Effect of H2 Addition on the Properties of Transparent Conducting Oxide Films Deposited by Co-sputtering of ITO and AZO (동시 스퍼터링으로 제조한 AZO-ITO 혼합박막의 증착 중 수소 혼입 영향 분석)
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- Journal of the Korean institute of surface engineering
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- 제42권6호
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- pp.267-271
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- 2009