• Applied Science and Convergence Technology
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• v.24 no.5
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• pp.172-177
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• 2015

We present disordered moth eye structures on curved surfaces fabricated by dry etching of thermally dewetted metal nanoparticles. This lithography-free fabrication allows the formation of subwavelength scale nanostructures on the strongly inclined surfaces such as ball lens as well as on the microlens arrays with low curvature. In particular, we found that the size and average distance of nanostructures are closely related to the inclined angle of the surface. Experimental results on oblique angle deposition of metal thin films followed by thermal dewetting also support these effects.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.914-917
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• 2002

Fabrication of micro carbon structures and patterns using laser-assisted chemical vapor deposition is studied. Argon ion laser and ethylene were used to grow micro carbon rod through pyrolytic decomposition of the reaction gas. The influence of reaction gas pressure and incident laser power on the diameter and growth rate of the micro carbon rod was experimentally investigated. The diameter of micro carbon rods increases linearly with respect to the laser power but is almost independent of the reaction gas pressure. Growth rate of the rod changes little with gas pressure when the laser power remains below 1W. When the carbon rod was grown at near threshold laser power, a very smooth surface is obtained on the rod. By continuously moving the focusing lens in the direction of growth, a micro carbon rod with a diameter of 28 ${\mu}{\textrm}{m}$ and aspect ratio of 100 was fabricated.

• Transactions on Electrical and Electronic Materials
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• v.18 no.6
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• pp.341-344
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• 2017

Infrared (IR) filters were developed to implement integrated three-dimensional (3D) image sensors that are capable of obtaining both color image and depth information at the same time. The combination of light filters applicable to the 3D image sensor is composed of a modified IR cut filter mounted on the objective lens module and on-chip filters such as IR pass filters and color filters. The IR cut filters were fabricated by inorganic $SiO_2/TiO_2$ multilayered thin-film deposition using RF magnetron sputtering. On-chip IR pass filters were synthetized by dissolving various pigments and dyes in organic solvents and by subsequent patterning with photolithography. The fabrication process of the filters is fairly compatible with the complementary metal oxide semiconductor (CMOS) process. Thus, the IR cut filter and IR pass filter combined with conventional color filters are considered successfully applicable to 3D image sensors.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.05a
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• pp.74-77
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• 2009

Demands for high quality and productivity of precision mechanical parts are increasing greatly nowadays due to the rapid growth of information technologies and convergence industries. Therefore, core technologies for fabrication of precision mechanical parts are the fundamental issues, which are the precision machining, micro powder injection molding technologies, MR polishing, micro polymer processes, micro actuation modules and so on. These technologies are directly related to the mass production of high functional devices and machineries. Therefore, this study investigates the fabrication technologies of micro precision molds for advanced devices for possible commercialization in a near future.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.3
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• pp.227-231
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• 2013

Electrodeionization is a hybrid separation process of electrodialysis and ion exchange to produce high purity water under electric field. This article provides a fabrication result of hole patterned metal electrode for elecrodeionization system. The hole patterns have been fabricated by nanosphere lithography (NSL). The technique utilizes the self-assembled nanospheres as lens-mask patterns and collimated laser beam source. The hole patterns have a periodic array structure. The images of hole pattern on metal electrode prepared were observed by SEM. We believe that the periodic hole patterned metal electrode structure is a useful device applicable for metal mat electrode in electrodeionization system.

• Korean Journal of Metals and Materials
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• v.50 no.3
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• pp.233-236
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• 2012

ZnO nanowires were fabricated through thermal evaporation of Zn or ZnS powder using solar energy. The Zn or ZnS powder was heated and evaporated by sunlight. The sunlight was concentrated on the Zn or ZnS powder by a converging lens and then the Zn or ZnS powder was evaporated and oxidized in air. After oxidation, ZnO nanowires were fabricated in the focal point. Strong ultraviolet emission, which corresponds to the near band-edge emission, was observed from the ZnO nanowires synthesized using Zn powder as a source material. Meanwhile, green emission, related to intrinsic defects such as oxygen vacancies, prevailed for the ZnO nanowires fabricated using ZnS powder. No catalysts were used in the fabrication of the ZnO nanowires, which suggested the ZnO nanowires were grown by a vapor-solid mechanism.

• Journal of Korean Ophthalmic Optics Society
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• v.14 no.2
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• pp.15-26
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• 2009

Purpose: To compare and analyze the ocular changes after wearing conventional and 2-weeks cosmetic tinted contact lens, which were made of different material and fabrication method. Methods: Thirty five university students, age of twenties, participated in this study. With daily wearing schedule, they had worn temporary cosmetic tinted lens for 2 weeks and conventional tinted lens for two month in their right and left eye, respectively. Subjective symptoms and objective signs were graded by using CCLRU scales and corneal thickness were measured after 1 day and 2 months wearing, and under or over 5 hours wearing in a day, respectively. Results: Major subjective symptoms found in the student wearing cosmetic tinted contact lens for a 1 day and 2 months were dryness, redness, foreign body sensation and itchiness. It was also found that those symptoms were more severe in left eye (conventional cosmetic tinted contact lens) than right eye (2-weeks cosmetic tinted contact lens). However, symptoms of redness in both eyes showed statistically significant difference in the case of 1 day and 2 months wearing and under or over 5 hours wearing in a day (p=0.000). After 2 months wearing, left eye with conventional cosmetic tinted contact lens showed limbal redness (p=0.000) and bulbar conjunctival redness (p=0.012) with statistically significance, whereas there was no significant difference in both eyes before lens wear. Left eye showed statistically significant changes in all objective signs, but right eye showed palpebral conjunctival redness, corneal staining and conjunctival staining. Therefore, it was concluded that conventional cosmetic tinted contact lens may be more effective on ocular changes after wearing of lens. A statistically significant changes in both eyes after wearing lens were found that corneal thickness increased about $5{\mu}m$ (p=0.001) in right eye whereas $7{\mu}m$ (p=0.004) in left eye. Conclusions: A statistically significant number of participants in this study preferred to wearing of high Dk/t temporary cosmetic tinted contact lens made by sandwich method which resulted in less ocular changes and may give more healthy and safe ocular conditions.

• Korean Journal of Optics and Photonics
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• v.16 no.5
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• pp.440-445
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• 2005

The limitation of measurement accuracy and reliability of autostigmatic null lens system are studied for the cases of using inter-distance of null lenses as the adjustment factor of alignment and fixing the distance by mounting. If we investigate the first case, the wavefront aberration of null lens system is compensated by the adjustment process even though the shape of aspherical surface is not properly fabricated. As the result, it brings about the problem of measurement reliability. However, for the fixing process by mounting null lenses, it doesn't cause the reliability problem because the wavefront aberration of null lens system is not compensated. Further, the fixing process shows nearly same result in measurement accuracy to the adjustment process, that is, $0.0316{\lambda}$ vs. $0.0326{\lambda}$. So, we can conclude the setup for autostigmatic null lens system must be constituted by means of the fixing process. Meanwhile, we introduce and define the alignment aperture on aspheircal mirror, which can be approximated as spherical zone for alignment of null lens system, and besides, we calculate the required fabrication accuracy of the zone for the necessary measurement accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.3
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• pp.299-305
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• 2015

In this paper, we propose a simple and low-cost fabrication method of polymer microlens using solvent-vapor-assisted reflow (SVAR). Metal molds for replication of polymer were fabricated using micro milling and the cylindrical shape of polymer was imprinted using hot-embossing process. The cylindrical shape of polymer was changed to hemispherical lens shape by SVAR. The characteristics of fabricated microlens were evaluated according to the condition of SVAR such as temperature and time. The focal length of polymer microlens could be controlled more easily in low-temperature and long-time condition than in high-temperature and short-time condition. That is, the level of concentrated light to focal point could be improved through the control of temperature and time. Also, we confirmed that toluene was more appropriate solvent than acetone in fabrication of PMMA polymer microlens using SVAR.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.380-381
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• 2012

Bioinspired sea urchin-like structures were fabricated on silicon by inductively coupled plasma (ICP) etching using lens-like shape hexagonally patterned photoresist (PR) patterns and subsequent metal-assisted chemical etching (MaCE) [1]. The lens-like shape PR patterns with a diameter of 2 ${\mu}m$ were formed by conventional lithography method followed by thermal reflow process of PR patterns on a hotplate at $170^{\circ}C$ for 40 s. ICP etching process was carried out in an SF6 plasma ambient using an optimum etching conditions such as radio-frequency power of 50 W, ICP power of 25 W, SF6 flow rate of 30 sccm, process pressure of 10 mTorr, and etching time of 150 s in order to produce micron structure with tapered etch profile. 15 nm thick Ag film was evaporated on the samples using e-beam evaporator with a deposition rate of 0.05 nm/s. To form Ag nanoparticles (NPs), the samples were thermally treated (thermally dewetted) in a rapid thermal annealing system at $500^{\circ}C$ for 1 min in a nitrogen environment. The Ag thickness and thermal dewetting conditions were carefully chosen to obtain isolated Ag NPs. To fabricate needle-like nanostructures on both the micron structure (i.e., sea urchin-like structures) and flat surface of silicon, MaCE process, which is based on the strong catalytic activity of metal, was performed in a chemical etchant (HNO3: HF: H2O = 4: 1: 20) using Ag NPs at room temperature for 1 min. Finally, the residual Ag NPs were removed by immersion in a HNO3 solution. The fabricated structures after each process steps are shown in figure 1. It is well-known that the hierarchical micro- and nanostructures have efficient light harvesting properties [2-3]. Therefore, this fabrication technique for production of sea urchin-like structures is applicable to improve the performance of light harvesting devices.