An Ultraprecision Rotary Motor based on Inchworm-type Actuation

인치웜 구동방법에 의한 초정밀 회전모터

  • Kim, Sang-Chae (Samsung Electronics ) ;
  • Kim, Soo-Hyun (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
  • 김상채 (삼성전자(주) 중앙연구소 광메카Lab) ;
  • 김수현 (한국과학기술원 기계공학과)
  • Published : 2001.03.01

Abstract

An ultraprecision rotary motor is developed using inchworm motion of two belts actuated by elongation of piezoelectric elements. A symmetric lever mechanism with flexure hinges is designed to connect belts with piezoelectric elements. The lever mechanism is used not only to amplify the elongation of piezoelectric element but also to minimize the numbers of components and the effort for assembly. By experiment, the rotational angle by one cycle is varied from $0.2{\times}10-4 rad to 9.76{\times}10-4$ rad depending on input signal amplitude. Further, the motor has the capability of getting more precise rotational resolution by enlarging the radius of the rotor.

Keywords

References

  1. Torn ToJo, Kazuyoshi Sugihara, 'Piezoelectricdriven Turntable with High Positioning Accuracy,' JSPE, Vol. 53, No.6, pp. 879-884, 1987
  2. Hiroyuki Shimizu, 'A Basic Study on the Development of a Highly Accurate Rotational Positioning Actuator,' JSME(C), Vol. 55, No. 517, pp. 2371-2375,1989
  3. Khanh Duong, 'Development of a Rotary Inchworm Piezoelectric Motor,' SPIE, Vol. 2443, pp. 782-788, 1995 https://doi.org/10.1117/12.208315
  4. Kazumasa Ohnishi, 'Rotary Inchworm-Type Piezoelectric Actuator,' T.IEE, Vol. 110-D, No.1, pp. 51-58,1990
  5. W.Xu, T.G.King, 'A New Type of Piezoelectric Motor Using a Roller Clutch Mechanism,' Mechatronics, Vol. 6, No.3, pp. 303-315,1996 https://doi.org/10.1016/0957-4158(95)00087-9
  6. Akira Satake, 'Development of Rotational Fine Positioning Mechanism with Piezoelectric Actuator,' ISCIE, pp. 253-257, 1990
  7. J. M. Paros and L. Weisbord, 'How to Design Flexure Hinges,' Machine Design, pp. 151-156, Nov., 1965
  8. Fredric E. Scire and E. Clayton Teague, 'Piezodriven 50-${mu}m$ Range Stage with Subnanometer Resolution,' Rev. Sci. Instrum., Vol. 49, No. 12, pp. 1735-1740, 1978 https://doi.org/10.1063/1.1135327