• 한국정밀공학회지
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• 제17권6호
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• pp.17-24
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• 2000

1960년 Jawan 등이 1.15㎛ 파장을 포함한 6개의 발진파장을 갖는 He-Ne 레이저의 연속 발진을 성공시킨 이후 레이저는 단색성이나 빛의 진직성을 이용하는 계측에서 특히 정밀길이측정에서 매우 중요하게 사용되고 있다. He-Ne 레이저의 발진선폭은 80㎑로써 길이표준기로 사용되었던 Kr-86 스펙트럼선의 선폭(400㎒)의 5,000 분의 1에 해당되는 매우 좁은 선폭을 갖고 있다.(중략)

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.19-25
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• 2004

Pitch measurements of 150 nm one-dimensional grating standards were carried out using a contact mode atomic force microscopy with a high resolution three-axis laser interferometer. This measurement technique was named as the 'nano-metrological AFM'. In the nano-metrological AFM, three laser interferometers were aligned precisely to the end of an AFM tip. Laser sources of the three-axis laser interferometer in the nano-metrological AFM were calibrated with an I$_2$ stabilized He-Ne laser at a wavelength of 633 nm. Therefore, the Abbe error was minimized and the result of the pitch measurement using the nano-metrological AFM could be used to directly measure the length standard. The uncertainty in the pitch measurement was estimated in accordance with the Guide to the Expression of Uncertainty in Measurement (GUM). The primary source of uncertainty in the pitch-measurements was derived from the repeatability of the pitch-measurements, and its value was about 0.186 nm. The average pitch value was 146.65 nm and the combined standard uncertainty was less than 0.262 nm. It is suggested that the metrological AFM is a useful tool for the nano-metrological standard calibration.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.479-484
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• 1996

This paper describes a method of measuring tilt motion. This method measures the tilt motion of drilling machines using a laser interferometer, a simple sliding linear bearing, measurement of the probe and the LSC(least square center) method. The next order of business is discussing the procedure of measurement. First, The measured position is considered to be the point of contact between the drill shank and the probe. The revolution of the drill axis delivers the point of contact to the probe. Second, because the laser interferometer is attached on the sliding linear bearing, any movement of probe influences laser reflector. Thus, the laser program displays the moving factor of laser reflector. Namely, this is tilt factor. Third. the points of measurement are a full circle which has 8 points (each are 45$^{\circ}$), After it is finished measuring the 8 points, let the spindle of the drilling machine move down about 5 cm. Repeating this procedure three times, we can get tilt motion's values which are calculated by LSC method. Many error factors affect the accurate measurement of tilt motion. However in this paper we ignore some error factors because they are less significant than tilt motion.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1007-1010
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• 2002

The accuracy of high speed feeding type laser cutting M/C is the major factor directly concerned with the accuracy of the processed work, and the feed errors of feed system make the machining errors of work directly on processing. In this point, this study focused on the generative elements in feed errors of laser cutting M/C when operating its laser head. In order to improve the accuracy of this machining center, feed errors are measured by a laser interferometer.

• 전기학회논문지
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• 제57권6호
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• pp.1042-1047
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• 2008

As an ultra-precision measurement system the heterodyne laser interferometer plays an important role in semiconductor industry. However the errors of environment and nonlinearity which are caused by air refraction and frequency-mixing separately reduce the accuracy of displacement measurement. In this paper we propose a DFNN(data fusion and neural network) method for error compensation. As a hybrid method of data fusion and neural network, DFNN method reduces the environmental and nonlinear error simultaneously. The effectiveness of the proposed error compensation method is proved through experimental results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.911-914
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• 2003

The non-contact laser measurement system what can be used for the vibration analysis of structures is discussed. There are few systems using laser speckle interferometer for vibration analysis. One of these systems is the Electronic Speckle Pattern Interferometer (ESPI). With ESPI system, one can obtain the vibration mode shape qualitatively and the maximum vibration amplitude quantitatively of the structure at each resonance frequency. In this paper, the phase-shifting ESPI system with stroboscopic illumination for measuring vibration mode shapes is constructed and the operating software is programmed. The results are compared with that of commercial ESPI system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1751-1752
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• 2008

The heterodyne laser interferometer has a nano-meter scale resolution. However, the unwanted nonlinearity error caused from frequency-mixing limits the ultra-precise resolution. In this paper, we propose a recursive WLS algorithm to improve the resolution of heterodyne laser interferometer. Some experimental results show an effectiveness of the recursive WLS algorithm in nano-meter scale resolution.

• 비파괴검사학회지
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• 제33권2호
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• pp.160-164
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• 2013

레이저 초음파검사 장치는 레이저 빔을 이용하여 초음파 신호를 발생시키고 측정하는 비접촉식 결함 검사 장치이다. 이 장치는 펄스 레이저 빔을 이용하여 광대역 주파수 범위를 갖는 초음파 신호를 발생시키고 작은 점으로 집속된 레이저 빔을 이용하여 초음파 신호를 측정하므로 우수한 측정 분해능을 제공한다. 본 연구에서는 이종금속 접촉부식(갈바닉 부식) 현상을 레이저를 이용한 비파괴, 비접촉 방법으로 측정하였다. 부식된 부분에 이물질이 혼합되는 경우를 가정하고, 레이저 초음파 실험을 진행하였다. 시편의 뒷면에서 펄스 레이저로 초음파를 발생시키고, 같은 위치의 앞면에서 CW 레이저와 CFPI를 이용하여 초음파 신호를 획득하였다. 이물질이 존재하는 부분의 초음파 신호 특성을 분석하여 이물질의 위치 및 크기를 측정하였다.

• 한국정밀공학회지
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• 제16권10호
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• pp.203-208
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• 1999

By tilting the reference mirror of Twynman-Green interferometer having a reference mirror and a moving mirror, firinge pattern composed of bright and dark parallel lines can be obtained and the fringe pattern is shifted according to the displacement of the mowing mirror. Several studies are executed for displacement measurement by detecting the intensity of the fringe with photo-diodes having small detecting area. In this study, to improve the sensitivity and robustness, the intensity of fringe is detected by using a large-area quadratic photo-diode masked with a grating panel having four kinds of binary grating having phase-difference of 0, {\pi}$/4, {\pi}$/2, 3 {\pi}$/4. The phase of the fringe is calculated with a simple 4-buckets algorithm. A experimental result shows that standard deviation of 5.653 nm is obtained comparing with a capacitive type gap sensor having nearly 1 nm accuracy.