• 제목/요약/키워드: Line process

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WSix 증착에서 공정조건이 contact 저항에 미치는 영향 (Influence of Process Condition on Contact Resistance in WSix Deposition)

  • 정양희;강성준;강희순
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2002년도 춘계종합학술대회
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    • pp.279-282
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    • 2002
  • In this paper, we discuss influence of process condition on contact resistance in WSix deposition process. In the WSix deposition process, we confirmed that word line to bit line contact resistance(WBCR) due to temperature of word line WSix deposition among various process condition split experiment. RTP treatment, d-poly ion implantation dose and thickness was estimated a little bit influence on contact resistance. Also, life time of shower head in the process chamber for WSix deposition related to contact resistance. The results obtained in this study are applicable to process control and electrical characteristics for high reliability and high density DRAM's.

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고속 열처리공정 시스템의 퍼지 Run-by-Run 제어기 설계 (Design of fuzzy logic Run-by-Run controller for rapid thermal precessing system)

  • 이석주;우광방
    • 제어로봇시스템학회논문지
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    • 제6권1호
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    • pp.104-111
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    • 2000
  • A fuzzy logic Run-by-Run(RbR) controller and an in -line wafer characteristics prediction scheme for the rapid thermal processing system have been developed for the study of process repeatability. The fuzzy logic RbR controller provides a framework for controlling a process which is subject to disturbances such as shifts and drifts as a normal part of its operation. The fuzzy logic RbR controller combines the advantages of both fuzzy logic and feedback control. It has two components : fuzzy logic diagnostic system and model modification system. At first, a neural network model is constructed with the I/O data collected during the designed experiments. The wafer state after each run is assessed by the fuzzy logic diagnostic system with featuring step. The model modification system updates the existing neural network process model in case of process shift or drift, and then select a new recipe based on the updated model using genetic algorithm. After this procedure, wafer characteristics are predicted from the in-line wafer characteristics prediction model with principal component analysis. The fuzzy logic RbR controller has been applied to the control of Titanium SALICIDE process. After completing all of the above, it follows that: 1) the fuzzy logic RbR controller can compensate the process draft, and 2) the in-line wafer characteristics prediction scheme can reduce the measurement cost and time.

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NC데이타와 Off-Line Program을 이용한 연마 로봇 시스템 개발

  • 오영섭;유범상;양균의
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.692-697
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    • 1997
  • This paper presents a method of grinding and polishing automation of precision die after CNC machining. The method employs a robot system equipped with a pneumatic spindle and a special abrasive film pad. The robote program is automatically generated off-line from a PC and downloaded to robot controller. Position and orientation data for the program is supplied from cutter contact (CC) data of NC machining process. This eliminates separate robot teaching process. This paper aims at practical automation of die finishing process which is very time consuming and suffering from shortage of workpeople. Time loss for changeover from one product to next is eliminated by off-line programming exploiting appropriate NC machining data. Dextrous 6-axis robot with rigid wrist and simple tooling enables the process applicable to larger, rather complex 3 dimensional free surfaces

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레이저 용접 소재의 디프 드로잉 성형특성 해석 (Analysis of Deformation Characteristics for Deep Drawing of Laser-welded Dlank)

  • 김영석;하동호;정기조;서만석
    • 소성∙가공
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    • 제7권6호
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    • pp.519-529
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    • 1998
  • In automotive industries the stamping of laser-welded blank gives many merits which bring about dimensional accuracy, strong body assembly and high productivity. However the welding of blanks with different thickness or/and different strength materials introduces many challenging formability problems for process development and tool design. in this paper the deformation characteristics for deep drawing process of laser-welded blank with different thickness sheets are investigated by experiment as well as by FEM simulation. The blank holding force ratio to avoid the movement of weld line was suggested and compared with the experimental result for cylindrical and rectangular cup drawing process. The optimal location of weld line in laser-welded blank with different thickness sheets is calculated to compensate for the movement of weld line on deep drawing process. In addition the effect of location of weld line on formability is clarified using FEM simulation.

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수치제어 데이터와 오프라인 프로그램을 이용한 연마 로봇 시스템 개발 (The Development of Grinding Robot System Using NC data and Off-line Programming)

  • 오영섭;유범상
    • 한국정밀공학회지
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    • 제16권3호통권96호
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    • pp.9-17
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    • 1999
  • This paper presents a method of grinding and polishing automation of precision die after CNC machining. The method employs a robot system equipped with a pneumatic spindle and a special abrasive film pad. The robot program is automatically generated off-line program form a PC and downloaded to robot controller. Position and orientation data for the program is supplied form cutter contact (CC) data of NC machining process. This eliminates separate robot teaching process. This paper aims at practical automation of die finishing process which is very time consuming and suffering from shortage of workpeople. Time loss due to changeover from one product to another is eliminated by PC off-line programming exploiting appropriate NC machining data. Dextrous 6-axis robot with rigid wrist and simple tooling enables the process applicable to larger, rather complex 3 dimensional free surfaces.

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시뮬레이션 기법(技法)을 이용한 물류(物流) 시스템 개선(改善)에 관한 연구(硏究) (Material Handling System Improvement Analysis Applying Simulation Technique)

  • 신현표;박성연;이화기
    • 산업공학
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    • 제5권1호
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    • pp.35-46
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    • 1992
  • This paper deals with analysis of material handling system efficiency of a heat-exchanger manufacturing line. This line is a typical flow shop type assembly line which consists of 10 steps of assembly stations. Each station have one or two workers who assemble and move components for the job, and no special transporters for component's movement. Therfore, all the workers are involoved in unnecessary moving activities which decrease overall production efficiencies of the line. To improve productivities, production outputs and worker's job performances for this assembly line, the several alternatives are considered such as installing new conveyor lines and automatic guided vehicle(AGV) system. Analyzing economic feasibilities and responses of the system alternatives, an experimental simulation model is built suing SIMAN Ver. 3. 5 simulation language with CINEMA package for animation of the process flow. Through this animation process a vivid picturial analysis could performed on the process flow.

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기계상태의 변화를 온라인으로 탐지하기 위한 Radial Basis 하이브리드 뉴럴네트워크 모델링 (Radial Basis Hybrid Neural Network Modeling for On-line Detection of Machine Condition Change)

  • 왕지남;김광섭;정윤성
    • 대한산업공학회지
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    • 제20권4호
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    • pp.113-134
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    • 1994
  • A radial basis hybrid neural network (RHNN) is presented for an on-line detection of machine condition change. Two-phase modeling by RHNN is designed for describing a machine condition process and for predicting future signal. A moving block procedure is also designed for detecting a process change. A fast on-line learning algorithm, the recursive least square estimation, is introduced. Experimental results showed the RHNN could be utilized efficiently for on-line machine condition monitoring.

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석도금 공정의 모델링 및 시뮬레이션 (Modelling and simulation for electrolytic tinning line)

  • 김응석;안현식;김광배;양해원
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1992년도 한국자동제어학술회의논문집(국내학술편); KOEX, Seoul; 19-21 Oct. 1992
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    • pp.194-199
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    • 1992
  • In this paper, each section of an Electrolytic Tinning Line is mathematically modelled with the coupling effect accounted for. Based on the modelling, PI and feedforward controllers are designed for speed control or tension control of each section of the process line. It is shown through simulatios that the tension of the stip is controlled precisely along the entire line and the contituety of the process is insured when using the efficient control of loop towers.

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온라인 의류 점포 유형에 따른 점포속성 만족도 (The Satisfaction of Store Characteristics Depending on On-Line Store Type)

  • 김은숙;김미영
    • 복식
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    • 제57권7호
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    • pp.1-14
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    • 2007
  • This study investigates the differences between the satisfaction factors of store characteristics depending on on-line clothing store type and its satisfaction index. The collected data were analyzed by using SPSS 10.0 software with various techniques such as paired t-test, T-test, Cronbach's ${\alpha}$ reliability and factor analysis that use principal component analysis and Varimax orthogonal rotation were used. The results are summarized as follows: 1. By categorizing the level of on-line store characteristics satisfaction depending on its type, clarifies the differences between its satisfaction. The satisfaction rank of general merchandise store was as followed: searching and approaching system, buying process service, screen-displayed design, product, store credit. On the other hand, the satisfaction rank of general store was as followed: screen-displayed design, store credit, buying process service. 2. By analyzing the difference of satisfaction depending on the store type, it was found that general merchandise store was more satisfied with screen-displayed design, approaching and searching, whole payment process, the safety of payment and shipping service, security service when compared to specialty store. It was also found that specialty store was more satisfied with the variety of product, update of rare items, quality and price of product. 3. By analyzing the difference between the type of on-line clothing store satisfaction depending on age, in the case of general merchandise store, the result showed that people in their thirties were more satisfied with buying process service, store credit, customer management system when compared to twenties. In the case of specialty store, the result showed that people in their twenties were more satisfied with customer management service when compared to thirties, and when it came to buying process service, it was vice versa.