• 제목/요약/키워드: Light Point Defects

검색결과 25건 처리시간 0.022초

STI-CMP용 세리아 슬러리 공급시스템에서 거대입자와 필터 크기가 Light Point Defects (LPDs)에 미치는 영향 (Effects of Large Particles and Filter Size in Central Chemical Supplying(CCS) System for STI-CMP on Light Point Defects (LPDs))

  • 이명윤;강현구;박진형;박재근;백운규
    • 반도체디스플레이기술학회지
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    • 제3권4호
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    • pp.45-49
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    • 2004
  • We examined large particles and filter size effects of Central Chemical Supplying (CCS) system for STI-CMP on Light Point Defects (LPDs) after polishing. As manufacturing process recently gets thinner below 0.1 um line width, it is very important to keep down post-CMP micro-scratch and LPDs in case of STI-CMP. Therefore, we must control the size distribution of large particles in a slurry. With optimization of final filter size, CCS system is one of the solutions for this issue. The oxide and nitride CMP tests were accomplished using nano-ceria slurries made by ourselves. The number of large particles in a slurry and the number of LPDs on the wafer surface after CMP were reduced with decrease of the final filter size. Oxide removal rates slightly changed according to the final filter size, showing the good performance of self-made nano ceria slurries.

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금속 표면 미세 결함에 대한 신뢰성 있는 실시간 3차원 형상 추출 시스템 개발 (Development of a Reliable Real-time 3D Reconstruction System for Tiny Defects on Steel Surfaces)

  • 장유진;이주섭
    • 제어로봇시스템학회논문지
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    • 제19권12호
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    • pp.1061-1066
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    • 2013
  • In the steel industry, the detection of tiny defects including its 3D characteristics on steel surfaces is very important from the point of view of quality control. A multi-spectral photometric stereo method is an attractive scheme because the shape of the defect can be obtained based on the images which are acquired at the same time by using a multi-channel camera. Moreover, the calculation time required for this scheme can be greatly reduced for real-time application with the aid of a GPU (Graphic Processing Unit). Although a more reliable shape reconstruction of defects can be possible when the numbers of available images are increased, it is not an easy task to construct a camera system which has more than 3 channels in the visible light range. In this paper, a new 6-channel camera system, which can distinguish the vertical/horizontal linearly polarized lights of RGB light sources, was developed by adopting two 3-CCD cameras and two polarized lenses based on the fact that the polarized light is preserved on the steel surface. The photometric stereo scheme with 6 images was accelerated by using a GPU, and the performance of the proposed system was validated through experiments.

원형관로 영상을 이용한 관로주행 로봇의 자세 추정 (Robot Posture Estimation Using Circular Image of Inner-Pipe)

  • 윤지섭;강이석
    • 대한전기학회논문지:시스템및제어부문D
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    • 제51권6호
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    • pp.258-266
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    • 2002
  • This paper proposes the methodology of the image processing algorithm that estimates the pose of the inner-pipe crawling robot. The inner-pipe crawling robot is usually equipped with a lighting device and a camera on its head for monitoring and inspection purpose of defects on the pipe wall and/or the maintenance operation. The proposed methodology is using these devices without introducing the extra sensors and is based on the fact that the position and the intensity of the reflected light from the inner wall of the pipe vary with the robot posture and the camera. The proposed algorithm is divided into two parts, estimating the translation and rotation angle of the camera, followed by the actual pose estimation of the robot . Based on the fact that the vanishing point of the reflected light moves into the opposite direction from the camera rotation, the camera rotation angle can be estimated. And, based on the fact that the most bright parts of the reflected light moves into the same direction with the camera translation, the camera position most bright parts of the reflected light moves into the same direction with the camera translation, the camera position can be obtained. To investigate the performance of the algorithm, the algorithm is applied to a sewage maintenance robot.

ESPI 방법들을 이용한 압력용기 내부 결함 측정에 관한 연구 (A study on the Measurement of Internal Defects of Pressure Vessel by using ESPI Methods)

  • 이정식;강영준;백성훈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1803-1807
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    • 2005
  • The pipe which it uses from the nuclear power plant or factory by a long period use and a corrosive action the inside defect occurs on the inside. abstract here. The ESPI method is in order to investigate the laser light in the measurement object it will be able to measure the wide territory whole in once, does not receive an effect in direction of defect not to be, has the strong point it will be able to measure a change of place arrowhead real-time defect. It measured a inside defect of pressure vessel by using Out of plane ESPI and In plane of ESPI. It compared a each method result.

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ESPI를 이용한 압력용기 내부 결함 측정 결과와 유한 요소 법을 이용한 결과 비교에 관한 연구 (A study on the Measurement result comparison of Internal Defects of Pressure Vessel by using ESPI Methods and FEM Methods)

  • 이정식;강영준;백성훈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.910-913
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    • 2005
  • The pipe which it uses from the nuclear power plant or factory by a long period use and a corrosive action the inside defect occurs on the inside. abstract here. The ESPI method is in order to investigate the laser light in the measurement object it will be able to measure the wide territory whole in once, does not receive an effect in direction of defect not to be. has the strong point it will be able to measure a change of place arrowhead real-time defect. It measured a inside defect of pressure vessel by using ESPI and FEM. It compared a each method result.

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Multiscale Modeling of Radiation Damage: Radiation Hardening of Pressure Vessel Steel

  • Kwon Junhyun;Kwon Sang Chul;Hong Jun-Hwa
    • Nuclear Engineering and Technology
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    • 제36권3호
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    • pp.229-236
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    • 2004
  • Radiation hardening is a multiscale phenomenon involving various processes over a wide range of time and length. We present a multiscale model for estimating the amount of radiation hardening in pressure vessel steel in the environment of a light water reactor. The model comprises two main parts: molecular dynamics (MD) simulation and a point defect cluster (PDC) model. The MD simulation was used to investigate the primary damage caused by displacement cascades. The PDC model mathematically formulates interactions between point defects and their clusters, which explains the evolution of microstructures. We then used a dislocation barrier model to calculate the hardening due to the PDCs. The key input for this multiscale model is a neutron spectrum at the inner surface of reactor pressure vessel steel of the Younggwang Nuclear Power Plant No.5. A combined calculation from the MD simulation and the PDC model provides a convenient tool for estimating the amount of radiation hardening.

백서 두개골 부분결손시 골막 유무에 의한 골치유 양상에 관한 연구 (THE STUDY OF BONE HEALING ON PARTIAL DEFECT OF CALVARIAL BONE WITH OR WITHOUT PERIOSTEUM IN RAT)

  • 송영완;조병욱;심정원
    • Maxillofacial Plastic and Reconstructive Surgery
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    • 제18권4호
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    • pp.746-757
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    • 1996
  • Bony defects may be found as a result of congenital anomalies, traumatic injury, automobile collisions and industrial accidents in the maxillofacial area. Such conditions are often associated with severs functional and esthetic problem. Various surgical procedure has been utilized in attempts to repair and reconstruct bony defects. Bone is a complex, living, constantly changing tissue. The architecture and composition of cancellous and cortical bone allow the skeleton to perform its essential mechanical functions. Periosteum covers the external surface of bone and consists of two layers : an outer fibrous layer and an inner more cellular and vascular layer. The inner osteogenic layer or cambium layer can form new bone while the outer layer firms part of the insertions of tendons, ligaments and muscles. This study was under taken to evaluate bone healing process on partial defect of calvarial bone with or without periosteum in rat. We made calvarial defects of different size(4mm, 6mm, 8mm) with periosteum or without periosteum in rat to study the effect of defect size on healing process. Control and experimental groups sacrified at 1, 2, 4, 6, 8 weeks, postoperatively. We examed the specimens by gloss findings, light microscophy, and fluorescent microscophy. The results were as follows. 1. Gloss findings: Control groups are larger bony defects than experimental groups after 2 weeks, and than control groups advanced healing of defected bone but experimental groups are lesser after 4, 6 weeks. After 8 weeks, bone defect has not been identified in control and experimental groups. 2. Light microscope: All defects of control groups are larger bony defects than experimental groups after 2 weeks. And than control groups show smaller defect after 4 weeks. After 8 weeks, the control group reveal pin-point sized, hardly identifiable defect space and the experimental group reveal small, but definite defect space. 3. Fluorescent microscope : Each week, new bone formation of control group is very similar to the experimental group. In this study, Osteogenesis of calvarial bone defects with periosteum or without periosteum was examined for 8 weeks in rats. The replaced periosteum had batter new bone formation than the removed periosteum.

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3-Dimensional Micro Solder Ball Inspection Using LED Reflection Image

  • Kim, Jee Hong
    • International journal of advanced smart convergence
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    • 제8권3호
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    • pp.39-45
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    • 2019
  • This paper presents an optical technique for the three-dimensional (3D) shape inspection of micro solder balls used in ball-grid array (BGA) packaging. The proposed technique uses an optical source composed of spatially arranged light-emitting diodes (LEDs) and the results are derived based on the specular reflection characteristics of the micro solder balls for BGA A vision system comprising a camera and LEDs is designed to capture the reflected images of multiple solder balls arranged arbitrarily on a tray and the locations of the LED point-light-source reflections in each ball are determined via image processing, for shape inspection. The proposed methodology aims to determine the presence of defects in 3D BGA shape using the statistical information of the relative positions of multiple BGA balls, which are included in the image. The presence of the BGA balls with large deviations in relative position imply the inconsistencies in their shape. Experiments were conducted to verify that the proposed method could be applied to inspection without sophisticated mechanism and productivity problem.

하천 제방의 영상 점군에서 식생 점 제거 필터링 기법 비교 분석 (Comparative Analysis of Filtering Techniques for Vegetation Points Removal from Photogrammetric Point Clouds at the Stream Levee)

  • 박희성;이두한
    • Ecology and Resilient Infrastructure
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    • 제8권4호
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    • pp.233-244
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    • 2021
  • 본 연구에서는 식생이 무성한 제방의 이상유무 점검을 위한 지상 LiDAR(Light Detection And Ranging) 측량의 적용성을 검토하였다. 지상 LiDAR 측량으로 생성된 제방의 영상 점군 자료에 색상필터 및 형태필터를 적용하여 각 기법별 정확성과 특성을 평가하였다. 임진강 제방의 영상 점군 자료를 이용하여 CIVE, ExG, ExGR, ExR, MExG, NGRDI, VEG, VVI, ATIN, ISL 등의 10가 식생 제거 필터를 적용하였다. 결과에 의하면 정확성은 ISL, ATIN, ExR, NGRDI, ExGR, ExG, MExG, VVI, VEG, CIVE 등의 순서로 나타났다. 색상필터는 지반 구분에 한계를 보였으며 풀꽃을 지반으로 구분하기도 했다. 형태필터는 지반 구분 정확도가 우수하나 거석을 식생으로 인식하는 한계도 보였다. 전체적으로 형태필터가 우수하나 계산 시간에서 10 배 정도 소요되었다. 정확도와 속도 향상을 위해서 형태필터와 색상필터를 결합한 복합필터에 대한 연구가 필요하다.