. The method can also be combined with the scanning mechanism to get an image just like by the scanning acoustic microscope(SAM).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.