• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1991년도 한국자동제어학술회의논문집(국제학술편); KOEX, Seoul; 22-24 Oct. 1991
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• pp.1904-1909
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• 1991

Software linear and exponential acceleration/deceleration algorithms for control of machine axes of motion in industrial robots and CNC machine tools are proposed. Typical hardware systems used to accelerate and decelerate axes of motion are mathematically analyzed. Discrete-time state equations are derived from the mathematical analyses for the development of software acceleration/deceleration algorithms. Synchronous control method of multiple axes of motion in industrial robots and CNC machine tools is shown to be easily obtained on the basis of the proposed acceleration/deceleration algorithms. The path error analyses are carried out for the case where the software linear and exponential acceleration/deceleration algorithms are applied to a circular interpolator. A motion control system based on a floating point digital signal processor (DSP) TMS 320C30 is developed in order to implement the proposed algorithms. Experimental results demonstrate that the developed algorithms and the motion control system are available for control of multiple axes and nonlinear motion composed of a combination of lines and circles which industrial robots and CNC machine tools require.

• 한국정밀공학회지
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• 제22권12호
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

• 한국정밀공학회지
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• 제14권12호
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 추계학술대회논문집
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• pp.567-570
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• 2006

The purpose of this study is to develope a linear feeder for uniform transportation of grains and to present its design guide line. so, It is measured the displacement of the front and rear aspect of the feeder in time domain. And the measured time signal is represented to the plane coordinate. From this process, it is presented the motion of the feeder in a harmonic excited condition. Also, It is determined whether translation motion or rotation motion. From these course, it is defined the optimized dynamic motion for uniform transportation of grains. It is included a ratio of the displacement and the angle which the dynamic motion between the front and rear aspect of the feeder.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• 한국소음진동공학회논문집
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• 제14권9호
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• pp.868-876
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• 2004

The linear motion(LM) guide using ball bearing has many advantages compared with conventional sliding guides. Therefore, LM guide using ball bearing has been widely used to increase the accuracy of the position of a system. This research investigates dynamic characteristics of LM guide through mainly linear analyses. Linear analysis is accomplished by Lagrange equation and the finite element method. And another trial that performs nonlinear analysis about one mode(bouncing mode) of LM guide from Hertzian contact theory is accomplished in the latter half of this research. Through nonlinear analysis we could observe the softening characteristic due to the Hertzian contact nonlinearity.

• 대한기계학회논문집A
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• 제35권6호
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• pp.599-607
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• 2011

본 논문에서는 별도의 외부 격리 구조물이나 추가 모터가 필요 없는 XY 선형 모션 스테이지를 위한 반발력 보상 시스템을 개발하였다. 개발된 시스템은 이동 가능한 마그넷 트랙, 스프링, 추가 질량을 포함한 자체 반발력 보상 구조를 가지고 있으며 이송용 모터 코일과 마그넷 트랙의 상대 위치를 검출할 수 있는 전용 센서를 개발하여 고정밀 추력 및 위치를 제어에 적용하였다. 먼저 반발력 보상 시스템을 모델링하고 모의 시험을 통해 이동 거리, 가속도, 하중, 허용 가능한 장비 크기와 같은 설계 요소를 최적화 하였다. 반발력 보상 시스템이 구비된 XY 모션 스테이지를 제작하였으며, 해당 시스템의 성능을 실험적으로 검증하였다. 실험결과 10m/$s^2$ 가감속 시에 85%의 반발력이 반발력 보상 시스템에 의해 흡수되었다.

• 한국공작기계학회논문집
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• 제10권6호
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• pp.1-7
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• 2001

It is very important to test circular motion accuracy of NC machine tools as it affects all other machines machined by them in industries. In this paper, it has become possible to detect errors of linear displacement of radial directions for circle tar motion accuracy test using newly assembled magnetic type of linear scale so called Magnescale ball-bar system. It has also organized computer program systems using tick pulses come out from computer for getting error motion data at colt start time interval in circular motion test on NC lathe. Error data gotten from test is expressed to plots and analysed to numerics by various statistical treatments.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.449-454
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• 2000

A three-parameter model of viscoelastic damper, which has a non-linear spring as an element is incorporated into an oscillator. The behavior of the damper model shows non-linear hysteresis curves which is qualitatively similar to those of real viscoelastic materials. The motion is governed by three-dimensional non-linear dynamical system of equations. The harmonic balance method is applied to get analytic solutions of the system. The frequency-response curves show that multiple solutions co-exist and that the jump phenomena can occur. In addition, it is shown that separate solution branch exists and that it can merge with the primary response curve. Saddle-node bifurcation sets explain the occurences of such non-linear phenomena. A direct time integration of the original equation of motion validifies the use of the harmonic balance method to this sort of problem.