• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.

• 한국정밀공학회지
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• 제31권12호
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• 대한기계학회논문집
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• 제18권9호
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• pp.2272-2283
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• 1994

In scanning tunneling microscopy, the piezoelectric actuator is popuilarly used in stacked type as it can provide remarkable positioning resolution and stiffness. The actuator, however, exhibits a considerable amount of hystereic nonlinearity, resulting in losses of overall measuring accuracy when a linear model is used for its control and calibration, In this study, a nonlinear model is proposed for predicting the precise relationship between the input connand voltage and the output displacement of the actuator itself, cross-coupled electrical behaviours of the driving circuit with the actuator, and mechanical characteristics of the driven components of the actuator. Finally experimental results prove that the nonlinear model enhances the measuring of scanning tunneling microscopy by an order ten in comparison with a conventional linear model.

• 한국자동차공학회논문집
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• 제4권1호
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• pp.177-186
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• 1996

A convolution alogorithm combined with Fourier transformation is applied to the tomographic reconstruction of the asymmetric spray structure to identify the local drop size and volume concentration. The line of sight intergrated data from Malvern particle analyzer with multiangular scanning form a basic information for the deconvolution. Linear interpolation is tested to obtain the effect of increasing number of scanning angles. This transformation method predicts well the structure of asymmetric spray. The tehnique can be extended to other line of sight combustion diagnostics.

• Archives of Plastic Surgery
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• 제43권5호
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• pp.430-437
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• 2016

Background Accurate breast volume assessment is a prerequisite to preoperative planning, as well as intraoperative decision making in breast reconstruction surgery. The use of three-dimensional surface imaging (3D scanning) to assess breast volume has many advantages. However, before employing 3D scanning in the field, the tool's validity should be demonstrated. The purpose of this study was to confirm the validity of 3D-scanning technology for evaluating breast volume. Methods We reviewed the charts of 25 patients who underwent breast reconstruction surgery immediately after total mastectomy. Breast volumes using the Axis Three 3D scanner, water-displacement technique, and magnetic resonance imaging (MRI) were obtained bilaterally in the preoperative period. During the operation, the tissue removed during total mastectomy was weighed and the specimen volume was calculated from the weight. Then, we compared the volume obtained from 3D scanning with those obtained using the water-displacement technique, MRI, and the calculated volume of the tissue removed. Results The intraclass correlation coefficient (ICC) of breast volumes obtained from 3D scanning, as compared to the volumes obtained using the water-displacement technique and specimen weight, demonstrated excellent reliability. The ICC of breast volumes obtained using 3D scanning, as compared to those obtained by MRI, demonstrated substantial reliability. Passing-Bablok regression showed agreement between 3D scanning and the water-displacement technique, and showed a linear association of 3D scanning with MRI and specimen volume, respectively. Conclusions When compared with the classical water-displacement technique and MRI-based volumetry, 3D scanning showed significant reliability and a linear association with the other two methods.

• 한국광학회지
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• 제10권5호
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• pp.364-368
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• 1999

일반적으로 LSU(Laser Scanning Unit)는 LD모듈(Laser Diode, 콜리메이팅 렌즈, 슬릿), 실린더 렌즈 고속회전하는 PM(Polygon Mirror), f$\theta$렌즈와 같은 광부품들과 이들을 취부하는 Housing으로 구성되어져 있다. 먼저 본 논문에서는 당사에서 자체적으로 광설계된 LSU 시작품(시작(試作品)을 측정/평가하기 위해 평가항목들에 관해 살펴 보았다. 당사에서 시제작된 LSU의 특징은 LSU의 핵심부품인 f$\theta$렌즈가 2단가압형 저압사출방식으로 제작되었다는 것이다. LSU의 평가항목들은 BSH(Beam Scan Head)를 LMC(Linear Motion Controller)위에 장착해서 비교적 간단히 측정 할 수 있었고, 측정결과 600DPI(Dots Per Inch) 성능을 만족함을 확인할 수 있었다.

• 비파괴검사학회지
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• 제22권4호
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• pp.386-392
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• 2002

골다공골증은 해면골의 골소주 두께 감소 및 파단에 기인한 전체적인 골질이 저하되는 질병이다. 골다공증의 진단은 X-ray 및 초음파를 이용하는 방법이 있다. 그러나 X-ray 방법은 인체에 해로우며 단지 골밀도만을 평가한다. 대부분 골다공증 진단 초음파 시스템은 heel뼈를 통과하는 초음파 속도 및 감쇠 파라미터를 측정하고 있다. 한편, 기존의 초음파 시스템들은 heel뼈의 한 점에서만 측정을 실행하므로 측정 위치에 따른 오차로 인하여 골다공증의 진단 예측성이 매우 낮다. 본 연구에서는 두 개의 초음파 탐촉자를 이용하여 선형 스캐닝 방식에 의한 heel뼈 전체 영역에 대한 초음파 파라미터 값들은 2차원 영상처리기법을 통하여 골다공증을 진단하는 기법을 수행하였다.

• 비파괴검사학회지
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• 제22권6호
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• pp.637-642
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• 2002

An arc-shaped line array slit has been used for the laser generation of focused Lamb waves. The spatially expanded Nd:YAG pulse laser was illuminated through the arc-shaped line array slit on the surface of a sample plate to generate the Lamb waves of the same pattern as the slit. Then the generated Lamb waves were focused at the focal point of which distance from the slit position is dependent on the curvature of slit arc. The proposed method showed better spatial resolution than the conventional linear array slit in the detection of laser machined linear defect and drill machined circular defect on aluminum plates of 2mm thickness. Using the focused waves, we could detect the linear defect and the circular defect with the improvement of spatial resolution. The method can also be combined with the scanning mechanism to get an image just like by the scanning acoustic microscope(SAM).

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.