• Journal of the Semiconductor & Display Technology
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• v.3 no.4
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• pp.45-49
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• 2004

We examined large particles and filter size effects of Central Chemical Supplying (CCS) system for STI-CMP on Light Point Defects (LPDs) after polishing. As manufacturing process recently gets thinner below 0.1 um line width, it is very important to keep down post-CMP micro-scratch and LPDs in case of STI-CMP. Therefore, we must control the size distribution of large particles in a slurry. With optimization of final filter size, CCS system is one of the solutions for this issue. The oxide and nitride CMP tests were accomplished using nano-ceria slurries made by ourselves. The number of large particles in a slurry and the number of LPDs on the wafer surface after CMP were reduced with decrease of the final filter size. Oxide removal rates slightly changed according to the final filter size, showing the good performance of self-made nano ceria slurries.

• Journal of Institute of Control, Robotics and Systems
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• v.19 no.12
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• pp.1061-1066
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• 2013

In the steel industry, the detection of tiny defects including its 3D characteristics on steel surfaces is very important from the point of view of quality control. A multi-spectral photometric stereo method is an attractive scheme because the shape of the defect can be obtained based on the images which are acquired at the same time by using a multi-channel camera. Moreover, the calculation time required for this scheme can be greatly reduced for real-time application with the aid of a GPU (Graphic Processing Unit). Although a more reliable shape reconstruction of defects can be possible when the numbers of available images are increased, it is not an easy task to construct a camera system which has more than 3 channels in the visible light range. In this paper, a new 6-channel camera system, which can distinguish the vertical/horizontal linearly polarized lights of RGB light sources, was developed by adopting two 3-CCD cameras and two polarized lenses based on the fact that the polarized light is preserved on the steel surface. The photometric stereo scheme with 6 images was accelerated by using a GPU, and the performance of the proposed system was validated through experiments.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.51 no.6
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• pp.258-266
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• 2002

This paper proposes the methodology of the image processing algorithm that estimates the pose of the inner-pipe crawling robot. The inner-pipe crawling robot is usually equipped with a lighting device and a camera on its head for monitoring and inspection purpose of defects on the pipe wall and/or the maintenance operation. The proposed methodology is using these devices without introducing the extra sensors and is based on the fact that the position and the intensity of the reflected light from the inner wall of the pipe vary with the robot posture and the camera. The proposed algorithm is divided into two parts, estimating the translation and rotation angle of the camera, followed by the actual pose estimation of the robot . Based on the fact that the vanishing point of the reflected light moves into the opposite direction from the camera rotation, the camera rotation angle can be estimated. And, based on the fact that the most bright parts of the reflected light moves into the same direction with the camera translation, the camera position most bright parts of the reflected light moves into the same direction with the camera translation, the camera position can be obtained. To investigate the performance of the algorithm, the algorithm is applied to a sewage maintenance robot.

• Proceedings of the Materials Research Society of Korea Conference
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• 2006.05a
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• pp.16.2-16.2
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• 2006

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1803-1807
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• 2005

The pipe which it uses from the nuclear power plant or factory by a long period use and a corrosive action the inside defect occurs on the inside. abstract here. The ESPI method is in order to investigate the laser light in the measurement object it will be able to measure the wide territory whole in once, does not receive an effect in direction of defect not to be, has the strong point it will be able to measure a change of place arrowhead real-time defect. It measured a inside defect of pressure vessel by using Out of plane ESPI and In plane of ESPI. It compared a each method result.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.910-913
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• 2005

The pipe which it uses from the nuclear power plant or factory by a long period use and a corrosive action the inside defect occurs on the inside. abstract here. The ESPI method is in order to investigate the laser light in the measurement object it will be able to measure the wide territory whole in once, does not receive an effect in direction of defect not to be. has the strong point it will be able to measure a change of place arrowhead real-time defect. It measured a inside defect of pressure vessel by using ESPI and FEM. It compared a each method result.

• Nuclear Engineering and Technology
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• v.36 no.3
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• pp.229-236
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• 2004

Radiation hardening is a multiscale phenomenon involving various processes over a wide range of time and length. We present a multiscale model for estimating the amount of radiation hardening in pressure vessel steel in the environment of a light water reactor. The model comprises two main parts: molecular dynamics (MD) simulation and a point defect cluster (PDC) model. The MD simulation was used to investigate the primary damage caused by displacement cascades. The PDC model mathematically formulates interactions between point defects and their clusters, which explains the evolution of microstructures. We then used a dislocation barrier model to calculate the hardening due to the PDCs. The key input for this multiscale model is a neutron spectrum at the inner surface of reactor pressure vessel steel of the Younggwang Nuclear Power Plant No.5. A combined calculation from the MD simulation and the PDC model provides a convenient tool for estimating the amount of radiation hardening.

• Maxillofacial Plastic and Reconstructive Surgery
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• v.18 no.4
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• pp.746-757
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• 1996

Bony defects may be found as a result of congenital anomalies, traumatic injury, automobile collisions and industrial accidents in the maxillofacial area. Such conditions are often associated with severs functional and esthetic problem. Various surgical procedure has been utilized in attempts to repair and reconstruct bony defects. Bone is a complex, living, constantly changing tissue. The architecture and composition of cancellous and cortical bone allow the skeleton to perform its essential mechanical functions. Periosteum covers the external surface of bone and consists of two layers : an outer fibrous layer and an inner more cellular and vascular layer. The inner osteogenic layer or cambium layer can form new bone while the outer layer firms part of the insertions of tendons, ligaments and muscles. This study was under taken to evaluate bone healing process on partial defect of calvarial bone with or without periosteum in rat. We made calvarial defects of different size(4mm, 6mm, 8mm) with periosteum or without periosteum in rat to study the effect of defect size on healing process. Control and experimental groups sacrified at 1, 2, 4, 6, 8 weeks, postoperatively. We examed the specimens by gloss findings, light microscophy, and fluorescent microscophy. The results were as follows. 1. Gloss findings: Control groups are larger bony defects than experimental groups after 2 weeks, and than control groups advanced healing of defected bone but experimental groups are lesser after 4, 6 weeks. After 8 weeks, bone defect has not been identified in control and experimental groups. 2. Light microscope: All defects of control groups are larger bony defects than experimental groups after 2 weeks. And than control groups show smaller defect after 4 weeks. After 8 weeks, the control group reveal pin-point sized, hardly identifiable defect space and the experimental group reveal small, but definite defect space. 3. Fluorescent microscope : Each week, new bone formation of control group is very similar to the experimental group. In this study, Osteogenesis of calvarial bone defects with periosteum or without periosteum was examined for 8 weeks in rats. The replaced periosteum had batter new bone formation than the removed periosteum.

• International journal of advanced smart convergence
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• v.8 no.3
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• pp.39-45
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• 2019

This paper presents an optical technique for the three-dimensional (3D) shape inspection of micro solder balls used in ball-grid array (BGA) packaging. The proposed technique uses an optical source composed of spatially arranged light-emitting diodes (LEDs) and the results are derived based on the specular reflection characteristics of the micro solder balls for BGA A vision system comprising a camera and LEDs is designed to capture the reflected images of multiple solder balls arranged arbitrarily on a tray and the locations of the LED point-light-source reflections in each ball are determined via image processing, for shape inspection. The proposed methodology aims to determine the presence of defects in 3D BGA shape using the statistical information of the relative positions of multiple BGA balls, which are included in the image. The presence of the BGA balls with large deviations in relative position imply the inconsistencies in their shape. Experiments were conducted to verify that the proposed method could be applied to inspection without sophisticated mechanism and productivity problem.

• Ecology and Resilient Infrastructure
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• v.8 no.4
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• pp.233-244
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• 2021

This study investigated the application of terrestrial light detection and ranging (LiDAR) to inspect the defects of the vegetated levee. The accuracy of vegetation filtering techniques was compared by applying filtering techniques on photogrammetric point clouds of a vegetated levee generated by terrestrial LiDAR. Representative 10 vegetation filters such as CIVE, ExG, ExGR, ExR, MExG, NGRDI, VEG, VVI, ATIN, and ISL were applied to point cloud data of the Imjin River levee. The accuracy order of the 10 techniques based on the results was ISL, ATIN, ExR, NGRDI, ExGR, ExG, MExG, VVI, VEG, and CIVE. Color filters show certain limitations in the classification of vegetation and ground and classify grass flower image as ground. Morphological filters show a high accuracy of the classification, but they classify rocks as vegetation. Overall, morphological filters are superior to color filters; however, they take 10 times more computation time. For the improvement of the vegetation removal, combined filters of color and morphology should be studied.