• 한국산학기술학회논문지
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• 제22권1호
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• pp.792-800
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• 2021

본 논문은 Halbach 자석 배열을 사용하여 새로운 구조의 선형 능동자기 베어링 개발을 제시하고자 하였다. 선형 능동자기 베어링은 자석 간 발생하는 자중 보상 능력과 코일에 전류를 인가함으로서 발생하는 동적 힘을 이용하여 반도체 장비, 가공 장비 등 다양한 산업분야에서 적용되고 있다. 기존의 선형 능동자기 베어링은 크기에 비해 동적 힘이 낮은 문제점이 있다. 따라서 본 논문에서는 기존 보다 높은 동적 힘을 발휘하는 선형 능동자기 베어링을 개발하기 위해 시뮬레이션을 통해 기존 구조를 분석하고 새로운 구조를 제안하였다. 제안된 새로운 구조의 선형 능동 자기베어링을 최적화하기 위해서 모델링 및 최적 설계를 수행하였다. Sequential Quadratic Programming을 사용하여 제안된 선형 능동자기 베어링의 기하학적 설계 변수에 대해 최적의 설계가 수행되었으며, 최적설계 된 선형 능동자기 베어링의 설계성능은 정적 힘 45.063 N, 로렌츠 힘 상수 19.543 N/A 로 기존보다 높은 동적 힘을 발휘하는 것이 확인되었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집B
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• pp.164-169
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• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.

• 한국정밀공학회지
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• 제25권6호
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• 한국정밀공학회지
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• 제20권7호
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• pp.91-98
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• 2003

In the field of precision manufacturing demanding high positioning performance, the mechanical friction in positioning device deteriorates the quality of the product and increases the cost of production for positioning devices. Therefore, we propose a contract-free linear actuator using active magnetic bearing. The structure and operating principle of the proposed system are explained, and the magnetic forces are analyzed by magnetic circuit theory to design magnetic bearings and linear actuator. With the derived equation of motion, the stability is identified. Experimental results are presented to show the feasibility.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.799-805
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• 1996

In many cases, the magnetic farce model is linearized at the origin in designing the controller of a magnetic bearing system. However. this linear assumption is violated by the unmodeled nonlinear effect such as sensor dislocation and backup bearing dislocation. Therefore, a direct probe into the nonlinear magnetic force model in an active magnetic bearing system is necessary. To analyze the nonlinear magnetic force model of a magnetic bearing system, phase plot analysis which is to plot the numerical solution of the nonlinear equation in several initial points in the interested region is applied. Phase plot analysis is used to observe a nonlinear dynamic system qualitatively (not quantitatively). With this method, we can get much useful information of the nonlinear system. Among this information, a bifurcation graph that represents stability and locations of fixed points is essential. From the bifurcation graph, a stability criterion of magnetic bearing system is derived.

• 전기학회논문지
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• 제59권4호
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• pp.797-802
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• 2010

In this paper, a systematic procedure to design a nonlinear controller for nonlinear active magnetic bearing (AMB) systems is presented. To do this, we effectively convert the AMB system into a polytopic quasi-linear parameter varying (LPV) system, which is a representation of nonlinear state-space models and is described by the convex combination of a set of precisely known vertices. Unlike the existing quasi-LPV systems, the nonlinear weighting functions, which construct the polytopic quasi-LPV model of the AMB system by connecting the vertices, include not only state variables but also the input ones. This allows us to treat the input nonlinearity effectively. By means of the derived polytopic quasi-LPV model and linear matrix inequality (LMI) conditions, nonlinear controller that stabilizes the AMB system is obtained. The effectiveness of the proposed controller design methodology is finally demonstrated through numerical simulations.

• 한국소음진동공학회논문집
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• 제19권11호
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• pp.1184-1191
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• 2009

A bearingless linear motor(BLLM) which consists of two stators and a common mover is able to levitate and move its mover without any linear bearing or even additive windings. In the previous study, BLLM was actively controlled on the translation and pitch motion, while the roll motion is passively stable. In order to control the roll motion, this paper suggests adding active magnetic bearings(AMBs) at bottom of the mover in BLLM. The AMBs control the roll motion and also partially supports the weight of the mover. In this paper, magnetic forces generated by the AMBs are estimated by using an FEM model. Based on the analysis results, the bias current of the AMBs is determined and a PD controller is designed. Through an experimental levitation test, it was verified that roll motion is well controlled by AMB during levitation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1994년도 추계학술대회 논문집
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• pp.311-316
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• 1994

In this study, a governing equation for 4-axis active magnetic bearing system composed of a rigid rotor and two radial magnetic bearings is derived. We find out that there are two kind of coupling between control axes in the system. And digital contralized controller is designed based on state-space approach and linear quadratic regulator(LQR) theory. By numerical simulation, it is shown what the designed controller can stabilize the system and control the coupling effectively using limited control input.

• 한국정밀공학회지
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• 제26권2호
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.