• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.147.1-147.1
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• 2016

Hydrophobic thin films are variously applicable for encapsulation of organic devices and water repulsive glass, etc. In this work, the stability of hydrophobic characteristics of plasma polymerized tetrakis (trimethylsilyloxy) silane (ppTTMSS) thin films were investigated. The films were deposited with plasma enhanced chemical vapor deposition (PECVD) on the glass. The deposition plasma power and deposition pressure was 70 W and 600 mTorr, respectively. Thereafter, deposited films were treated by 248nm KrF excimer laser. Stability of hydrophobic properties of plasma polymerized tetrakis(trimethylsilyloxy)silane film surface was tested by excimer laser irradiation, which is thought to simulate severe outdoor conditions. Excimer laser irradiation cycles changed from 10 to 200 cycles. The chemical structure and hydrophobicity of ppTTMSS films were analyzed by using Fourier transform infrared (FTIR) spectroscopy and water contact angle (WCA) measurement, respectively. Absorption spectra peaks and WCA of excimer laser treated ppTTMSS films did not change notably. These results show that our ppTTMSS films possess stable hydrophobic properties.

• Journal of the Korean Vacuum Society
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• v.13 no.2
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• pp.59-64
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• 2004

A study on the semiconductor laser-based atomic absorption spectroscopy was performed for monitoring physical vapor deposition process. Gadolinium metal was vaporized with a high evaporation rate by electron beam heating. Real-time atomic absorption spectra were measured by using tunable semiconductor laser beam at 770-794 nm (center wavelength of 780 nm) and its second harmonic at 388-396 nm. Atomic densities of metal vapor can be calculated from the absorption spectra measured. We plot the atomic densities as a function of the electron beam power and compare with the evaporation rates measured by quartz crystal monitor. We demonstrate that the semiconductor laser-based spectroscopic system developed in this study can be applied to monitor the physical vapor deposition process for other metals such as titanium.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.1
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• pp.16-24
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• 2021

A laser-engineered net shaping (LENS) process is a representative directed energy deposition process. Deposition characteristics of the LENS process are greatly dependent on the process parameters. The present paper preliminarily investigates deposition characteristics of Inconel 718 superalloy on S45C structural steel using a LENS process. The influence of process parameters, including the laser power and powder feed rate, on the characteristics of the bead formation and the dilution in the vicinity of the deposited region is examined through repeated experiments. A processing map and feasible deposition conditions are estimated from viewpoints of the aspect ratio, defect formation, and the dilution rate of the deposited bead. Finally, an appropriate deposition condition considering side angle, deposition ratio, and buy-to-fly (BTF) is predicted.

• Journal of Welding and Joining
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• v.32 no.4
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• pp.15-19
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• 2014

Additive manufacturing technology is taking great attentions in these days because the term 3D-printing became a hot issue as the next generation manufacturing paradigm. Especially, laser additive manufacturing is at the center of interest thanks to the accuracy compared to other heat sources. In this report, recent papers about laser additive manufacturing are analyzed and reviewed. General technology is specified into three different categories and they are laser sintering, laser melting and laser metal deposition. Similarities and differences are clearly described by detailed technologies and used materials type. Representative application examples are selected then future of this technology is expected through those applications. Additionally, market of laser additive manufacturing systems itself and application fields are also predicted based on present 3D-printing market and technical progressions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.11-12
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• 2005

[ $Pb(Zr_{0.48}Ti_{0.52})O_3$ ] (PZT) thin films were deposited on Pt(111)/Ti/$SiO_2$/Si substrates by pulsed laser deposition. In order to study the effect of different laser pulse repetition rate on the dielectric and ferroelectric properties of PZT thin films,2 Hz and 5 Hz of laser pulse repetition rate were selected. We compared the results of XRD pattern, dielectric constant and hysteresis characteristics. From the experimental data, we found that the electrical properties of PZT thin films which grown ar 2 Hz of laser pulse repetition rate were better than those which grown at 5 Hz of laser pulse repetition rate.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.245-247
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• 2012

In this study, ZnO films have been grown on PES (polyethersulfone) of flexible polymer substrate by PLD (pulsed laser deposition) and characterized for crystalline and optical properties. Growing conditions were changed with substrate temperatures ranging from 50 to $200^{\circ}C$ and laser power density ranging from 0.2 to $0.4J/cm^2$. When ZnO thin films are deposited at low temperature with a small laser power density, the (002) peaks of XRD to signify the crystal quality of ZnO thin films appear to be very weak and the (101) peaks to signify the chemical composition of oxygen and zinc are strong. The (002) peaks increase with the substrate temperature and laser power density because the energy needed for the supply of the combination regarding zinc and oxygen has increased. In this study, the best condition for growing ZnO thin film on PES is at a substrate temperature of $200^{\circ}C$ and with a laser density of $0.3J/cm^2$. The characteristics of PL were measured by UV and green luminescence.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.60-65
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• 2000

The structural and electrical characteristics of PLZT thin films fabricated onto Pt/Ti/SiO\ulcorner/Si substrates by a pulsed laser deposition were investigated to develop the high dielectric thin films were fabricated with different energy density by pulsed laser deposition. This PLZT thin films of 5000 thickness were crystallized at 600 $^{\circ}C$, 200 mTorr O\ulcorner pressure for 2 J/$\textrm{cm}^2$ laser energy density, the arain structure was transformed from planar to columnar grain. It was clearly noted from the SEM observations that oxygen pressured laser powers affect microstructures of the PLZT thin films. 14/50/50 PLZT this film showed a maximum dielectric constant value of $\varepsilon$\ulcorner=1289.9. P-E hysteresis loop of 14/50/50 PLZT thin film was flim ferro-electric. Leakage current density of 14/50/50 PLZT thin film was 10\ulcorner A/$\textrm{cm}^2$.

• Transactions of Materials Processing
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• v.25 no.3
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• pp.195-202
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• 2016

Direct laser melting(DLM) is an additive manufacturing process that can produce parts by solidification of molten metallic powder layer by layer. The properties of the fabricated parts strongly depend on characteristics of the metallic powder. Atomized powders having spherical morphology have commonly been used for DLM. Mechanical ball-milling is a powder processing technique that can provide non-spherical solid powders without melting. The aim of the current study was to investigate the effect of powder morphologies on the deposition quality in DLM. To characterize the morphological effect, the performances of spherical and non-spherical powders were compared using both single- and multi-track DLM experiments. DLM experiments were performed with various laser process parameters such as laser power and scan rate, and the deposition quality was evaluated. The surface roughness, cross-section bead shape and process defects such as balling or non-filled area were compared and discussed in this study.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.4
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• pp.70-76
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• 2022

Calcium-phosphate-based bioceramics are promising biomaterials for scaffolds because they can assist in bone regeneration. In this study, a laser sintering deposition system was developed, and 3D hydroxyapatite (HA) scaffolds were fabricated. The main process conditions of the HA scaffolds were laser power, table velocity, and laser focal distance. As the laser power increased, the line width, line height, and layer thickness also increased. Further, the line width, line height, and layer thickness decreased as the table velocity increased. As the laser focal distance increased, the line width increased, but the line height and layer thickness decreased. The fabricated green scaffolds were sintered at 1050 ℃ and 1150 ℃. The sintered scaffolds had a uniform and continuous interconnected shape, with pore sizes ranging from 850 to 950 ㎛ having 53% porosity. The compressive strength of the scaffolds decreased from 0.72 MPa (1050 ℃) to 0.53 MPa (1150 ℃). The biocompatibility of the scaffolds was investigated by analyzing the adhesion of osteoblast-like MG-63 cells cultured on the surfaces of the scaffolds. The results indicate that the scaffold sintered at 1050 ℃ had good mechanical and biological properties compared to that at 1150 ℃.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.657-662
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• 2005

In this study, the deposition of micrometer-scale metallic interconnects on LCD glass for the repair of open-circuit type defects is investigated. Although there had been a few studies Since 1980 s for the deposition of metallic interconnects by laser-induced chemical vapor deposition, those studies mostly used continuous wave lasers. In this work, a third harmonic Nd:YLF laser (351nm) of high repetition rates, up to 10 KHz, was used as the illumination source and $W(CO)_6$ was selected as the precursor. General characteristics of the metal deposit (tungsten) such as height, width, morphology as well as electrical properties were examined for various process conditions. Height of the deposited tungsten lines ranged from 35 to 500 nm depending on laser power and scan speed while the width was controlled between $3\~50{\mu}$ using a slit placed in the beam path. The resistivity of the deposited tungsten lines was measured to be below 1 $O\cdot{\mu}m$, which is an acceptable value according to the manufacturing standard. The tungsten lines produced at high scan speed had good surface morphology with little particles around the patterns. Experimental results demonstrated that it is likely that the deposit forms through a hybrid process, namely through the combination of photolytic and pyrolytic mechanisms.