• 전기의세계
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• 제34권8호
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• pp.470-475
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• 1985

우주물질의 대부분이 플라즈마 상태에 있지마는 지구상에서는 천둥이 칠 때 생기는 방전이나 극지방에서 볼 수 있는 오로라와 같이 극히 일부분이 자연상태의 프라즈마로 존재한다. 지금까지 플라즈마의 이용은 그것이 내는 밝은 빛을 이용한 조명이나, 높은 열을 이용한 용접이나 절단이 고작이었으나, 최근에 들어 초고온, 고밀도 플라즈마를 이용한 핵융합 에너지 연구나 Free Electron Laser나 Gyrotron과 같이 새로운 Radiation Source로써 종래의 Source가 만들지 못하던 주파수 영역이나 Glow Discharge에서 생기는 저온 Plasma를 이용한 Plasma Etching PECVD(Plasma Enhanced CHemical Vapor Deposition), Plasma Ashing, Sputtering등은 VLSI의 제조에 필요불가결한 공정의 일부분이 되고 있다. 앞으로 수회에 걸쳐 본 기술해설란을 통하여 이들 Plasma의 이용 기술을 소개하고자 하며 본회에서는 그중에서 Plasma Etching에 대해서 그 원리와 기술상의 특징을 살펴보고자 한다.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 1999년도 특별강연 및 추계학술발표대회 개요집
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• pp.34-36
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• 1999

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.58-58
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• 2003

• 대한전기학회:학술대회논문집
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• 대한전기학회 1989년도 추계학술대회 논문집 학회본부
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• pp.505-508
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• 1989

A computer simulation code of UV preionized discharge KrF laser is developed, including time dependent circuit equations, boltzmann equations, and plasma kinetic equations for various atomic and molecular species. Rate constants for electron collision processes are calculated with a boltzmann equations as a function of E/N. In this study, we studied mainly the $KrF^*$ formation process, relaxation process, and the 248nm absorption process as a function of charging voltage.

• 한국광학회:학술대회논문집
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• 한국광학회 2000년도 하계학술발표회
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• pp.214-215
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• 2000

레이저로 발생시킨 플라즈마의 분광학적인 분석은 유용한 분석기술로 평가되고 있다. 이러한 플라즈마를 발생시키는데 있어서 Q-switched 레이저를 많이 사용되고 되고 있으나, Q-switch된 레이저로 발생시킨 플라즈마 복사광의 특성은 주변 분위기에 의해 매우 큰 영향을 받는다. 특히 대기압인 공기분위기에서 레이저로 발생된 플라즈마의 분광특성은 강하고 연속적인 background가 포함되고, 자체적으로 흡수되고, 넓게 퍼진 분광선들이 생성된다. 이는 레이저 발생 플라즈마를 통해 성분을 분석할 경우에 적합하지 않다. (중략)

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.949-952
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• 2006

We have measured the excited Xe atoms density in the $1s_5$ metastable states by laser absorption spectroscopy in accordance with various barrier ribs. In this experiment, the average density of one cell in the panel with stripe barrier rib has been measured to be $1.8{\times}10^{12}cm^{-3}$. The panel with close type barrier rib has been measured to be $5.1{\times}10^{12}cm^{-3}$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제34회 동계학술대회 초록집
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• pp.234-234
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• 2008

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 추계학술대회 논문집 전기물성,응용부문
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• pp.220-222
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• 2005

We can classify two cases in a way to observe an atom of gas state or a molecule using the laser. First case is way to use dispersion phenomenon like Rayleigh scattering, Thomson scattering, Mie scattering, Raman Scattering. And Second case is a way to use change phenomenon like a LAS (Laser Absorption Spectroscopy), LIF (Laser Induced Fluorescent). In this paper, we have measured the meta-stable density and the distribution by using a LAS method in Xe discharge lamp. The laser absorption spectroscopy (LAS) is useful to investigate the behavior of such species. The xenon atoms in the $1S_4$ and $1S_5$ generate excited $Xe^*$(147nm) and $Xe_{2}^*$(173nm) dimers in Xe plasma. It is found that the intensity of VUV 147nm emission is proportional to that of the IR 828nm emission, and the VUV 173nm emission is roughly proportional to that of the IR 823nm emission. The laser is used CW laser that consist of AlGaAs semiconductor and energy level is used 823.16nm wavelength. We measured signal of monochrometer from the lamp center while will change a discharge electric current by 6mA in 3mA and calculated meta-stable state density of a xenon atom through a measured value.

• 분석과학
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• 제33권2호
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• pp.86-97
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• 2020

Reconstruction and separation of explosive-contaminated overlapping fingerprints constitutes an analytical challenge of high significance in forensic sciences. Laser-induced breakdown spectroscopy (LIBS) allows real-time chemical mapping by detecting the light emissions from laser-induced plasma and can offer powerful means of fingerprint classification based on the chemical components of the sample. During recent years LIBS has been studied one of the spectroscopic techniques with larger capability for forensic sciences. However, despite of the great sensitivity, LIBS suffers from a limited detection due to difficulties in reconstruction of overlapping fingerprints. Here, the authors propose a simple, yet effective, method of using chemical mapping to separate and reconstruct the explosive-contaminated, overlapping fingerprints. A Q-switched Nd:YAG laser system (1064 nm), which allows the laser beam diameter and the area of the ablated crater to be controlled, was used to analyze the chemical compositions of eight samples of explosive-contaminated fingerprints (featuring two sample explosive and four individuals) via the LIBS. Then, the chemical validations were further performed by applying the Raman spectroscopy. The results were subjected to principal component and partial least-squares multivariate analyses, and showed the classification of contaminated fingerprints at higher than 91% accuracy. Robustness and sensitivity tests indicate that the novel method used here is effective for separating and reconstructing the overlapping fingerprints with explosive trace.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 영호남 합동 학술대회 및 춘계학술대회 논문집 센서 박막 기술교육
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• pp.41-45
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• 2006

The study on laser-ablation plasmas has been strongly interested in fundamental aspects of laser-solid interaction and consequent plasma generation. In particular, this plasma has been widely used for the deposition of thin solid films and applied to the semiconductors and insulators. In this paper, we developed and discussed the generation of carbon ablation plasmas emitted by laser radiation on a solid target, graphite. The progress of carbon plasmas by laser-ablation was simulated using Monte-Carlo particle model under the pressures of vacuum, 1 Pa, 10 Pa and 66 Pa. At the results, carbon particles with low energy were deposited on the substrate as the pressure becomes higher. However, there was no difference of deposition distributions of carbon particles on the substrate regardless of the pressure.