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http://dx.doi.org/10.3807/JOSK.2010.14.2.127

Development and Evaluation of an Electron Beam Source for Microscopy and Its Applications  

Ahn, Seung-Joon (Department of Information Display, Sun Moon University)
Oh, Tae-Sik (Department of Information Display, Sun Moon University)
Kim, Ho-Seob (Department of Information Display, Sun Moon University)
Ahn, Seong-Joon (Department of I&C Engineering, Sun Moon University)
Publication Information
Journal of the Optical Society of Korea / v.14, no.2, 2010 , pp. 127-130 More about this Journal
Abstract
We have developed an efficient electron beam (e-beam) source, a microcolumn, that can be used as a source module for of microscopy and its applications. To obtain a low operating voltage, a very sharp cold field electron emitter was developed by electrochemically etching a tungsten wire. Laser diffraction was used for the fabrication of high-quality electron lenses and for their precise alignment. The measurement of the e-beam currents, and SEM images captured by the microcolumn confirmed the potential of the device as a very good e-beam source.
Keywords
Electron beam source; THz; Microcolumn; Microscopy; Diffraction pattern;
Citations & Related Records
Times Cited By KSCI : 5  (Citation Analysis)
Times Cited By Web Of Science : 2  (Related Records In Web of Science)
Times Cited By SCOPUS : 2
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