• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.451-452
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.871-872
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• 2009

• Tribology and Lubricants
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• 제30권3호
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• pp.139-145
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• 2014

Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

• 한국정밀공학회지
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• 제32권12호
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• pp.1031-1037
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• 2015

Laser assisted machining (LAM) is an effective method with which to effectively process difficult-to-cut materials. Simple machining processes, such as turning and linear tool paths, have been studied by many researchers. But, there are few research efforts on LAM workpieces using threedimensional shapes because of difficulties controlling the laser heat on workpieces with inclined angles or curved surfaces. Two methods for machining three-dimensional workpieces are proposed in this paper. The first is that the heat source shape and laser focal length are maintained using an index table. Second, a rotary type laser module is controlled using an algorithm to move the laser heat source in all directions. This algorithm was developed to control the rotary type laser module and the machine tool simultaneously. These methods are verified by a CATIA simulation.

• 한국정밀공학회지
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• 제28권8호
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• pp.869-877
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• 2011

In order to manufacture precision parts which are used for IT and BT Industry by machining, users need higher speed & precision machining center. So, for development of this kind of machine, we designed gantry type machining center which is piling of 3 axes on one moving body and the 2-axis rotary table is fixed on the base. It is applied linear motor that is instead of ball-screw and servo-motor combination and 50,000 rpm high-speed spindle. Composite material structure called mineral casting or resin concrete is applied also. This paper presents design technology and evaluated results of high speed and precision machining center.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 1996년도 특별강연 및 춘계학술발표 개요집
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• pp.96-98
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• 1996

Welding of corner area across the edge is a difficult problem in robotized arc welding system, especially when continuously-welded leakage-proof product is required. This paper presents the methodology of cooperation plan of an arc welding robot and 1 or 2 axis welding manipulators for corner area welding. Welding trajectory for the robot is generated using clothoid curves; symmetrical double clothoid curve or unsymmetrical clothoid curve depending on the nature of the workpiece. The clothoid curve is first formulated for the case of linear type positioning table and then applied to the case of rotary type manipulator. The methodology is then illustrated for practical downhand welding situations.

• Advances in aircraft and spacecraft science
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• 제10권1호
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• pp.67-82
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• 2023

Linear array imaging sensors are widely used in remote sensing satellites. The final products of an imaging sensor can only be used when they are geometrically, radiometrically, and spectrally calibrated. Therefore, at the first stages of sensor design, a detailed calibration procedure must be carefully planned based on the accuracy requirements. In this paper, focusing on inherent optical distortion, a step-by-step procedure for laboratory geometric calibration of a typical push-broom satellite imaging sensor is simulated. The basis of this work is the simulation of a laboratory procedure in which a linear imager mounted on a rotary table captures images of a pin-hole pattern at different angles. By these images and their corresponding pinhole approximation, the correction function is extracted and applied to the raw images to give the corrected ones. The simulation results illustrate that using this approach, the nonlinear effects of distortion can be minimized and therefore the accuracy of the geometric position of this method on the image screen can be improved to better than the order of sub-pixel. On the other hand, the analyses can be used to proper laboratory facility selection based on the imaging sensor specifications and the accuracy.

• 한국정밀공학회지
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• 제30권12호
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• pp.1303-1312
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• 2013

We report an ultra-precision lathe designed to machine micron-scale features on a large-area roll mold. The lathe can machine rolls up to 600 mm in diameter and 2,500 mm in length. All axes use hydrostatic oil bearings to exploit the high-precision, stiffness, and damping characteristics. The headstock spindle and rotary tooling table are driven by frameless direct drive motors, while coreless linear motors are used for the two linear axes. Finite element method modeling reveals that the effects of structural deformation on the machining accuracy are less than $1{\mu}m$. The results of thermal testing show that the maximum temperature rise at the spindle outer surface is approximately $0.5^{\circ}C$. Finally, performance evaluations of the error motion, micro-positioning capability, and fine-pitch machining demonstrate that the lathe is capable of producing optical-quality surfaces with micron-scale patterns with feature sizes as small as $20{\mu}m$ on a large-area roll mold.

• 한국정밀공학회지
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• 제28권3호
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• pp.285-291
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• 2011

The error motion of a machine tool spindle directly affects the surface errors of machined parts. The error motions of the spindle are not desired errors in the three linear direction motions and two rotating motions. Those are usually due to the imperfect of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions of the spindle is suggested. To estimate the error motions of the spindle, waviness of shaft and bearings, external force model was used as input data. And, the estimation models are considering geometric relationship and force equilibrium of the five degree of the freedom. To calculate error motions of the spindle, not only imperfection of the shaft, bearings, such as rolling element bearing, hydrostatic bearing, and aerostatic bearing, but also driving elements such as worm, pulley, and direct driving motor systems, were considered.