• Title/Summary/Keyword: Laser patterning

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Laser Patterning of Vertically Grown Carbon Nanotubes (수직성장된 탄소나노튜브의 선택적 패터닝)

  • Chang, Won Seok
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.36 no.12
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    • pp.1171-1176
    • /
    • 2012

  • The selective patterning of a carbon nanotube (CNT) forest on a Si substrate has been performed using a femtosecond laser. The high shock wave generated by the femtosecond laser effectively removed the CNTs without damage to the Si substrate. This process has many advantages because it is performed without chemicals and can be easily applied to large-area patterning. The CNTs grown by plasma-enhanced chemical vapor deposition (PECVD) have a catalyst cap at the end of the nanotube owing to the tip-growth mode mechanism. For the application of an electron emission and biosensor probe, the catalyst cap is usually removed chemically, which damages the surface of the CNT wall. Precise control of the femtosecond laser power and focal position could solve this problem. Furthermore, selective CNT cutting using a femtosecond laser is also possible without any phase change in the CNTs, which is usually observed in the focused ion beam irradiation of CNTs.

  • https://doi.org/10.3795/KSME-B.2012.36.12.1171 인용 PDF KSCI