• 제목/요약/키워드: Lift-off

검색결과 420건 처리시간 0.028초

새로운 신호처리회로와 ISFET 요소센서의 단일칩 집적 (One-Chip Integration of a New Signal Process Circuit and an ISFET Urea Sensor)

  • 서화일;손병기
    • 전자공학회논문지A
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    • 제28A권12호
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    • pp.46-52
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    • 1991
  • A new signal process circuit using two ISFETs as the input devices of the MOS differential amplifier stage for an ISFET biosensor has been developed. One chip integration of the newly developed signal process circuit, ISFETs and a Pt quasi-reference electrode has been carried out according to modified LOCOS p-well CMOS process. The fabricated chip showed gains of 0.8 and 1.6, good liniarity in the input-output relationship and very small power dissipation, 4mW. The chip was applied to realize a urea sensor by forming an immobilized urease membrane, using lift-off technique. on the gate of an ISFET. The urea sensor chip showed stable responses in a wide range of urea concentrations.

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누설자속탐상법의 결함검출능력 향상에 관한 연구 (Improvement in Probability of Detection for Leakage Magnetic Flux Methods)

  • 이진이
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2004년도 추계학술대회
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    • pp.13-18
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    • 2004
  • It is important to estimate the distribution of intensity of a magnetic field for application of magnetic method to industrial nondestructive evaluation. Magnetic camera provides the distribution of a quantitative magnetic field with homogeneous lift-off and same spatial resolution. Leakage magnetic flux near the crack on the specimen could be amplified by 3-dimensional magnetic fluid and zoom in and out of measurement area. This study introduces the experimental consideration of the effects of lens for concentrating of magnetic flux. The experimental results showed that the magnetic fluid has sufficient lens effect for magnetic camera and effect of improvement in probability of detection.

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마그네토스트릭션 효과를 이용한 회전축의 비접촉 결함진단 (Non-Contact Damage Detection of Rotating Shafts by Using the Magnetostrictive Effect)

  • 김윤영;한순우;이호철
    • 대한기계학회논문집A
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    • 제26권8호
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    • pp.1599-1607
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    • 2002
  • The purpose of this work is to suggest a new non-contact damage detection method for rotating ferromagnetic shafts. The presence and the location of a damage in rotating shafts are assessed by means of longitudinal elastic waves propagating along the shafts. These waves are measured by non-contact magnetostrictive sensors consisting of a coil and bias magnets. This paper shows the effectiveness of the sensors in the damage detection of rotating shafts. Several issues occurring in the application of the sensors to rotating shafts are carefully investigated.

PC에 의한 디이프 드로잉 금형설계의 자동화에 관한 연구 (A Study on Tool Design of Deep Drawing Using Personal Computer)

  • 최재찬;김병민;허만조;김성원
    • 한국정밀공학회지
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    • 제7권3호
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    • pp.56-65
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    • 1990
  • This paper describes a computer aided tool design system of deep drawing of cylindrical cups with or without flange by press. An approach to system is based on knowledge based system. The computer program has written in basic language with personal computer Knowledges for tool design are formulated from the plasticity theory, handbooks, experimental results and empirical knowhow of the field experts. The capabilities of developed system include 1) the selection of tool structure (with or without blank holder, single or double action, lift up or draw off type), 2) the design of tool elements(punch/holder, die/holder etc.) for the previous selected tool structure by the process planning output and the production quantity. The final output is generated in graphics form for design sheet.

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Etching Characteristics of Au Film using Capacitively Coupled CF4/Ar Plasma

  • Kim, Gwang-Beom;Hong, Sang-Jeen
    • 동굴
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    • 제82호
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    • pp.1-4
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    • 2007
  • In this paper, the etching of Au films using photoresist masks on Si substrates was investigated using a capacitively coupled plasma etch reactor. The advantages of plasma etch techniques over current methods for Au metalization include the ability to simplify the metalization process flow with respect to resist lift-off schemes, and the ability to cleanly remove etched material without sidewall redeposition, as is seen in ion milling. The etch properties were measured for different gas mixing ratios of CF4/Ar, and chamber pressures while the other conditions were fixed. According to statistical design of experiment (DOE), etching process of Au films was characterized and also 20 samples were fabricated followed by measuring etch rate, selectivity and etch profile. There is a chemical reaction between CF4 and Au. Au- F is hard to remove from the surface because of its high melting point. The etching products can be sputtered by Ar ion bombardment.

Fabrication of Sputtered Gated Silicon Field Emitter Arrays with Low Gate Leakage Currents by Using Si Dry Etch

  • Cho, Eou Sik;Kwon, Sang Jik
    • Transactions on Electrical and Electronic Materials
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    • 제14권1호
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    • pp.28-31
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    • 2013
  • A volcano shaped gated Si-FEA (silicon field emitter array) was simply fabricated using sputtering as a gate electrode deposition and lift-off for the removal of the oxide mask, respectively. Due to the limited step coverage of well-controlled sputtering and the high aspect ratio in Si dry etch caused by high RF power, it was possible to obtain Si FEAs with a stable volcano shaped gate structure and to realize the restriction of gate leakage current in field emission characteristics. For 100 tip arrays and 625 tip arrays, gate leakage currents were restricted to less than 1% of the anode current in spite of the volcano-shaped gate structure. It was also possible to keep the emitters stable without any failure between the Si cathode and gate electrode in field emission for a long time.

PSC 부재의 유효 프리스트레스력 평가를 위한 실험적 연구 (An Experimental Study to Determine the Effective Prestress force of PSC Beam)

  • 정철헌;박재균;김광수
    • 한국안전학회지
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    • 제23권2호
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    • pp.21-29
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    • 2008
  • To evaluate the structural integrity of the NPP containment building more rigorously, the effective prestress, which is one of the most affecting elements, needs to be estimated exactly. This paper presents the results of an experimental study to determine the effective prestress force in prestressed concrete beams. It is possible to improve the effective prestress measuring method by test beam, which is being applied for the investigation of the nuclear power plant in operation. If experimentally evaluated Lift-Off method in this study can be coupled with test beam test currently being used in in-service nuclear power plant, it is possible to measure prestress loss of the tendon and the level of the effective prestress load.

CRW 비행체의 공력특성 해석 (Analysis on Aerodynamic Characteristics of the CRW Air-Vehicle)

  • 최성욱;김재무
    • 한국전산유체공학회지
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    • 제8권4호
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    • pp.26-33
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    • 2003
  • Smart UAV Development Program, one of the 21c Frontier R&D Program sponsored by MOST(Ministry of Science and Technology), was launched in 2002 As an air vehicle for the Smart UAV, CRW(Canard Rotor/wing) concept was one of the candidates compared in trade-off study. The CRW concept has not only been proven completely but its aerodynamic characteristics not known in detail yet. Two calculation methods were adopted in this study to obtain aerodynamic data for the CRW First method was the superpose DATCOM method which is capable of three lifting sufaces, and second one is the full Navier-Stokes computation around CRW configuration using overset grid method. Basic aerodynamic characteristics of the CRW configuration was analyzed and the minimum drag level with lift to drag ratio is presented. The peculiar flow characteristics around rotor/wing and hub were also examined and considered in the configuration design.

플라즈마 가진에 의한 원형 실린더 후류의 제어 (CONTROL OF CIRCULAR CYLINDER WAKE USING PLASMA ACTUATION)

  • 김동주
    • 한국전산유체공학회지
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    • 제17권2호
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    • pp.71-77
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    • 2012
  • Numerical simulations are carried out for flow over a circular cylinder controlled by the momentum forcing which is generated by a pair of plasma actuators symmetrically mounted on the cylinder surface. A popular and empirical plasma model is used for the spatial distribution of momentum forcing. In this study, we consider two different types of actuation, i.e., steady and unsteady (or pulsed) actuation. In the unsteady actuation, the actuation is turned on and off periodically, its frequency being a control parameter. The objective of this study is to investigate the effects of actuator location and actuation frequency on the flow structures and the forces on the cylinder. Results show that the cylinder wake can be effectively controlled by proper actuator location. For example, when the actuators are located at $120^{\circ}$ from the stagnation point, vortex shedding is completely suppressed with the boundary layer almost fully attached to the surface, resulting in drag reduction and lift elimination.

열전박막을 이용한 마이크로 냉각소자 제작 (Fabrication of a Micro Cooler using Thermoelectric Thin Film)

  • 한승우;최현주;김병일;김병민;김동호;김욱중
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회A
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    • pp.1459-1462
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    • 2007
  • In general a thermoelectric cooler (TEC) consists of a series of P type and N type thermoelectric materials sandwiched between two wafers. When a DC current passes through these materials, three different effects take place; Peltier effect, Joule heating effect and heat transfer by conduction due to temperature difference between hot and cold plates. In this study we have developed a micro TEC using $Bi_2Te_3$ (N type) and $Bi_{0.5}Sb_{1.5}Te_3$ (P type) thin films. In order to improve that performance of a micro TEC, we made 10 um height TE legs using special PR only for lift-off. We measured COP (coefficient of performance) and temperature difference between hot and cold connectors with current.

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