• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.926-929
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• 2005

Recently, laser interferometer is widely used as a measuring system in many fields because of its high resolution and its ability to measure a board area in real-time ail at once. In conventional laser interferometer, for examples Out of plane ESPI, In plane ESPI, Shearography and Holography, it uses PZT or other components as a phase shift instrumentation to extract 3-D deformation data, vibration mode and others. However, in most cases PZT has some disadvantages, which include noli-linear errors and limited time of use. In present study, a new type of laser interferometer using a laser diode(LD) is proposed. Using Laser Diode Sinusoidal Phase Modulating(LD-SPM) interferometer, the phase modulation can be directly modulated by controlling the LD injection current thereby eliminating the need for PZT components.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.80-84
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• 2007

We propose a new displacement measurement method using a phase modulation homodyne interferometer and a tunable laser diode as a light source to determine an arbitrary length with a resolution in the order of 10 pm. In the proposed instrument, the displacement of a movable mirror in the interferometer can be converted to a frequency shift of the tunable laser diode. We discuss the principles of the proposed method, the instrumentation, and the experimental results, and compare the proposed method with two commercial displacement sensors. The commercial sensors used are a heterodyne interferometer, the interpolation error of which is also measured, and a capacitive sensor.

• International Journal of Precision Engineering and Manufacturing
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• 제8권3호
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• pp.20-23
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• 2007

To calibrate precision autocollimators, the Korean Research Institute of Standards and Science (KRISS) has built a small angle generator using a laser interferometer. The system is based on a sine bar mechanism in which the angle is determined from the ratio of two lengths. The rotational angle is measured by the angle interferometer and the heterodyne laser interferometer detects the relative displacement of two retro-reflectors attached to the rotating arm. The distance between the two retro-reflectors of the laser angle interferometer is self-calibrated by an index table positioned on the rotating arm. The resolution of the system is 0.002 seconds, and the accuracy is better than 0.04 seconds within a measuring range of $\pm$1 degree. The small angle generator can also be used with an index table that can divide one circle into 1440 angles. The combined system can generate any angle over 360 degrees to an accuracy of 0.11 seconds.

• Journal of Welding and Joining
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• 제17권1호
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• pp.71-76
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• 1999

The real-time holographic interferometer with digital high-speed camera is applied to the experimental study of laser induced plasma/plume in pulsed Nd:YAG laser welding. A pulsed Nd:YAG laser with 1.2 kW average power is applied to generate laser induced plume. The recording speed of the high-speed camera is 3,000 f/s. The high speed photographs of weld plume without another visualization method, are compared with the visualization photographs with holographic interferometer. The radiation intensity from the laser induced plume is recorded by the high speed photographs, which fluctuated during laser radiation and disappeared after laser end. The density distribution of the plume is recorded by the holographic visualization method. The experimental results show the process of generation of the laser induced plasma/plume, and give the feasibility of quantitative measurement of laser induced plume in laser welding.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.140.1-140.1
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• 2015

Currently, As Plasma application is expanded to the industrial and medical industrial, Low temperature plasma characteristics became important. Especially in Medical industrial, Low temperature plasma directly adapted to human skin, so their plasma parameter is important. One of the plasma parameters is electron density, some kinds of method to measuring electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods is expensive to composed of experiment system. Heterodyne interferometer system is cheap and simple to setting up, So we tried to measuring electron density by Laser heterodyne interferometer. To measuring electron density at atmospheric pressure, we need to obtain the phase shift signal. And we use a heterodyne interferometer. Our guiding laser is Helium-Neon laser which generated 632 nm laser. We set up to chopper which can make a laser signal like a pulse. Chopper can make a 4 kHz chopping. We used Needle jet as Ne plasma sources. Interference pattern is changed by refractive index of electron density. As this refractive index change, phase shift was occurred. Electron density is changed from Townsend discharge's electron bombardment, so we observed phenomena and calculated phase shift. Finally, we measured electron density by refractive index and electron density relationship. The calculated electron density value is approximately 1015~1016 cm-3. And we studied electron density value with voltage.

• 한국기계가공학회지
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• 제5권2호
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• pp.22-26
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• 2006

This paper addresses the development of a laser interferometer to measure micro displacement for a micro system. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. In order to employ the interferometer, the displacement calibration experiment should be required. For the experiment, a laser probe installed on the optical table with optical devices and a micro stage. The velocity decoding board is also added to calculate doppler shift frequency directly. The output signal is processed by LabView. Finally experiments are found out the relation between displacement and output signal.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.214-219
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• 1997

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600-1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with aims to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial mode laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, whlch allows us to perform multiple measurements of up to 10 machine axes simultaneously.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1195-1198
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• 2003

Micro former has been known as a useful tool for machining micro parts. It makes micro holes automatically with punches, a hole-shape die and material by rotation of crank shaft synchronously. Micro displacement in micro forming affects on the performance of machining because micro forming size is similar with its mechanical displacement. Therefore, the measurement of this micro displacement is essential to be guaranteed to obtain high forming precision in the whole machine as well as its devices. This paper addresses the development of a laser interferometer to measure micro displacement for a micro former. The laser interferometer is able to measure micro displacement during a few micro seconds with non-contact. For the experiment, a laser probe is installed on the optical table with optical devices and a micro displacement generating device. The velocity decoding board is also added to calculate doppler shift frequency directly. Finally simple experiments are conducted to confirm its functional operation.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 심포지엄 논문집 정보 및 제어부문
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• pp.342-344
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• 2006

During last years, large investments have been directed to development and research of nano-technological products like semiconductor, display panel, optic-fiber communication components, life technology, and ultra-precision components. All quantitative measurements at nanometre scale should guarantees accurate results and high quality. Laser interferometer is one of most famous nanometre scale devices to be able to measure metre-scale distance with nanometre scale resolution, but it is easily affected by various error causes like geometrical, instrumental and environmental factor. On the other side, capacitive sensor is robust to above error factors, but it is able to measure relatively shorter distance, under $100{\mu}m$, than laser interferometer. New error correction method for laser interferometry using capacitive sensor will be introduced in this paper.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.263-268
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• 2004

In the present study, a Nd;YAG Laser (pulse type) was used to emit ultrasonic signals to a test material. In addition, a total ultrasonic investigation system was designed by adopting a Fabry-Perot interferometer, which receives ultrasonic signals without any contact. For non-destructive test SM45C, which contains some flaws was used as a test material. Because it is easy to align light beam in receiver, and the length of the light beam does not change much even if convex mirror leans towards one side, confocal Fabry-Perot interferometer, which has stable frequency, and PI control are used to correct interfered and unstable signals from temperature, fluctuation and time shift of laser frequency. Stable signals are always obtained by the feedback of PI circuit signals in the confocal Fabry-Perot interferometer. The type, size and position of flaws inside the test material were examined by achieving the stabilization of an interferometer. This study presented a useful method, which could quantitatively investigate the fault of objects by using a Fabry-Perot interferometer.