• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.05a
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• pp.279-282
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• 2002

In this paper, we discuss influence of process condition on contact resistance in WSix deposition process. In the WSix deposition process, we confirmed that word line to bit line contact resistance(WBCR) due to temperature of word line WSix deposition among various process condition split experiment. RTP treatment, d-poly ion implantation dose and thickness was estimated a little bit influence on contact resistance. Also, life time of shower head in the process chamber for WSix deposition related to contact resistance. The results obtained in this study are applicable to process control and electrical characteristics for high reliability and high density DRAM's.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.1
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• pp.104-111
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• 2000

A fuzzy logic Run-by-Run(RbR) controller and an in -line wafer characteristics prediction scheme for the rapid thermal processing system have been developed for the study of process repeatability. The fuzzy logic RbR controller provides a framework for controlling a process which is subject to disturbances such as shifts and drifts as a normal part of its operation. The fuzzy logic RbR controller combines the advantages of both fuzzy logic and feedback control. It has two components : fuzzy logic diagnostic system and model modification system. At first, a neural network model is constructed with the I/O data collected during the designed experiments. The wafer state after each run is assessed by the fuzzy logic diagnostic system with featuring step. The model modification system updates the existing neural network process model in case of process shift or drift, and then select a new recipe based on the updated model using genetic algorithm. After this procedure, wafer characteristics are predicted from the in-line wafer characteristics prediction model with principal component analysis. The fuzzy logic RbR controller has been applied to the control of Titanium SALICIDE process. After completing all of the above, it follows that: 1) the fuzzy logic RbR controller can compensate the process draft, and 2) the in-line wafer characteristics prediction scheme can reduce the measurement cost and time.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.692-697
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• 1997

This paper presents a method of grinding and polishing automation of precision die after CNC machining. The method employs a robot system equipped with a pneumatic spindle and a special abrasive film pad. The robote program is automatically generated off-line from a PC and downloaded to robot controller. Position and orientation data for the program is supplied from cutter contact (CC) data of NC machining process. This eliminates separate robot teaching process. This paper aims at practical automation of die finishing process which is very time consuming and suffering from shortage of workpeople. Time loss for changeover from one product to next is eliminated by off-line programming exploiting appropriate NC machining data. Dextrous 6-axis robot with rigid wrist and simple tooling enables the process applicable to larger, rather complex 3 dimensional free surfaces

• Transactions of Materials Processing
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• v.7 no.6
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• pp.519-529
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• 1998

In automotive industries the stamping of laser-welded blank gives many merits which bring about dimensional accuracy, strong body assembly and high productivity. However the welding of blanks with different thickness or/and different strength materials introduces many challenging formability problems for process development and tool design. in this paper the deformation characteristics for deep drawing process of laser-welded blank with different thickness sheets are investigated by experiment as well as by FEM simulation. The blank holding force ratio to avoid the movement of weld line was suggested and compared with the experimental result for cylindrical and rectangular cup drawing process. The optimal location of weld line in laser-welded blank with different thickness sheets is calculated to compensate for the movement of weld line on deep drawing process. In addition the effect of location of weld line on formability is clarified using FEM simulation.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.9-17
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• 1999

This paper presents a method of grinding and polishing automation of precision die after CNC machining. The method employs a robot system equipped with a pneumatic spindle and a special abrasive film pad. The robot program is automatically generated off-line program form a PC and downloaded to robot controller. Position and orientation data for the program is supplied form cutter contact (CC) data of NC machining process. This eliminates separate robot teaching process. This paper aims at practical automation of die finishing process which is very time consuming and suffering from shortage of workpeople. Time loss due to changeover from one product to another is eliminated by PC off-line programming exploiting appropriate NC machining data. Dextrous 6-axis robot with rigid wrist and simple tooling enables the process applicable to larger, rather complex 3 dimensional free surfaces.

• IE interfaces
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• v.5 no.1
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• pp.35-46
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• 1992

This paper deals with analysis of material handling system efficiency of a heat-exchanger manufacturing line. This line is a typical flow shop type assembly line which consists of 10 steps of assembly stations. Each station have one or two workers who assemble and move components for the job, and no special transporters for component's movement. Therfore, all the workers are involoved in unnecessary moving activities which decrease overall production efficiencies of the line. To improve productivities, production outputs and worker's job performances for this assembly line, the several alternatives are considered such as installing new conveyor lines and automatic guided vehicle(AGV) system. Analyzing economic feasibilities and responses of the system alternatives, an experimental simulation model is built suing SIMAN Ver. 3. 5 simulation language with CINEMA package for animation of the process flow. Through this animation process a vivid picturial analysis could performed on the process flow.

• Journal of Korean Institute of Industrial Engineers
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• v.20 no.4
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• pp.113-134
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• 1994

A radial basis hybrid neural network (RHNN) is presented for an on-line detection of machine condition change. Two-phase modeling by RHNN is designed for describing a machine condition process and for predicting future signal. A moving block procedure is also designed for detecting a process change. A fast on-line learning algorithm, the recursive least square estimation, is introduced. Experimental results showed the RHNN could be utilized efficiently for on-line machine condition monitoring.

• 제어로봇시스템학회:학술대회논문집
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• 1992.10a
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• pp.194-199
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• 1992

In this paper, each section of an Electrolytic Tinning Line is mathematically modelled with the coupling effect accounted for. Based on the modelling, PI and feedforward controllers are designed for speed control or tension control of each section of the process line. It is shown through simulatios that the tension of the stip is controlled precisely along the entire line and the contituety of the process is insured when using the efficient control of loop towers.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.67-68
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• 2007

• Journal of the Korean Society of Costume
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• v.57 no.7
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• pp.1-14
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• 2007

This study investigates the differences between the satisfaction factors of store characteristics depending on on-line clothing store type and its satisfaction index. The collected data were analyzed by using SPSS 10.0 software with various techniques such as paired t-test, T-test, Cronbach's ${\alpha}$ reliability and factor analysis that use principal component analysis and Varimax orthogonal rotation were used. The results are summarized as follows: 1. By categorizing the level of on-line store characteristics satisfaction depending on its type, clarifies the differences between its satisfaction. The satisfaction rank of general merchandise store was as followed: searching and approaching system, buying process service, screen-displayed design, product, store credit. On the other hand, the satisfaction rank of general store was as followed: screen-displayed design, store credit, buying process service. 2. By analyzing the difference of satisfaction depending on the store type, it was found that general merchandise store was more satisfied with screen-displayed design, approaching and searching, whole payment process, the safety of payment and shipping service, security service when compared to specialty store. It was also found that specialty store was more satisfied with the variety of product, update of rare items, quality and price of product. 3. By analyzing the difference between the type of on-line clothing store satisfaction depending on age, in the case of general merchandise store, the result showed that people in their thirties were more satisfied with buying process service, store credit, customer management system when compared to twenties. In the case of specialty store, the result showed that people in their twenties were more satisfied with customer management service when compared to thirties, and when it came to buying process service, it was vice versa.