• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2006.05a
• /
• pp.665-666
• /
• 2006

In precision laser microfabrication, focusing is essential to acquire good machining precision and uniform machining quality. If it does not perform, laser machining cannot be realized. So, confocal scanning method with high depth resolution is used for focus detection technique. This paper is concerned with a procedure for design, analysis and performance test of an autofocus fine actuating stage, which is composed of flexure-hinge type lever mechanism and piezoelectric actuator. Through series of analytical design, the stage is simplified as a rigid bodies(lever and main body) and springs(flexure hinges). The simplified model was applied to determine the dimension of flexure hinges and lever. After structural analysis confirmed design requirement, an actual stage was made and verified through an experiment on the static and dynamic characteristics(maximum stroke and 1st natural frequency). The fabricated stage was satisfied with the design requirement.

• Journal of the Korean Society for Precision Engineering
• /
• v.18 no.3
• /
• pp.152-157
• /
• 2001

An ultraprecision rotary motor is developed using inchworm motion of two belts actuated by elongation of piezoelectric elements. A symmetric lever mechanism with flexure hinges is designed to connect belts with piezoelectric elements. The lever mechanism is used not only to amplify the elongation of piezoelectric element but also to minimize the numbers of components and the effort for assembly. By experiment, the rotational angle by one cycle is varied from $0.2{\times}10-4 rad to 9.76{\times}10-4$ rad depending on input signal amplitude. Further, the motor has the capability of getting more precise rotational resolution by enlarging the radius of the rotor.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.6
• /
• pp.106-113
• /
• 2009

A 6-DOF precision stage was developed based on parallel kinematics structure with flexure hinges to eliminate backlash, stick-slip and friction and to minimize parasitic motion coupled with motions in the other-axis directions. For the stage, lever linkage mechanism was devised to reduce the height of system for the enhancement of horizontal stiffness. Frequency response comparison between experimental results and mathematical model extracted from dynamics of the stage was performed to identify the system parameters such as spring constants and damping coefficients of actuation modules, which cannot be calculated accurately by analytic methods owing to their complicated structures. This newly developed precision stage and its identified model will be very useful for precision positioning and control because of its high accuracy and non-coupled movement.

• Proceedings of the KIEE Conference
• /
• 1993.07b
• /
• pp.1054-1056
• /
• 1993

The displacement amplifying units(DAUs) of the flexure hinge mechanism are used to amplify the displacements from the Piezo actuators using the principle of a lever. We fabricate for two step DAUs with the SUS304(stainless steel) and experiment them. The fabricated four DAUs have all the hinges aligned to a straight line, and differ in the first step ideal gain($4{\times}10,\;6{\times}10,\;8{\times}10,\;10{\times}10$). We measure the input and the output displacements to get the real amplifying gain. The resonant frequencies of these DAUs are also measured. The experimental results are compared with those of the theoretical formula and with those of the numerical analyses.