• 제목/요약/키워드: Laser pulse repetition rate

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펄스 레이저 증착법에 의해 제작된 Laser pulse repetition rate의 변화에 따른 $Pb(Zr_{0.48}Ti_{0.52})O_3$ (PZT) 박막의 전기적 특성 (Effect of Laser Pulse Repetition Rate on the Electrical Properties of $Pb(Zr_{0.48}Ti_{0.52})O_3$ (PZT) Thin Films grown by Pulsed Laser Deposition)

  • 이동화;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.11-12
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    • 2005
  • [ $Pb(Zr_{0.48}Ti_{0.52})O_3$ ] (PZT) thin films were deposited on Pt(111)/Ti/$SiO_2$/Si substrates by pulsed laser deposition. In order to study the effect of different laser pulse repetition rate on the dielectric and ferroelectric properties of PZT thin films,2 Hz and 5 Hz of laser pulse repetition rate were selected. We compared the results of XRD pattern, dielectric constant and hysteresis characteristics. From the experimental data, we found that the electrical properties of PZT thin films which grown ar 2 Hz of laser pulse repetition rate were better than those which grown at 5 Hz of laser pulse repetition rate.

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High Power 1.83 GHz Femtosecond Yb-doped Fiber Laser Incorporating Repetition Rate Multipliers

  • In Chul Park;Eun Kyung Park;Ye Jin Oh;Hoon Jeong;Ji Won Kim;Jeong Sup Lee
    • Current Optics and Photonics
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    • 제7권6호
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    • pp.732-737
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    • 2023
  • A high-power Yb-doped femtosecond (fs) fiber laser at a repetition rate of 1.83 GHz is reported. By employing a 5-stage repetition rate multiplier, the repetition rate of the mode-locked master oscillator was multiplied from 57.1 MHz to 1.83 GHz. The ultrashort pulse output at 1.83 GHz was amplified in a two-stage Yb-doped fiber amplifier, leading to >100 W of fs laser output with a pulse duration of 290 fs. The theoretical pulse width along the fiber was simulated, showing that it was in good agreement with experimental results. Further improvement in power scaling is discussed.

ZCS공진형 컨버터를 적용한 고반복 대출력 펄스형 Nd:YAG 레이저 전원장치 개발 (Development of high repetition rate and high power pulsed Nd:YAG laser power supply using ZCS resonant converter)

  • 조기연;김은수;변영복;김희제;박점문;이현우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 A
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    • pp.514-517
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    • 1996
  • Zero current switching(ZCS) series resonant converter is used to control laser power density in a pulsed Nd:YAG laser power supply. The high power and high repetition rate paused Nd:YAG laser is designed and fabricated to control current pulse width and pulse repetition rate in the double elliptical laser oscillator. In order to find out operational characteristics of pulsed Nd:YAG laser, the electrical properties of driving power supply and laser output power are investigated and experimented by changing of the current pulse width from 200uS to 350uS(step 50uS) and pulse repetition rate range of 500pps(pulse per second) to 1150pps. From that result, we obtaind maximum efficiency of 1.83% and maximum laser output or 220W at the condition of 350 uS and 1150pps with one Nd:YAG rod), and obtained that of more than 400W with two laser head connecting series.

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고효율 $CO_2$ Laser 개발 연구 : SMPS 방식 펄스형 $CO_2$ Laser의 출력특성 (A Study on the Development of High Efficieny $CO_2$ Laser : Output Characteristics of Pulsed $CO_2$ Laser Using SMPS Method)

  • 정현주;이동훈;남경훈;김도완;정영환;이유수;김희제;조정수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권11호
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    • pp.730-734
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    • 1999
  • In this study, it is the purpose to develope a cheap and compact repetitively pulsed $CO_2$ laser with pulse repetition rate range of 180 Hz. We used a SCR switched power supply as a high voltage pulsed supply, which is cheap and simple comparing to others. PIC one-chip microprocessor was used for precise control of a laser power supply on the control part. And the laser cavity was fabricated as an axial and water cooled type. The laser performance characteristics as various parameters, such as pulse repetition rate and gas pressure have been investigated. The experiment was done under the condition of total pressure of $CO_2, N_2$ and He from 4 Torr to 16 Torr and pulse repetition rate from 4 Hz to 180 Hz. As a result, the maximum average output was about 19.6W at the total pressure of 12 Torr and the pulse repetition rate of 180Hz.

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자외선 피코초 레이저를 이용한 Low-k 웨이퍼 인그레이빙 특성에 관한 연구 (A Study of Low-k Wafer Engraving Processes by Using Laser with Pico-second Pulse Width)

  • 문성욱;배한성;홍윤석;남기중;곽노흥
    • 반도체디스플레이기술학회지
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    • 제6권1호
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    • pp.11-15
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    • 2007
  • Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355 nm and 80 MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using a laser with UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repletion rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20\;{\mu}m$ and $10\;{\mu}m$ at more than 500 mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed in laser material process.

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Low-k 웨이퍼 레이저 인그레이빙 특성에 관한 연구 (Study on low-k wafer engraving processes by using UV pico-second laser)

  • 남기중;문성욱;홍윤석;배한성;곽노흥
    • 한국레이저가공학회:학술대회논문집
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    • 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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    • pp.128-132
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    • 2006
  • Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355nm and 80MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow rate, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repetition rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20{\mu}m$ and $10{\mu}m$ at more than 500mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed of laser material process.

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515nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최대 가공율에 대한 이론적 분석 (Theoretical analysis on the maximum volume ablation rate for copper ablation with a 515nm picosecond laser)

  • 신동식;조용권;손현기;서정
    • 한국레이저가공학회지
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    • 제16권2호
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    • pp.1-6
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    • 2013
  • Picosecond lasers are a very effective tool for micromachining metals, especially when high accuracy, high surface roughness and no heat affected zone are required. However, low productivity has been a limit to broadening the spectrum of their industrial applications. Recently it was reported that in the micromachining of copper with a 1064nm picosecond laser, there exist the optimal pulse energy and repetition rate to achieve the maximum volume ablation rate. In this paper, we used a 515nm picosecond laser, which is more efficient for micromachining copper in terms of laser energy absorption, to obtain its optimal pulse energy and repetition rate. Theoretical analysis based on the experimental data on copper ablation showed that using a 515nm picosecond laser instead of a 1064nm picosecond laser is more favorable in that the calculated threshold fluence is 75% lower and optical penetration depth is 50% deeper.

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누설변압기 1차측의 스위칭 제어에 의한 펄스형 $CO_2$레이저에 관한 연구 (A Study on the Pulsed $CO_2$ Laser by the Switching Control of Leakage Transformer Primary)

  • 정현주;이동훈;김희제
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권9호
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    • pp.541-545
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    • 2000
  • We propose a pulsed $CO_2$laser below 30W by the AC(60Hz) switching control of leakage transformer primary which has some advantages of cost and size compared to a typical pulsed power supply. Pulse repetition rate is adjusted from 5 Hz to 60 to Hz control laser output. In this laser a low voltage open loop control for high voltage pulse discharge circuit is employed to aviod the Hv sampling or switching and high voltage leakage transformer is used to convert low voltage pulse rectified from AC to high voltage one. A ZCS(Zero Crossing Switch) circuit and a PIC(programble one-chip microprocessor are used to control gate signal of SCR precisely. The pulse repetition rate is limited by 60Hz due to the frequency of AC line and a high leadkage inductance. The maximum laser output was about 23 W at pulse repetition rate of 60Hz total gas mixture of $CO_2$ : $N_2$ : He=1: 9: 15 and total pressure of 18 Torr

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펄스형 Nd:YAG 레이저의 출력 에너지 및 펄스 반복률 제어에 관한 연구 (A Study on the control of output power and pulse repetition rate in pulsed Nd:YAG laser)

  • 박구령;김병균;문동성;홍정환;김휘영;강욱;김희제;조정수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.74-77
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    • 2000
  • A pulsed Nd:YAG laser has been used in a wide variety of fields : measuring, material processing and so on. In a material processing, it is very important to control the laser energy density. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this study, pulsed Nd:YAG laser system was designed and manufactured to control the laser output usefully and easily. This system adopted the sequential charge and discharge circuit is controlled by 80196 micro- processor. As a result, it is found that laser output is controlled minutely by changing laser input and pulse repetition rate, and usefully by using 80196 microprocessor.

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제모용 Long-Pulse Alexandrite Laser의 출력 특성 연구 (A study on the output characteristics of Long-pulse Alexandrite laser for hair removal)

  • 최진영;김상길;김태균;박종웅;송건주;정용호;홍정환;김희제
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1729-1731
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    • 2003
  • Recently many solid-state laser systems were widely used in the medical applications. So it is necessary to study various optimal laser parameters for adopting new medical treatments. Alexandrite laser using switching mode power supply has designed and experimented to adjust a pulse repetition rate by PIC one-chip microprocessor. The fundamental results have been obtained during the first financial year in 2002. We will be able to find out the optimal hair removal characteristics by the repetitive experiments of Alexandrite laser as the parameters such as pulse repetition rate, pulse width, and pulse energy etc.

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