• Journal of the Optical Society of Korea
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• v.14 no.2
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• pp.127-130
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• 2010

We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Nuclear Engineering and Technology
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• v.37 no.3
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• pp.279-286
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• 2005

A prototype of a relativistic proton generation system, based on laser-induced plasma interaction, has been designed and fabricated. The system is composed of three major parts: a fs TW laser; a target chamber, including targets and controls; and a diagnostic system for charged particles and lasers. An Offner-type pulse stretcher for chirped pulse amplification (CPA) and eight pass pre-amplifier are installed. The main amplifier will be integrated with a new pumping laser. The design values of the laser at the first stage are 1 TW in power and 50 fs in pulse duration. We expect to generate protons with their maximum energy of approximately 3 MeV and the flux of at least $10^6$ per pulse using a 10 $\mu$m Al target. A prototype target chamber with eight 8-inch flanges, including target mounts, has been designed and fabricated. For laser diagnostics, an adaptive optics based on the Shack-Hartmann type, beam monitoring, and alignment system are all under development. For a charged particle, CR-39 detectors, a Thomson parabola spectrometer, and Si charged-particle detectors will be used for the density profile and energy spectrum. In this paper, we present the preliminary design for laser-induced proton generation. We also present plans for future work, as well as theoretical simulations.

• Korean Journal of Optics and Photonics
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• v.10 no.6
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• pp.500-506
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• 1999

We designed and fabricated a bidirectional optical transceiver module for low cost access network. An integrated chip forming a pin-PD on an 1.3 urn FP-LD was assembled by flip-chip bonding on a Si optical bench, a single mode fiber with an angled end facet was aligned passively with the integrated chip on V-groove of Si-optical bench. Gaussian beam theory was applied to evaluate the coupling coefficients as a function of some parameters such as alignment distance, angle of fiber end facet, vertical alignment error. The theory is also used to search the bottle-neck between transmittance and receiving coupling efficiency in the bi-directional optical system. Tn this paper, we confirmed that reduction of coupling efficiency by the vertical alignment error between laser beam and fiber core axis can be compensated by controlling the fiber facet angle. In the fabrication of sub-module, a'||'&'||' we made such that the fiber facet have a corn shape with an angled facet only core part, the reflection of transmitted laser beam from the fiber facet could be minimized below -35 dE in alignment distance of 2: 30 /J.m. In the same condition, transmitted output power of -12.1 dEm and responsivity of 0.2. AIW were obtained.

• Journal of the Korean Society for Precision Engineering
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• v.5 no.3
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• pp.43-47
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• 1988

Height micrometer is a kind of end standards. It consists of a stack of gage blocks which is capable of moving up and down by a micrometer head. Height micrometer requires calibration with very high accuracy because its resolution is generally 1 .mu. m and its accuracy is higher than few micro- meters. Conventionally, comparison with gage blocks is used to calibrate height micrometer, but it is less accurate and time consuming method. A height micrometer calibration system using a laser interferometer instead of gage blocks has been developed. The measuring range of the system is 300mm, and the accuracy is better than ${\pm}0.5{\mu}m$ A new method of maintaining the laser-beam alignment is described as well.

• Korean Journal of Optics and Photonics
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• v.5 no.1
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• pp.51-59
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• 1994

We constructed travelling type Nd:YAG laser with a negative branch confocal unstable ring (NBCUR) resonator like a Newtonian telescope type using four flat mirror and two positive lenses. Annular output beam was obtained by using scraper mirror. This laser oscillator has 22 optical faces and optical alignment was done by equal inclination interferance method. We inserted a Faraday rotator of permanent magnet type designed in the laboratory for unidirectional operation. We obtained laser output energy of 80m.I with electrical input energy of 70 J. and we obtained that peak power of 0.5MW through Q-switching with BDN dye.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.18 no.11
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• pp.2759-2764
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• 2014

Smoke detector is commonly used to reduce fire detection time. However, technical problems regarding its inaccuracy of laser beam-receiving point on the surface of the sensor associated with incoming interference are identified when the laser transmitter and receiver are installed at a distance of about 100m. In this paper, we propose the auto focus alignment algorithm with high precision to adjust tilting angle of lasers caused by environmental interference so that solve existing issues using multi-level worm gear set.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.521-526
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• 2005

We assembled the optical beam director with diameter 300 mm. This consists of primary, secondary mirrors and 5 folding mirrors. Among them, the primary mirror is the most important component so that we measure any possible deformation on it at every step of assembly. Also, we developed the systematic alignment algorithm, which is essential because the number of mirrors is 7. The final wavefront error of the system is 1.9 wave rms (wave=633 nm) which is 7 times larger than we expected. The main source is the deformation of the 131ding mirrors. We expect that what we have learned from the assembly of this system would be helpful when we deal with a larger system in the future.

• Korean Journal of Optics and Photonics
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• v.19 no.3
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• pp.182-186
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• 2008

The prism spectrometer is a standard device for the measurement of refractive index; it is used in undergraduate laboratories. Typically, however, lots of attention is required in the alignment, and the accuracy of the obtained refractive index is not so high in spite of the durability of the device. The maximum and minimum deviation method, which compensates the disadvantages of the prism spectrometer, can be composed cost effectively using a length marking tape and a rotating platform. It can measure the refractive indices accurately by utilizing a wide screen. In this study, the equal sided hollow prism whose length is 26 mm was fabricated and measured the refractive indices of seven kind of liquids (pure water, $C_3H_5(OH)_2$, $CCl_4$, $C_6H_4NH_2$, $CS_2$, $C_6H_4(CH_3)_2)$ by using the prism spectrometer and maximum and minimum deviated laser beam method at the wavelengths of He-Ne laser (${\lambda}$= 632.8 nm) and YVO4 laser (${\lambda}$= 532 nm). The result shows that the data obtained by the latter method are more accurate and precise than those obtained by the former device.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.331-337
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• 2006

Cavity-type beam position monitors were developed in collaboration with KEK to use for the future accelerators such as international linear collider (ILC) or x-ray free electron laser (XFEL) in PAL. BPM components such as BPM cavity, beam tubes, waveguides and feedthroughs were assembled by brazing at the same time to reduce mechanical errors during the fabrication. There are four screwed pins around outer rim of the cavity for the tuning of cavity frequency and x-y isolation. The resonance frequency of BPM is 6.422 GHz, the inner diameter of cavity is 53.822 mm, and the range of mechanical adjusting is $+ / - 250{\mu}m$. The x-y isolation was measured better than -40 dB after tuned. Test results of signal forms, x-y isolations, sensitivities are satisfied within requirements for the KEK ATF2 beam line.