• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.877-880
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• 2001

This paper presents the new linear motion device so called "inch-worm" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamics stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Driving input signal is shaped to reduce the residual vibration of inch-worm by LQG controller and cycloid step input. The practical feasibility of inch-worm is also examined by running test.ning test.

• 대한기계학회논문집
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• 제17권7호
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• pp.1731-1739
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• 1993

An application of Scanning Tunneling Microscopy(STM) is investigated for the measurement of 3-dimensional profiles of the macro-machined patterns of which critical dimensions lie in the range of submicrometers. Special emphasis of this investigation is given to extending the measuring ranges of STM upto the order of several micrometers while maintaining superb nanometer measuring resolution. This is accomplished by correcting hysteresis effects of piezoelectric actuators by using non-linear compensation models. Detailed aspects of design and control of a prototype measurement system are described with some actual measuring examples in which fine It patterns can successfully be traced with a resolution of 1 nanometer over a surface range of $4{\times}2$ micrometers.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.219-224
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• 1996

Piezoelectric actuators exhibit limited accuracy in tracking control due to their hysteresis nonlinearity. In this study a digital tracking control approach for a piezoelectric actuator based on incorporating a feedback linearization loop with a PID feedback controller is presented. The hysteresis nonlinearity of the piezoelectric actuator is modeled in the feedback compensation loop using the Maxwell slip model. Experiments were performed on a piezoelectric 2-axis linear positioner for tracking linearly decaying sinusoidal waveforms and circles. The experimental results show that the tracking control performance is noticeably improved by augmenting the feedback loop with a model of hysteresis in the feedback compensation loop.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.397-401
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• 1994

This paper proposes an identification method for a thin plate where multiple actuators and sensors are bonded. Since a thin plate has small damping ratios of all modes, each mode can be identified seperately with a bandpass filter for each modal signal. With the bandpass filter and the characteristics of the plate, the Multi-Input Multi-Output (MIMO) model of the plate can be converted to several Multi-Input Single-Output(MISO) models of second order linear difference equations of the modes. Parameters for each mode are obtained by using the Least Square method. Form there MISO models, the MIMO model is obtained in the form of the state space. Experiments were performed for an all-clamped plate with two pairs of piezoelectric actuators and sensors. The outputs of the identified model and the experimental data match well.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1025-1028
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• 2002

In this paper, a micro-turning lathe is introduced for micro machining of aluminum rod. To give feed motion, stepwise motion[2] actuators are used instead of the conventional inchworm mechanism. These are consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The guide is V-form. The linearity and positional accuracy of the actuators is good enough far high precision motion. Since the system is more compact than the conventional system using three Piezoelectric ceramics, it is applicable for the micro-machine or MEMS unit. To fabricate the lathe, a small spindle unit with ball bearings of diameter of 10 millimeter is built-up on the top the slider. The motion is feed backed with miniaturized linear encoder attached each axis slider. The diamond tool bite is used for cutting tool. The machining is tried to make small diameter rod. The possible diameter that can be machined in this machine is presented as well as chip formation, surface roughness, and machinability.

• 한국소음진동공학회논문집
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• 제15권12호
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• pp.1408-1415
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• 2005

Active vibration control of smart hull structure using Macro Fiber Composite (MFC) actuator is performed. Finite element modeling is used to obtain governing equations of motion and boundary effects of end-capped smart hull structure. Equivalent interdigitated electrode model is developed to obtain piezoelectric couplings of MFC actuator. Modal analysis is conducted to investigate the dynamic characteristics of the hull structure, and compared to the results of experimental investigation. MFC actuators are attached where the maximum control performance can be obtained. Active controller based on Linear Quadratic Gaussian (LQG) theory is designed to suppress vibration of smart hull structure. It is observed that closed loop damping can be improved with suitable weighting factors in the developed LQG controller and structural vibration is controlled effectively.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 춘계학술대회 논문집
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• pp.370-373
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• 2009

The runner-valve is an effective solution for the filling balance of the multi cavity molds. Automation of the runner-valve system is necessary for more efficient and accurate control of the filing balance. We designed an automatic runner-valve actuator for the automation and characterized the actuator by experiment. We obtained a linear relationship between motor-driving time and the height of the runner-valve. However, the motor-driving times for upward and downward directions were different due to the frictional characteristics of the actuators. Also we obtained the motor-driving times for backlashes of the 4 actuators. The results were used to formulate the relationship between the resin-arrival time and the flow rate change of the runner-valve with the theoretical equation that was derived in the previous research.

• 한국지능시스템학회논문지
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• 제10권3호
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• pp.211-217
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• 2000

A main contribution of this paper is the development of a Hopfield network-based algorithm for the fault diagnosis of the actuators in linear system with uncertainties. An unknown input decoupling approach is introduced to the design of an adaptive observer so that the observer is insensitive to uncertainties. As a result, the output observation error equation does not depend on the effect of uncertainties. Simultaneous energy minimization by the Hopfield network is used to minimize the least mean square of errors of errors of estimates of output variables. The Hopfield network provides an estimate of the gains of the actuators. When the system dynamics changes, identified gains go through a transient period and this period is used to detect faults. The proposed scheme is demonstrated through its application to a simulated second-order system.

• 한국생산제조학회지
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• 제20권3호
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• pp.322-328
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• 2011

This paper presents inverse kinematics and workspace analysis of a planar three degree-of-freedom (DOF) parallel manipulator. Furthermore, optimization problem of the manipulator is presented. The manipulator adopts PRR (Prismatic-Revolute-Revolute) mechanism and the prismatic actuators are fixed to the base. This leads to a reduction of the inertia of the moving links and hence enables it to move with high speed. The actuators are linear electric motors. First, the mechanism based on the geometry of the manipulator is introduced. Second, a workspace analysis is performed. Finally, design optimization is carried out to have large workspace. The proposed approach can be applied to the design optimization of various three DOF parallel manipulators in order to maximize their workspace. The performance of mechanism is improved and satisfies the requirements of workspace to align micro-components.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.217-222
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• 2005

Active vibration control of smart hull structure using Macro Fiber Composite (MFC) actuator is performed. Finite element modeling is used to obtain governing equations of motion and boundary effects of end-capped smart hull structure. Equivalent interdigitated electrode model is developed to obtain piezoelectric couplings of MFC actuator. Modal analysis is conducted to investigate the dynamic characteristics of the hull structure, and compared to the results of experimental investigation. MFC actuators are attached where the maximum control performance can be obtained. Active controller based on Linear Quadratic Gaussian (LQG) theory is designed to suppress vibration of smart hull structure. It is observed that closed loop damping can be improved with suitable weighting factors in the developed LQG controller and structural vibration is controlled effectively.