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http://dx.doi.org/10.3795/KSME-B.2012.36.12.1171

Laser Patterning of Vertically Grown Carbon Nanotubes  

Chang, Won Seok (Dept. Nano Mechanics, Korea Institute of Machinery and Materials)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.36, no.12, 2012 , pp. 1171-1176 More about this Journal
Abstract
The selective patterning of a carbon nanotube (CNT) forest on a Si substrate has been performed using a femtosecond laser. The high shock wave generated by the femtosecond laser effectively removed the CNTs without damage to the Si substrate. This process has many advantages because it is performed without chemicals and can be easily applied to large-area patterning. The CNTs grown by plasma-enhanced chemical vapor deposition (PECVD) have a catalyst cap at the end of the nanotube owing to the tip-growth mode mechanism. For the application of an electron emission and biosensor probe, the catalyst cap is usually removed chemically, which damages the surface of the CNT wall. Precise control of the femtosecond laser power and focal position could solve this problem. Furthermore, selective CNT cutting using a femtosecond laser is also possible without any phase change in the CNTs, which is usually observed in the focused ion beam irradiation of CNTs.
Keywords
Carbon Nanotube; Femtosecond Laser; Plasma Enhanced Chemical Vapor Deposition;
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Times Cited By KSCI : 1  (Citation Analysis)
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1 Jeschke, H. O., Romero A. H., Garcia M. E. and Rubio, A., 2007, "Microscopic Investigation of Laser- Induced Structural Changes in Single-Wall Carbon Nanotubes," Phys. Rev. B, Vol. 75, Issue 12, pp. 125412-125422.   DOI   ScienceOn
2 Ma, Y.-Z., Stenger, J., Zimmermann, J., Bachilo, S. M., Smalley, R. E., Weisman, R. B. and Fleming, G. R., 2004, "Ultrafast Carrier Dynamics in Single-Walled Carbon Nanotubes Probed by Femtosecond Spectroscopy," J. Chem. Phys. , Vol. 120, Issue 7, pp. 3368-3373.   DOI   ScienceOn
3 Wang, F., Cukovic, G., Brus, L. E. and Heinz, T. F., 2004, "Time-Resolved Fluorescence of Carbon Nanotubes and Its Implication for Radiative Lifetimes," Phys. Rev. Lett., Vol. 92, Issue 17, pp. 177401-177404.   DOI   ScienceOn
4 Lopez, M. J., Rubio, A., Alonso, J. A., Lefrant S., Metenier K. and Bonnamy S., 2002, "Patching and Tearing Single-Wall Carbon-Nanotube Ropes into Multiwall Carbon Nanotubes," Phys. Rev. Lett., Vol. 89, Issue 25, pp. 255501-255504.   DOI   ScienceOn
5 Atanasov, P. A., Takada, H., Nedyalkov, N. N. and Obara, M., 2007, "Nanohole Processing on Silcon Substrate by Femtosecond Laser Pulse with Localized Surface Plasmon Polarition," Appl. Surf. Sci., Vol. 253, Issue 19, pp. 8304-8308.   DOI   ScienceOn
6 Dumitrica, T., Garcia, M. E., Jeschke, H. O. and Yakobson, B. I. 2004, "Selective Cap Opening in Carbon Nanotubes Driven by Laser-Induced Coherent Phonons," Phys. Rev. Lett., Vol. 92, Issue 11, pp. 117401-117404.   DOI   ScienceOn
7 Lee, S. I., Howell, S. W., Raman, A., Reifenberger R., Nguyen, C. V. and Meyyappan, M., 2005, "Complex Dynamics of Carbon Nanotube Probe Tips," Ultramicroscopy, Vol. 103, Issue 2, pp. 95-102.   DOI   ScienceOn
8 Zhang, Y., Gu, H. and Iijima, S., 2000, "Single-Wall Carbon Nanotubes Synthesized by Laser Ablation in a Nitrogen Atmosphere," Appl. Phys. Lett., Vol.73, Issue 26, pp. 3827-3829.
9 Kibria, A. K., Mo, Y. H., Yun, M. H., Kim, M. J. and Nahm, K. S., 2001, "Effects of Bimetallic Catalyst Composition and Growth Parameters on the Growth Density and Diameter of Carbon Nanotubes," Korean J. Chem. Eng. Vol. 18, No. 2, pp. 208-214.   DOI   ScienceOn
10 Chang, W. S., Kim, J. W., Choi, D. G. and Han, C. S., 2011, "Fabrication of Nano-Electrode Arrays of Free- Standing Carbon Nanotubes on Nano-Patterned Substrate by Imprint Method," Appl. Surf. Sci., Vol. 257, pp. 3063-3068.   DOI   ScienceOn
11 Iijima, S., 1991, "Helical Microtubules of Graphitic Carbon," Nature, Vol. 354, No. 6348, pp. 56-57.   DOI
12 Chang, W. S., Hwang, J. Y., Han, C. S., 2012, "Fabrication and Analysis of a Free-Standing Carbon Nanotube-Metal Hybrid Nanostructures," Trans. of the KSME (B), Vol. 36, No. 1, pp. 25-29.
13 Chen, Y.-C., Cheng, H.-F., Hsieh, Y.-S. and Ysau, Y.- M., 2003, "Electron Field Emission Properties of Carbon Nanotubes During Thermal Heating and Laser Irradiation," J. Appl. Phys. Vol. 94, pp. 7739-7742.   DOI   ScienceOn
14 Xie, S., Li, W., Chang, B. and Sun, L., 1991, "Mechanical and Physical Properties on Carbon Nanotube," J. Phys. Chem. Solids., Vol. 61, Issue 7, pp.1153-1158.
15 Dillon, A. C., Jones, K. M., Bekkedahl, T. A., Kiang, C. H., Bethune, D. S. and Heben, M. J., 1997, "Storage of Hydrogen in Single-Walled Carbon Nanotubes," Nature, Vol. 386, No. 6623, pp. 377-378.   DOI   ScienceOn