• Title/Summary/Keyword: Layer by Layer Deposition

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Application of ultra-high-temperature ceramics to oxidation-resistant and anti-ablation coatings for carbon-carbon composite (탄소-탄소 복합재의 내삭마 내산화 코팅을 위한 초고온 세라믹스의 적용)

  • Kim, Hyun-Mi;Choi, Sung-Churl;Cho, Nam Choon;Lee, Hyung Ik;Choi, Kyoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.29 no.6
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    • pp.283-293
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    • 2019
  • As applications in extreme environments such as aerospace, high-energy plasma and radio-active circumstances increases, the demand for materials that require higher melting points, higher mechanical strength and improved thermal conductivity continues to increase. Accordingly, in order to improve the oxidation/abrasion resistance of the carbon-carbon composite, which is a typical heat-resistant material, a method of using ultra high temperature ceramics was reviewed. The advantages and disadvantages of CVD coating, pack cementation and thermal plasma spraying, the simplest methods for synthesizing ultra-high temperature ceramics, were compared. As a method for applying the CVD coating method to C/C composites with complex shapes, the possibility of using thermodynamic calculation and CFD simulation was proposed. In addition, as a result of comparing the oxidation resistance of the TaC/SiC bi-layer coating and TaC/SiC multilayer coating produced by this method, the more excellent oxidation resistance of the multilayer coating on C/C was confirmed.

Characteristics of MHEMT Devices Having T-Shaped Gate Structure for W-Band MMIC (W-Band MMIC를 위한 T-형태 게이트 구조를 갖는 MHMET 소자 특성)

  • Lee, Jong-Min;Min, Byoung-Gue;Chang, Sung-Jae;Chang, Woo-Jin;Yoon, Hyung Sup;Jung, Hyun-Wook;Kim, Seong-Il;Kang, Dong Min;Kim, Wansik;Jung, Jooyong;Kim, Jongpil;Seo, Mihui;Kim, Sosu
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.2
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    • pp.99-104
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    • 2020
  • In this study, we fabricated a metamorphic high-electron-mobility transistor (mHEMT) device with a T-type gate structure for the implementation of W-band monolithic microwave integrated circuits (MMICs) and investigated its characteristics. To fabricate the mHEMT device, a recess process for etching of its Schottky layer was applied before gate metal deposition, and an e-beam lithography using a triple photoresist film for the T-gate structure was employed. We measured DC and RF characteristics of the fabricated device to verify the characteristics that can be used in W-band MMIC design. The mHEMT device exhibited DC characteristics such as a drain current density of 747 mA/mm, maximum transconductance of 1.354 S/mm, and pinch-off voltage of -0.42 V. Concerning the frequency characteristics, the device showed a cutoff frequency of 215 GHz and maximum oscillation frequency of 260 GHz, which provide sufficient performance for W-band MMIC design and fabrication. In addition, active and passive modeling was performed and its accuracy was evaluated by comparing the measured results. The developed mHEMT and device models could be used for the fabrication of W-band MMICs.

The Study on Wound Healing in Rabbit Skins by Low-intensity Laser Irradiation (저강도 레이저 조사에 의한 가토 피부의 상처 치유에 관한 연구)

  • 김식현;전진석
    • Biomedical Science Letters
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    • v.6 no.2
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    • pp.119-129
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    • 2000
  • The skin is an organ that has many important roles, including protection against infection, regulation of temperature and fluid loss, and sensory function. Injury to the skin, wound repair normally involves: (1) balanced activity of inflammation, (2) the re-epithelial phase and (3) the matrix formation of remodeling phase. Thus, skin wound healing is a finely controlled biological process involving a series of complex cellular interactions. Laser therapy is being implemented with increasing frequency in medicine. Low intensity laser is one that is capable of producing an energy density so low that any biologic alterations are the result of direct irradiation effect, not thermal events. This study was designed to evaluate the efficacy of low intensity laser therapy on skin wound healing in rabbits. A total of 10 male rabbits (New Zealand White Rabbit), age 8 weeks were used. Skin wound were surgically created dorso-lateral on the flank of 10 rabbits (2$\times$2 cm/damage areas). The experimental animals were treated with 5Hz (830 nm wave length) low-intensity laser (MILTA-01 Model) daily for 10 min (1.6 J/$cm^2$) for 12 days. Control animals were sham treated with the laser head. Laser irradiation animals showed a complete remodeling of the epithelial layer, a positive repair of connective tissues, and enhanced the wound closure rate over time as compared to the control animals. Especially, laser irradiation groups improved fibroblast activity, cellular content, granulation tissue formation, and collagen deposition which is resulted in improving the tensile strength of the wound. These findings suggest that laser photostimulation could accelerate healing of open wound in rabbits, and may be benefit in the treatment of open wound, including decubitis ulcers.

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Physical and Electrochemical Properties of Gallium Oxide (β-Ga2O3) Nanorods as an Anode Active Material for Lithium Ion Batteries (리튬이온전지용 산화갈륨 (β-Ga2O3) 나노로드 (Nanorods) 음극 활물질의 물리적.전기화학적 특성)

  • Choi, Young-Jin;Ryu, Ho-Suk; Cho, Gyu-Bon;Cho, Kwon-Koo;Ryu, Kwang-Sun;Kim, Ki-Won
    • Journal of the Korean Electrochemical Society
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    • v.12 no.2
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    • pp.189-195
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    • 2009
  • $\beta-Ga_{2}O_{3}$ nanorods were synthesized by chemical vapor deposition method using nickel-oxide nanoparticle as a catalyst and gallium metal powder as a source material. The average diameter of nanorods was around 160 nm and the average length was $4{\mu}m$. Also, we confirmed that the synthesis of nanorods follows the vapor-solid growth mechanism. From the results of X-ray diffraction and HR-TEM observation, it can be found that the synthesized nanorods consisted of a typical core-shell structure with single-crystalline $\beta-Ga_{2}O_{3}$ core with a monoclinic crystal structure and an outer amorphous gallium oxide layer. Li/$\beta-Ga_{2}O_{3}$ nanorods cell delivered capacity of 867 mAh/g-$\beta-Ga_{2}O_{3}$ at first discharge. Although the Li/$\beta-Ga_{2}O_{3}$ nanorods cell showed low coulombic efficiency at first cycle, the cell exhibited stable cycle life property after fifth cycle.

The effects of Hydroxyapatite nano-coating implants on healing of surgically created circumferential gap in dogs

  • Chae, Gyung-Joon;Lim, Hyun-Chang;Choi, Jung-Yoo;Chung, Sung-Min;Lee, In-Seop;Cho, Kyoo-Sung;Kim, Chong-Kwan;Choi, Seong-Ho
    • Journal of Periodontal and Implant Science
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    • v.38 no.sup2
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    • pp.373-384
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    • 2008
  • Purpose: The aim of this study is to compare the healing response of various Hydroxyapatite(HA) coated dental implants by Ion-Beam Assisted Deposition(IBAD) placed in the surgically created circumferential gap in dogs. Materials and methods: In four mongrel dogs, all mandibular premolars and the first molar were extracted. After an 8 weeks healing period, six submerged type implants were placed and the circumferential cylindrical 2mm coronal defects around the implants were made surgically with customized step drills. Groups were divided into six groups : anodized surface, anodized surface with 150nm HA and heat treatment, anodized surface with 300nm HA and heat treatment, anodized surface with 150nm HA and no heat treatment, and anodized surface with 150nm HA, heat treatment and bone graft, anodized surface with bone graft. The dogs were sacrificed following 12 weeks healing period. Specimens were analyzed histologically and histomorphometrically. Results: During the healing period, healing was uneventful and implants were well maintained. Anodized surface with HA coating and $430^{\circ}C$ heat treatment showed an improved regenerative characteristics. Most of the gaps were filled with newly regenerated bone. The implant surface was covered with bone layer as base for intensive bone formation and remodeling. In case that graft the alloplastic material to the gaps, most of the coronal gaps were filled with newly formed bone and remaining graft particles. The bone-implant contact and bone density parameters showed similar results with the histological findings. The bone graft group presented the best bone-implant contact value which had statistical significance. Conclusion: Within the scope of this study, nano-scale HA coated dental implants appeared to have significant effect on the development of new bone formation. And additional bone graft is an effective method in overcoming the gaps around the implants.

Shape Magnetic Anisotropy on Magnetic Easy Axis of NiFe/Cu/NiFe/IrMn Spin Valve Thin Film (NiFe/Cu/NiFe/IrMn 스핀밸브 박막소자의 자화 용이축에 따른 형상 자기이방성)

  • Choi, Jong-Gu;Kwak, Tae-Joon;Lee, Sang-Suk;Sim, Jung-Taek
    • Journal of the Korean Magnetics Society
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    • v.20 no.2
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    • pp.35-40
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    • 2010
  • The GMR-SV (giant magnetoresistance-spin valve) device depending on the micro patterned features according to two easy directions of longitudinal and transversal axes has been studied. The GMR-SV multilayer structure was Ta(5 nm)/NiFe(8 nm)/Cu(2.3 nm)/NiFe(4 nm)/IrMn(8 nm)/Ta(2.5 nm). The applied anisotropy direction of the GMR-SV thin film was performed under the magnitude of 300 Oe using by permanent magnet during the deposition. The size of micro patterned device was a $1\;{\times}\;18\;{\mu}m^2$ after the photo lithography process. In the aspects of the shape magnetic anisotropy effect, there are two conditions of fabrication for GMR-SV device. Firstly, the direction of sensing current was perpendicular to the magnetic easy axis of the pinned NiFe/IrMn bilayer with the transversal direction of device. Secondly, the direction of shape magnetic anisotropy was same to the magnetic easy axis of the free NiFe layer with the longitudinal direction of device.

DIFFERENCE OF CALCIUM FLUORIDE FORMATION BETWEEN THE ENAMEL AND DENTIN AFTER FLUORIDE APPLICATION IN VITRO (불소적용시 법랑질과 상아질에서 불화칼슘형성의 차이에 관한 실험적 연구)

  • Kim, Jae-Gon;Kweon, Seon-Ja;Yun, Hyun-Du;An, Soo-Hyeon;Baik, Byeong-Ju
    • Journal of the korean academy of Pediatric Dentistry
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    • v.25 no.1
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    • pp.209-224
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    • 1998
  • The purpose of this study was to compare the amount of calcium fluoride deposited on the enamel and dentin surface and to obtain information on the morphological change and crystallographic details of mineral deposition after 12,000ppm APF application in vitro. The bovine enamel and dentin blocks were randomly assigned to eight groups according to artificial caries lesion formation and difference of fluoride application time. The fluoride concentration and morphological characteristics on the treated enamel and dentin surface were investigated by using fluoride quantitative analysis and SEM. The powdered enamel and dentin of the intact bovine incisors were prepared for the X-ray diffraction analysis. The following results were obtained. 1. The amounts of KOH-soluble fluoride on the carious enamel and dentin surface after 24h APF application were higher than after only 5min APF application(p<0.05), but in the case of the sound enamel and dentin surface were similar after 5min and 24h application (P>0.05). The fluoride content was highly increased in the carious dentin as compared with sound dentin after APF application(P<0.05). 2. The carious enamel surface after APF application, the demineralized enamel surface were recovered a more dense enamel surface and precipitation of crystal was observed a distintive surface layer of spherical globules of about 1 m diameter. In the case of the fluorided carious dentin surface, precipitation of calcium fluoride-like material was deposited both inside the dentinal tubules as well as in the intertubular regions. 3. The crystallographic structure of powdered enamel and dentin after 24h APF application had large crystallities of apatite and CaF2 diffraction peaks in the enamel as compared with dentin. The diffraction data collected from the 27.50-29.50(2) angular range of the powdered enamel, the (105) apatite, (225) apatite and (111) CaF2 peaks of the enamel crystallities were detected after 24h APF application.

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Exchange coupling of Co/NiMn bilayer (Co/NiMn의 교환 자기결합에 관한 연구)

  • 안동환;조권구;주승기
    • Journal of the Korean Magnetics Society
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    • v.10 no.4
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    • pp.171-177
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    • 2000
  • Exchange coupling of Co/NiMn bilayers fabricated by RF magnetron sputtering method was studied. We investigated the variation of exchange coupling field (H$\sub$ex/) for different annealing temperature and time. The maximum exchange coupling field was obtained after 13hr annealing at 300 $^{\circ}C$. With respect to deposition sequence, it was demonstrated that NiMn-top bilayers had higher exchange coupling field than NiMn-bottom bilayers. Ta capping layer was shown to be essential in achieving exchange coupling and Auger Electron Spectroscopy (AES) proved that uncapped NiMn/Co bilayers did not have exchange coupling because of oxygen incorporation into film. We also observed the effect of Ta underlayer on exchange coupling. It was found that Ta underlayer had better not be used for attaining higher exchange coupling. XRD analysis showed that Ta underlayer helped bilayers develop texture, but it was not essential to exchange coupling of Co/NiMn bilayers, which is in contrast to NiFe/NiMn system. Furthermore, the NiMn and Co thickness dependence of exchange coupling has been investigated. The exchange coupling strength reached the maximum above 200 ${\AA}$ NiMn thickness and had inversely proportional relation with Co thickness.

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Filtration Characteristics of Membrane-coupled Fermentor System for Dissolved Organics Recovery From Liquid Organic Sludge (액상유기성슬러지로부터 용존유기물의 회수를 위한 막결합형 발효 시스템의 여과 특성)

  • Jong Oh Kim
    • Membrane Journal
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    • v.13 no.2
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    • pp.65-72
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    • 2003
  • This study was focused on the investigation of filtration characteristics of membrane-coupled fermentor system for dissolved organics recovery from liquid organic sludge. On the filterability of MF over the range of $0.1{\sim}5 {\mu}m,$ the magnitude of total membrane resistance ($R_t$) is ranged as follows in the order; $0.1 {\mu}m>0.2{\mu}m>0.5 >1{\mu}m>2{\mu}m>5{\mu}m$. The cake layer resistance ($R_c$) occupied about 68~88% of total resistance with fermented sludge. Permeation flux decline was mainly attributed to the $R_c$, which was formed by a strong deposition from physico-chemical interactions of solids on membrane surface. Higher suspended solids (SS) concentration of suspension caused lower permeation flux. However, there was not a proportion relation beyond a certain SS concentration. The cross-flow velocity on the membrane surface was faster, which resulted in the higher permeation flux and also more efficient with low trans membrane pressure (TMP) in viewpoint of energy efficiency. The appropriate pH of suspension was over the range of 5.0~6.0 for dissolved organics recovery as well as the permeation flux. It is possible f3r bacteria to be separated perfectly with $0.1{\mu}m\; and \;0.2{\mu}m$ membrane pore size. Based on experimental results, most appropriate membrane pore size for the recovery is believed to around $1{\mu}m$.

Effect of hydrogen in Ni-silicide with Iodine Catalyst Deposited Ni Film by using Atomic Layer Deposition

  • Gang, Hui-Seong;Ha, Jong-Bong;Kim, Gi-Won;Kim, Dong-Seok;Im, Gi-Sik;Kim, Seong-Nam;Lee, Gwang-Man;Lee, Jeong-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.234-234
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    • 2010
  • 최근 CMOS 소자 크기가 축소됨에 따라 소스와 드레인 영역에서의 접촉저항을 줄이기 위하여, 실리사이드 공정이 많이 연구되고 있다. 실리사이드 물질로서 NiSi는 낮은 저항률과 낮은 실리콘 소모, 낮은 공정온도, 등의 장점을 가지고 있다. 그러나, 실리사이드 형성으로 인한 나노소자의 소오스/드레인에서정션(junction) 누설전류의 증가는 큰 문제가 되므로 실리콘과 실리사이드 계면의 특성이 중요하다. 본 연구에서는 니켈을 이용한 실리사이드 형성시 계면 활성제인 에틸 요오드를 이용하여 실험을 진행하였다. 금속 유기 전구체인 MABONi을 사용하여 ALD 방식으로 증착 한 니켈 박막과 니켈 핵 형성시 계면활성제인 에틸요오드의 처리 방법에 따른 Ni-silicide 박막의 특성을 비교, 분석하였다. 먼저 자연산화막을 건식식각으로 제거한 뒤, 첫 번째 샘플에서는 10회의 주기로 초기 니켈을 증착한 뒤, 에틸요오드로 니켈의 표면 위를 처리하고, 다시 200회의 주기로 니켈을 증착하였으며, 두 번째는 첫 번째 방식에서 에틸요오드 주입 시 동시에 수소도 함께 주입하였다. 세 번째는 비교를 위해 에틸요오드 처리를 하지 않고 니켈 박막만을 증착 하였다. 이어서, 각 샘플을 급속 열처리 장비에서 $400^{\circ}C$부터 $900^{\circ}C$까지 각각 30sec간 열처리를 진행후, 반응하지 않은 잔여 니켈을 제거한 후, XRD(x-ray diffraction), AES(auger), 그리고 4-point probe 등을 이용하여 형성된 실리사이드의 특성을 분석하였다. 에틸요오드와 함께 수소를 주입한 경우 계면에서의 산소 불순물과 카본 성분이 효과적으로 제거되어 $400^{\circ}C$에서 $2.9{\Omega}/{\Box}$ 의 낮은 면저항을 가지는 NiSi가 형성되었고 모든 온도구간에서 다른 샘플에 비하여 가장 낮은 면저항 분포를 보였다. 이는 분해 흡착된 요오드에 의한 계면 특성 향상과 카본 성분이 포함된 잔여물들이 수소처리에 의해 효율적으로 제거되어 실리사이드의 특성이 향상되었기 때문이다. 계면활성제를 사용하지 않은 경우에는 $500^{\circ}C$에서 NiSi가 형성되었다. 반면에 에틸요오드로만 표면을 처리한 경우에는 니켈과 실리콘 계면에서의 카본 성분에 의하여 silicidation 이 충분히 일어나지 않았다. 이러한 결과는 향후 45nm 이하의 CMOS 공정상에서 소스와 드레인의 낮은 누설전류를 가지고, 접촉저항을 줄이기 위한 니켈 실리사이드 형성에 큰 도움을 줄 것으로 기대된다.

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