• Journal of Sensor Science and Technology
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• v.1 no.2
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• pp.183-194
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• 1992

Some silicon micromechanical structures useful in sensors and actuators have been fabricated by electropolishing or porous silicon formation technique by anodic reaction in HF solution. The microstructures were lightly doped single crystal silicon and the formation was isotropic independent of crystal directions. Porous silicon layer(PSL) was formed selectively in $n^{+}$ region of $n^{+}/n$ silicon structure by anodic reaction in concentrated HF(20-48%) solution. Characteristics of the formed PSL were investigated along with change of the reaction voltage, HF concentration and the reaction time. PSL was formed only in $n^{+}$ region. The porosity of the PSL was decreased with the increase of HF concentration and independent of reaction voltage. For the case of $n/n^{+}/n$ structures, the etched surface of silicon was fairly smooth and a cusp was not found. The thickness of the microstructures was the same as that of the epitaxial n-Si layer and good uniformity. We have fabricated acceleration sensors by anodic reaction in HF solution(5 wt%) and planar technology. The process was compatible with conventional It fabrication technique. Various micromechanical structures, such as rotors of motor, gears and linear actuator, were also fabricated by the technique and examined by SEM photographs.

• Proceedings of the KOSOMBE Conference
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• v.1996 no.05
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• pp.84-87
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• 1996

We have been developed electrohydraulic left ventricular assist device and done various in vivo evaluation on the device. Through the in vivo experiment conducted from Jan. 23, 1996 to Feb. 8, we could have experience of long-term evaluation fur the first time. The sheep used in this experiment had survived for 16 days. We used new actuator with reduced size and linear motion guide replacing oil box and ball bearings. Also, we used improved blood chamber with reduced size, reduced weight facilitating fixing the chamber to animal's body, and polymer sac having improved folding pattern. Against suction problem, we used absolute pressure limiter only. Motor current for driving this new actuator was not much higher than older one. Effective stroke volume was about 48 cc. Thrombosis was found around top area and peripheral boundary of the sac and valves. There was no sign of damage from suction problem in the atrium observed at autopsy. Main cause of death was presumed to be progressive formation of thrombosis in the cannulae. In this paper, the results of this experiment are documented.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.8
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• pp.1203-1211
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• 2009

The dynamics of underwater vehicles can be greatly influenced by the dynamics of the vehicle thrusters. The control of the state of the hovering or very slow motion of the underwater vehicle is most important for automatic docking or control of the manipulator of the vehicle. The dynamics of the thruster based on the electric motor is nonlinear and has uncertain parameters. Since the dynamics of the vehicle coupled with the dynamics of the thruster is nonlinear and has uncertain parameters, a robust control is very effective for a desired motion tracking of the uncertain and nonlinear vehicle. In this paper a study was performed on the robust control scheme of the very slow motion or hovering motion of the underwater vehicle actuated by the electric motor. Also, a concurrent control on the state of the vehicle with nonlinearity and uncertain parameters was performed. A sliding mode control algorithm out of robust controllers was designed and applied, which compensates the nonlinear forces and uncertain parameters of the vehicle and actuator. Through a computer simulation, the proposed control scheme was compared with a linear PD controller and its superior performance was validated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.41 no.8
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• pp.771-782
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• 2017

This paper describes the development of a wearable robot to assist ankle power for the elderly. Previously developed wearable robots have generally used motors and gears to assist muscle power during walking. However, the combination of motor and reduction gear is heavy and has limitations on the simultaneous control of stiffness and torque due to the friction of the gear reducer unlike human muscles. Therefore, in this study, Mckibben pneumatic muscle, which is lighter, safer, and more powerful than an electric motor with gear, was used to assist ankle joint. Antagonistic actuation using a pair of pneumatic muscles assisted the power of the soleus muscles and tibialis anterior muscles used for the pitching motion of the ankle joint, and the model parameters of the antagonistic actuator were experimentally derived using a muscle test platform. To recognize the wearer's walking intention, foot load and ankle torque were calculated by measuring the pressure and the center of pressure of the foot using force and linear displacement sensors, and the stiffness and the torque of the pneumatic muscle joint were then controlled by the calculated ankle torque and foot load. Finally, the performance of the developed ankle power assistive robot was experimentally verified by measuring EMG signals during walking experiments on a treadmill.