• Title/Summary/Keyword: Laser induced plasma

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Effect of Surface Damage of Metal Substrate on LIBS Signal (금속 Substrate의 표면손상이 LIBS신호에 미치는 영향)

  • Jang, Sang-Ik;Kim, Kibum
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.15 no.3
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    • pp.1259-1264
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    • 2014
  • Hydrogen is in the world limelight for future energy source, and it has been already used in various industry fields including aerospace. The extremely fine molecule of the hydrogen can be easily leaked from tiny size of the crack on the surface of transporting pipes or storage tanks, and it could bring on awfully terrible disaster. In this study, Laser-Induced Breakdown Spectroscopy (LIBS) was employed to develope a reliable detection scheme for a small quantity of hydrogen leakage. Effect of three different metal substrates (i.e. Al, Cu, SUS) on plasma generation and the intensity of the hydrogen atomic signal was investigated, and the surface damage of the substrates due to repetitive laser shots was observed using Scanning electron microscope. It was also evaluated how the surface damage could distort the atomic signal. The intensity of the atomic signal was found to be the strongest, and the signal distortion due to the surface damage was approximately $100W/m^2$ lower when Al was used for the substrate.

Rapid Detection of Radioactive Strontium in Water Samples Using Laser-Induced Breakdown Spectroscopy (LIBS) (Laser-Induced Breakdown Spectroscopy (LIBS)를 이용한 방사성 스트론튬 오염물질에 대한 신속한 모니터링 기술)

  • Park, Jin-young;Kim, Hyun-a;Park, Kihong;Kim, Kyoung-woong
    • Economic and Environmental Geology
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    • v.50 no.5
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    • pp.341-352
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    • 2017
  • Along with Cs-137 (half-life: 30.17 years), Sr-90 (half-life: 28.8 years) is one of the most important environmental monitoring radioactive elements. Rapid and easy monitoring method for Sr-90 using Laser-Induced Breakdown Spectroscopy (LIBS) has been studied. Strontium belongs to a bivalent alkaline earth metal such as calcium and has similar electron arrangement and size. Due to these similar chemical properties, it can easily enter into the human body through the food chain via water, soil, and crops when leaked into the environment. In addition, it is immersed into the bone at the case of human influx and causes the toxicity for a long time (biological half-life: about 50 years). It is a very reductive and related with the specific reaction that makes wet analysis difficult. In particular, radioactive strontium should be monitored by nuclear power plants but it is very difficult to be analysed from high-cost problems as well as low accuracy of analysis due to complicated analysis procedures, expensive analysis equipment, and a pretreatment process of using massive chemicals. Therefore, we introduce the Laser-Induced Breakdown Spectroscopy (LIBS) analysis method that analyzes the elements in the sample using the inherent spectrum by generating plasma on the sample using pulse energy, and it can be analyzed in a few seconds without preprocessing. A variety of analytical plates for samples were developed to improve the analytical sensitivity by optimizing the laser, wavelength, and time resolution. This can be effectively applied to real-time monitoring of radioactive wastewater discharged from a nuclear power plant, and furthermore, it can be applied as an emergency monitoring means such as possible future accidents at a nuclear power plants.

Application of Laser-Induced Breakdown Spectroscopy (LIBS) for In-situ Detection of Heavy Metals in Soil (토양내 중금속 실시간 탐지를 위한 레이저 유도붕괴 분광법의 활용에 대한 소개)

  • Ko, Eun-Joung;Hamm, Se-Yeong;Kim, Kyoung-Woong
    • Economic and Environmental Geology
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    • v.40 no.5
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    • pp.563-574
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    • 2007
  • Laser induced breakdown spectroscopy (LIBS) is a recently developed analytical technique that is based upon the measurement of emission lines generated by atomic species close to the surface of the sample, thus allowing their chemical detection, identification and quantification. With powerful advantages of LIBS compared to the conventional analytical methodology, this technique can be applied in the detection of heavy metals in the field. LIBS allows the rapid analysis by avoiding laborious chemical steps. LES have already been applied for the determination of element concentration in a wide range of materials in the solid, liquid and gaseous phase with simplicity of the instrument and diversity of the analytical application. These feasibility of rapid multi elemental analysis are appealing proprieties for the in-situ analytical technique in geochemical investigation, exploration and environmental analysis. There remain still some limitations to be solved for LIBS to be applied in soil environment as an in-situ analytical technology. We would like to provide the basic principle related to the plasma formation and laser-induced breakdown of sample materials. In addition, the matrix effect, laser properties and the various factors affecting on the analytical signal of LIBS was dealt with to enhance understanding of LIBS through literature review. Ultimately, it was investigated the feasibility of LIBS application in soil environment monitoring by considering the basic idea to enhance the data quality of LIBS including the calibration method for the various effects on the analytical signal of LIBS.

Measurement of cell aggregation characteristics by analysis of laser-backscattering in a microfluidic rheometry

  • Shin, Se-Hyun;Hou, J.X.;Suh, Jang-Soo
    • Korea-Australia Rheology Journal
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    • v.19 no.2
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    • pp.61-66
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    • 2007
  • The aggregation characteristics of red blood cells (RBCs) are known as important factors in the microvascular flow system, and increased RBC aggregation has been observed in various pathological diseases, such as thrombosis and myocardial infarction. This paper describes a simple microfluidic device for measuring the RBC aggregation by integrating a microfluidic slit rheometry and laser-backscattering technique. While a decreasing-pressure mechanism was applied to the microfluidic rheometry, a syllectogram (the light intensity versus time) showed an initial increase and a peak caused by the high shear stress-induced disaggregation, immediately followed by a decrease in the light intensity due to RBC aggregation. The critical shear stress (CST) corresponding to the peak intensity was examined as a new index of the RBC aggregation characteristics. The CST of RBCs increased with increasing aggregation-dominating protein (fibrinogen) in the blood plasma. The essential feature of this design was the combination of the rheometric-optic characterization of RBC aggregation with a microfluidic chip, which may potentially allow cell aggregation measurements to be easily carried out in a clinical setting.

Mixing Efficiency Evaluation in Y-channel Micromixer Using LIF Confocal Microscope (LIF 공초점 현미경을 이용한 Y-채널 마이크로믹서의 혼합 효율 평가)

  • Kim, Kyoung-Mok;Shin, Yong-Su;Ahn, Yoo-Min;Lee, Do-Hyung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.31 no.2 s.257
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    • pp.159-166
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    • 2007
  • Mixing between two or more reagents is one of important processes in biochemical microfluidics. In efficient micromixer design, it is essential to analyze flow pattern and evaluate mixing efficiency with good precision. In this work, mixing efficiency for Y-channel micromixer is measured by fluorescence intensity using LIF(Laser Induced Fluorescence) Confocal Microscope. The Y-channel micromixers are fabricated with polydimethylsiloxane(PDMS) and those are bonded to glass plate through Plasma bonding. Nile Blue A is injected into the micromixer as a fluorescence dye for measuring of fluorescence intensity by He/Ne laser. For visualization of the flow pattern, dynamic image capturing is carried out using CAM scope. For the comparison with computer simulation, modified SIMPLE algorithm for incompressible flow equation is solved for the same geometry as in the experiment. Throughout the experiments and computer simulation, accurate mixing efficiency evaluation process for a PDMS Y-channel micromixer is established.

Use of a Rapid Thermal Process Technique to study on the crystallization of amorphous Si films fabricated by PECVD (PECVD 방법으로 제조된 비정질 Si 박막의 RTP를 이용한 결정화 연구)

  • Sim, C.H.;Kim, H.N.;Kim, S.J.;Kim, J.W.;Kwon, J.Y.;Lee, H.Y.
    • Proceedings of the KIEE Conference
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    • 2005.07c
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    • pp.2052-2054
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    • 2005
  • TFT-LCD requires to use poly silicon for High resolution and High integration. Thin film make of Poly silicon on the excimer laser-induced crystallization of PECVD(plasma-enhanced chemical vapor deposition)-grown amorphous silicon. In the thin film hydrogen affects to a device performance from bad elements like eruption, void and etc. So dehydrogenation prior to laser exposure was necessary. In this study, use RTP(Rapid Thermal Process) at various temperature from $670^{\circ}C$ to $750^{\circ}C$ and fabricate poly-silicon. it propose optimized RTP window to compare grain size to use poly silicon's SEM pictures and crystallization to analyze Raman curved lines.

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Scribing and cutting a sapphire wafer by laser-induced plasma-assisted ablation

  • Lee, Jong-Moo
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.02a
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    • pp.224-225
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    • 2000
  • Transparent and hard materials such as sapphire are used for many industrial applications as optical windows, hard materials on mechanical contact against abrasion, and substrate materials for opto-electronic semiconductor devices such as blue LED and blue LD etc. The materials should be cut along the proper shapes possible to be used for each application. In case of blue LED, the blue LED wafer should be cut to thousands of blue LED pieces at the final stage of the manufacturing process. The process of cutting the wafer is usually divided into two steps. The wafer is scribed along the proper shapes in the first step. It is inserted between transparent flexible sheets for easy handling. And then, it is broken and split in the next step. Harder materials such as diamonds are usually used to scribe the wafer, while it has a problem of low depth of scribing and abrasion of the harder material itself. The low depth of scribing can induce failure in breaking the wafer along the scribed line. It was also known that the expensive diamond tip should be replaced frequently for the abrasion. (omitted)

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유연 전자소자 구현을 위한 폴리이미드 기판 제작

  • Lee, Jun-Gi;Kim, Sang-Seop;Choe, Byeong-Deok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.258-258
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    • 2011
  • 최근 유연 기판을 이용한 태양전지 및 TFT 등 전자소자 개발에 관한 연구가 주목받고 있다. 본 연구에서는 공정 시 유리한 유리기판상 전자소자 제작 후 폴리이미드막 박리를 통한 유연전자 소자 구현을 목적으로 한다. 폴리이미드막 박리를 목적으로 희생층으로서 a-Si:H을 사용하였다. 유리기판상에 60 nm 두께의 a-Si : H을 ICP (Induced coupled plasma) 공정으로 증착한 후 a-Si : H층 상부에 30 ${\mu}m$ 두께로 폴리이미드를 코팅하여 Hot plate와 furnace에서 열처리를 거쳤다. 이후 각기 다른 파장을 갖는 레이저의 파워를 가변하며 유리 기판 후면에 조사하였다. 실험 결과 355 nm UV 레이저로 가공한 경우 희생층으로 사용 된 a-Si : H층 내에 존재하는 수소가 레이저 빛 에너지에 의해 결합이 끊어지면서 유리기판과 폴리이미드막이 분리됨을 확인하였다.

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Study on The Characteristics of Steel Surface Plasma Induced by $CO_2$ Laser ($CO_2$ 레이저 철판 용접시 발생되는 플라즈마 특성에 관한 연구)

  • 남기중;우미혜;김주관;박기영;이성품
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.11a
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    • pp.290-291
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    • 2002
  • 스틸 판재 4KW CO2 레이저 용접시 발생되는 플라즈마 특성 연구를 위하여 용접 품질에 중요한 요인이 되는 용접속도, 주입가스 양, 판재사이의 갭을 변화시키면서 실험을 하였다 발생된 분광학적 스펙트럼을 측정하였고 플라즈마광의 세기를 광파이버를 이용하여 측정하였다 플라즈마 패턴 특성을 알기 위하여 1000 frame/sec의 고속 디지털 카메라를 이용하여 플라즈마 영상을 측정하였다 그 결과, 용접속도가 빠를수록 상단에서 발생되는 플라즈마 광의 세기는 커졌으며, 주입가스의 양이 적을수록 플라즈마광의 세기가 강하게 측정되었다. 또한 판재 사이가 넓을수록 발생된 플라즈마가 판재 사이로 분출이 되면서 그 세기가 감소되는 현상을 보여주었다. 이러한 결과는 2차원 플라즈마 영상실험의 결과와 일치함을 보여주었다. 따라서 표면에서 발생되는 플라즈마 광의 세기는 레이저 용접시 중요한 요인이 되는 침투깊이를 추정하는데 중요한 정보가 되며 레이저 용접 품질에 대한 실시간 모니퍼링이 가능함을 확인하였다.

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Magnetic Field-Assisted, Nickel-Induced Crystallization of Amorphous Silicon Thin Film

  • Moon, Sunwoo;Kim, Kyeonghun;Kim, Sungmin;Jang, Jinhyeok;Lee, Seungmin;Kim, Jung-Su;Kim, Donghwan;Han, Seung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.313-313
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    • 2013
  • For high-performance TFT (Thin film transistor), poly-crystalline semiconductor thin film with low resistivity and high hall carrier mobility is necessary. But, conventional SPC (Solid phase crystallization) process has disadvantages in fabrication such as long annealing time in high temperature or using very expensive Excimer laser. On the contrary, MIC (Metal-induced crystallization) process enables semiconductor thin film crystallization at lower temperature in short annealing time. But, it has been known that the poly-crystalline semiconductor thin film fabricated by MIC methods, has low hall mobility due to the residual metals after crystallization process. In this study, Ni metal was shallow implanted using PIII&D (Plasma Immersion Ion Implantation & Deposition) technique instead of depositing Ni layer to reduce the Ni contamination after annealing. In addition, the effect of external magnetic field during annealing was studied to enhance the amorphous silicon thin film crystallization process. Various thin film analytical techniques such as XRD (X-Ray Diffraction), Raman spectroscopy, and XPS (X-ray Photoelectron Spectroscopy), Hall mobility measurement system were used to investigate the structure and composition of silicon thin film samples.

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