Repairing of a Defective Metallic Line using Laser CVD Deposited Tungsten Film in TFT LCD (레이저 CVD 텅스텐막 증착을 통한 TFT LCD 불량배선 수리)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.17 no.10
- /
- pp.1114-1119
- /
- 2004