• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.23 no.4
• /
• pp.392-397
• /
• 2014

Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing-guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.

• Proceedings of the Korean Society of Computer Information Conference
• /
• 2022.07a
• /
• pp.659-661
• /
• 2022

본 논문에서는 4차 산업의 제조 혁신을 위한 새로운 방안의 스마트 팩토리를 실헌하기 위한 주요 부품 중에 하나인 리니어 모션 가이드(LM 가이드)에 필요한 센싱 시스템을 제안하였다. 공장 자동화와 정밀 측의 핵심 부품인 LM 가이드를 고정밀, 고정도로 제어할 수 있는 변위 센싱 시스템의 개발이다. 기존의 광학식이나 자기식 변위 센서 기술의 한계를 극복할 수 있도록 와전류(Eddy Current) 기법을 이용하여 LC 공진기와 전도체를 LM 가이드에 장착할 수 있도록 제안하였다. 또한 와전류 센싱부에서 출력되는 미세 인덕턴스 값을 측정할 수 있도록 디지털 신호처리 기술과 컴퓨터/산술 기술을 FPGA를 이용한 HW 시스템을 제작하여 다양한 실험을 진행했다. 본 논문에서 구현한 HW 센싱 시스템을 이용함으로 LM 가이드를 실시간으로 직선 이동시킴으로 실시간으로 변위 값을 디스플레이 부로 출력되어 측정이 가능하다. 개발된 시스템은 LM 가이드의 직선 운동시 변위 값의 분해능과 응답속도 면에서 우수함이 확인됨으로 스마트 팩토리 뿐만 아니라 다양한 장비에도 적용이 가능하다.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.10a
• /
• pp.11-15
• /
• 2002

This paper presents the thermal characteristic analysis of a high-speed HMC with spindle speed of 50,000rpm. The spindle is supported by two radial and axial magnetic bearings. and the built-in motor is located between the axial and rear radial magnetic bearings. The X-axis and Y-axis feeding systems are composed of linear motor and linear motion guides, and the Z-axis feeding system is composed of servo-motor, ballscrew and linear motion guide. The thermal analysis model of high-speed HMC is constructed by the finite element method, and the thermal characteristics in the design stage are estimated based on the temperature distribution and thermal deformation under the conditions related to the heat generation of built-in motor, magnetic bearings, linear motors, servo-motor, ballscrew, and so on.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.32 no.6
• /
• pp.474-480
• /
• 2008

Recently, rods having irregular sections more complex than a rectangle or ellipse are necessary to produce mechanical parts. The cold shaped drawing process is used to obtain shaped drawn products with high levels of dimensional accuracy and quality. A cross roller guide, considered in this study, is one of the parts produced by shaped drawing process. A cross roller guide has a linear bearing system that rolls along a guide way. A cross roller guide is one of the most important components in terms of equipment because the quality of the product influences the precision linear motion. Therefore, the final dimensional accuracy of the linear rail in the shaped drawing is very important. The objective of this study is to find the optimized die angles to improve the dimensional accuracy and straightness of the final shaped drawn product. In order to achieve the aim of this study, design of experiment, FE-simulation, and the Taguchi method were used. Based on the analytical results, shaped drawing experiment has been performed to verify the result.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.22 no.6
• /
• pp.996-1002
• /
• 2013

This study addresses the development of a full duplex robotic system for transferring flat-panel display glass. We propose to accomplish this using a bidirectional linear transfer mechanism in place of the conventional rotary transfer mechanism. The developed full duplex robot comprises a driving part that carries the glass panel laterally, vertical part that can be moved up and down by means of a ball screw and linear motion guide arrangement, and hand part that slides by the cylinder of the driving part along the guide rail with a V-guide bearing attached to the bottom of the support. In addition, an alignment part prevents the hand part from derailing and holds the hand part while the driving part moves horizontally. The full duplex robot lifts and drives a glass panel directly while transferring it to the buffer and does not require rotational motion. Therefore, both transferring and stacking are realized with a single device. This device can be used in existing industrial facilities as an alternative to existing industrial robots in current as well as future process lines. The proposed full duplex robot is expected to save considerable amounts of time and space, and increase product throughput.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2004.10a
• /
• pp.326-333
• /
• 2004

This paper presents the structural characteristics analysis of a high-speed horizontal machining center with spindle speed of 50, 000rpm and feedrate of 120m/min. The spindle system is designed based on the built-in motor, angular contact ceramic ball bearings, oil-air lubrication and oil-jacket cooling method. The X-axis and Y-axis feeding systems are composed of the linear motor and linear motion guides, and the Z-axis feeding system is composed of the servo-motor, ball screw and linear motion guide. The structural analysis model of the high-speed horizontal machining center is constructed by the finite element method, and the validity of structural design is estimated based on the structural deformation of the high-speed horizontal machining center and spindle nose caused by the gravity and inertia forces.

• Journal of Sensor Science and Technology
• /
• v.18 no.6
• /
• pp.461-466
• /
• 2009

This paper represents a piezoelectric ultrasonic linear actuator with flexural vibration mode. The actuator is composed of two piezo ceramics, the elastic body, and the connecting tip. It is driven by the frictional force between the connecting tip and the linear motion guide. Unimorph actuators have flexural vibration. Its middle point is fixed so that suitable to the flexural vibration of $3/2\lambda$. These vibrations contribute to elliptical motion by mixed mode between longitudinal and transverse mode. It was generated when the ultrasonic electrical signals with 90 degree phase difference are applied to two ceramics. A linear movement can be easily obtained using the elliptical motion. The ATILA, FEM simulator has been used to design actuator and verify the kinetic and dynamic analysis. We used the ceramics of $20\times10\times1$ mm size and confirmed the flexural vibration of the $3/2\lambda$ at the 79 kHz through the scanning of 3D-vibrometer. The maximum velocity of actuator was 221 mm/sec and the thrust force of actuator was 2.7 N in 200Vp-p of additional voltage.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2008.04a
• /
• pp.71-76
• /
• 2008

This paper is concerned with the active vibration control of elevator by means of the active roller guide. To this end, a dynamic model for the horizontal vibration of the elevator consisting of a supporting frame, cage and active roller guides was derived using the energy method. Free vibration analysis was then carried out based on the equations of motion. Active vibration controller was designed based on the equations of motion using the LQR theory and applied to the numerical model. Rail irregularity and wind pressure variation were considered as external disturbance in the numerical simulations. The numerical results show that the active vibration control of elevator is possible.

• Journal of the Korean Society for Precision Engineering
• /
• v.29 no.8
• /
• pp.906-912
• /
• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.3
• /
• pp.187-193
• /
• 2003

This paper presents an on-machine measurement method of flatness error fur surface machining processes. There are two kinds of on-machine measurement methods available to measure flatness errors in workpieces: i.e., surface scanning method and sensor scanning method. However, motion errors are often engaged in both methods. This paper proposes an idea to realize a measurement system of flatness errors and its rigorous application for estimation of motion errors of the positioning system. The measurement system is made by modifying the straightness measurement system, which consists of a laser, a CCD camera and processing system, a sensor head, and some optical units. The sensor head is composed of a retroreflector, a ball and ball socket, a linear motion guide unit and adjustable arms. The experimental .results show that the proposed method is useful to identify flatness errors of machined workpieces as well as motion errors of positioning systems.