• 제목/요약/키워드: Laser Generating

검색결과 120건 처리시간 0.05초

피코초 레이저의 공정변수에 따른 TSV 드릴링 특성연구 (Parametric Study of Picosecond Laser Hole Drilling for TSV)

  • 신동식;서정;김정오
    • 한국레이저가공학회지
    • /
    • 제13권4호
    • /
    • pp.7-13
    • /
    • 2010
  • Today, the most common process for generating Through Silicon Vias (TSVs) for 3D ICs is Deep Reactive Ion Etching (DRIE), which allows for high aspect ratio blind holes with low surface roughness. However, the DRIE process requires a vacuum environment and the use of expensive masks. The advantage of using lasers for TSV drilling is the higher flexibility they allow during manufacturing, because neither vacuum nor lithography or masks arc required and because lasers can be applied even to metal and to dielectric layers other than silicon. However, conventional nanosecond lasers have the disadvantage of causing heat affection around the target area. By contrast, the use of a picosecond laser enables the precise generation of TSVs with less heat affected zone. In this study, we conducted a comparison of thermalization effects around laser-drilled holes when using a picosecond laser set for a high pulse energy range and a low pulse energy range. Notably, the low pulse energy picosecond laser process reduced the experimentally recast layer, surface debris and melts around the hole better than the high pulse energy process.

  • PDF

Crack localization by laser-induced narrowband ultrasound and nonlinear ultrasonic modulation

  • Liu, Peipei;Jang, Jinho;Sohn, Hoon
    • Smart Structures and Systems
    • /
    • 제25권3호
    • /
    • pp.301-310
    • /
    • 2020
  • The laser ultrasonic technique is gaining popularity for nondestructive evaluation (NDE) applications because it is a noncontact and couplant-free method and can inspect a target from a remote distance. For the conventional laser ultrasonic techniques, a pulsed laser is often used to generate broadband ultrasonic waves in a target structure. However, for crack detection using nonlinear ultrasonic modulation, it is necessary to generate narrowband ultrasonic waves. In this study, a pulsed laser is shaped into dual-line arrays using a spatial mask and used to simultaneously excite narrowband ultrasonic waves in the target structure at two distinct frequencies. Nonlinear ultrasonic modulation will occur between the two input frequencies when they encounter a fatigue crack existing in the target structure. Then, a nonlinear damage index (DI) is defined as a function of the magnitude of the modulation components and computed over the target structure by taking advantage of laser scanning. Finally, the fatigue crack is detected and localized by visualizing the nonlinear DI over the target structure. Numerical simulations and experimental tests are performed to examine the possibility of generating narrowband ultrasonic waves using the spatial mask. The performance of the proposed fatigue crack localization technique is validated by conducting an experiment with aluminum plates containing real fatigue cracks.

Wavelength-Tunable, Passively Mode-Locked Erbium-Doped Fiber Master-Oscillator Incorporating a Semiconductor Saturable Absorber Mirror

  • Vazquez-Zuniga, Luis A.;Jeong, Yoonchan
    • Journal of the Optical Society of Korea
    • /
    • 제17권2호
    • /
    • pp.117-129
    • /
    • 2013
  • We briefly review the recent progress in passively mode-locked fiber lasers (PMLFLs) based on semiconductor saturable absorber mirrors (SESAMs) and discuss the detailed characterization of a SESAM-based, passively mode-locked erbium-doped fiber (EDF) laser operating in the 1.5-${\mu}m$ spectral range for various configurations. A simple and compact design of the laser cavity enables the PMLFL to generate either femtosecond or wavelength-tunable picosecond pulses with high stability as the intra-cavity filtering method is altered. All the cavities investigated in our experiments present self-starting, continuous-wave mode-locking with no Q-switching instabilities. The excellent stability of the source eventually enables the wavelength-tunable PMLFL to be used as a master oscillator for a power-amplifier source based on a large-core EDF, generating picosecond pulses of >10-kW peak power and >100-nJ pulse energy.

StereoLithography로 3차원 형상가공을 위한 레이저 조사경로 생성에 관한 연구 (A study on laser scan path generation for manufacturing 3-dimensional body using StereoLithography)

  • 안대건;김준안;이석희;백인환
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 1993년도 추계학술대회 논문집
    • /
    • pp.687-692
    • /
    • 1993
  • This paper deals with the generation of laser scan path for manufacturing 3-dimensional body using StereoLithography. The purpose of this study is to develop one module of the StersoLithography system(SLA) for Rapid Protyping and Manufacturing. AutoCAD system is used to supply CAD information from model. The X-Y controller which was made for a special purpose is used to test this system. The system software developed is composed of 3 main modules, the first module is calculating the boundary point os laser scan path. The scound module is generating final output file which is used to down load on the controller. The result of this study shows a good algorithm to generate laser scan path on the basis of simple mathematical background.

  • PDF

레이저 도플러의 진동에 대한 분석과 3차원 예측연구 (An Analysis and a 3D Prediction of vibration modes in a Laser Doppler)

  • 백란
    • 디지털콘텐츠학회 논문지
    • /
    • 제11권2호
    • /
    • pp.117-122
    • /
    • 2010
  • 본 연구는 레이저 도플러의 진동모드에 대한 분석연구이다. 도플러에서 생성되는 진동모드를 측정하여 각 성분을 분석하여 2차원 연구로부터 3차원을 예측 할 수 있는 성질들을 연구하고자 한다. 진동모드는 범위 탐지기(거리 측정 센서)에 의존하고 있다. 즉, 측정거리에 의해 결정되고 있으므로, 생성되는 변수들로부터 2차원에서부터 3차원에서의 진동모드가 어떻게 생성되는지, 어떤 특성의 패턴으로 나타나는지를 연구함과 더불어, 진동모드와 거리와의 관계도 아울러 연구한다.

화염의 정성적 당량비 측정을 위한 Plasma Diagnostics에 관한 연구 (Plasma spectroscopy aimed at quantifying the flame equivalence ratio)

  • 이석환;여재익
    • 한국연소학회:학술대회논문집
    • /
    • 한국연소학회 2013년도 제46회 KOSCO SYMPOSIUM 초록집
    • /
    • pp.99-101
    • /
    • 2013
  • The equivalence ratio is measured by LIBS(Laser-induced Breakdown spectroscopy) in hydrocarbon flame and high temperature (${\sim}3200^{\circ}C$) oxyhydrogen flame, where a stoichiometric mixture of hydrogen and oxygen is produced from water through electrolysis. The ratio of the hydrogen and oxygen (H/O) atomic lines intensities is used for quantitatively determining the quivalence ratio. laser energy is evaluated for determining the optimal condition for plasma diagnostics. The minimum laser energy for generating plasma in a laminar premixed hydrocarbon flame was about 70 mJ, whereas oxyhydrogen flame. consequently the irradiated spot of a lower density in high temperature oxyhydrogen flame gave rise to bigger plasma in size, thus limiting the spatial resolution of the LIBS measurement.

  • PDF

경사 정체점 유동이 적용된 미세 홀 레이저 가공 공정의 흄 오염입자 산포특성 연구 (Fume Particle Dispersion in Laser Micro-Hole Machining with Oblique Stagnation Flow Conditions)

  • 김경진;박중윤
    • 반도체디스플레이기술학회지
    • /
    • 제20권3호
    • /
    • pp.77-82
    • /
    • 2021
  • This numerical study focuses on the analysis of fume particle dispersion characteristics over the surface of target workpiece in laser micro-hole machining process. The effects of oblique stagnation flow over fume generating machining point are examined by carrying out a series of three-dimensional random particle simulations along with probabilistic particle generation model and particle drag correlation of low Reynolds number. Present computational model of fume particle dispersion is found to be capable of assessing and quantifying the fume particle contamination in precision hole machining which may influenced by different types of air flow patterns and their flow intensity. The particle size dependence on dispersion distance of fume particles from laser machining point is significant and the effects of increasing flow oblique angle are shown quite differently when slot blowing or slot suction flows are applied in micro-hole machining.

시스템 초기화(Calibration)에 따른 항공레이저측량의 정확도 평가 (The Evaluation of Accuracy for Airborne Laser Surveying via LiDAR System Calibration)

  • 이대희;위광재;김승용;김갑진;이재원
    • 한국측량학회:학술대회논문집
    • /
    • 한국측량학회 2004년도 춘계학술발표회논문집
    • /
    • pp.15-26
    • /
    • 2004
  • The calibration for systematic error in LiDAR is crucial for the accuracy of airborne laser scanning. The main error is the misalignment of platforms between INS(Inertial Navigation System) and Laser scanner For planimetrical calibration of LiDAR, the building is good feature which has great changes in height and continuous flat area in the top. The planimetry error(pitch, roll) is corrected by adjustment of height which is calculated from comparing ground control points(GCP) of building to laser scanning data. We can know scale correction of laser range by the comparison of LiDAR data and GCP is arranged at the end of scan angle where maximize the height error. The area for scale calibration have to be large flat and have almost same elevation. At 1000m for average flying height, The Accuracy of laser scanning data using LiDAR is within 110cm in height and ${\pm}$50cm in planmetry so we can use laser scanning data for generating 3D terrain surface, expecically digital surface model(DSM) which is difficult to measure by aerial photogrammetry in forest, coast, urban area of high buildings

  • PDF

2차원 자유형상의 레이저 절단을 위한 CNC 공구경로 생성 (CNC Torch Path Generation for Laser Cutting of Planar Shapes)

  • 박형준;안동규
    • 한국CDE학회논문집
    • /
    • 제12권3호
    • /
    • pp.153-162
    • /
    • 2007
  • In this paper, we propose a knowledge-based method for generating CNC torch path for laser cutting of the outlines of planar shapes. The proposed method consists of two main phases: laser cutting knowledge construction and CNC torch path generation using the knowledge. In the first phase, cutting experiments are conducted on various operating parameters, and then empirical data are stored and analyzed to make up the knowledge of laser cutting. With this knowledge, we can inquire what a kerf width is for specific operating parameters. In the second phase, using the knowledge of laser cutting, CNC torch path is generated for cutting the outlines of the given planar shapes. This phase is basically based on the offset generation of each outline by a sequence of arc splines, where the offset distance is the same as the half of the kerf width determined from the constructed knowledge. The proposed method based on laser cutting knowledge makes full use of arc interpolators in CNC torch path generation. The method can efficiently reduce the number of path segments while keeping the torch path within the desired accuracy.

레이저를 이용한 마이크로/나노 알루미늄 입자 생성과 점화 (Generation and ignition of micro/nano - aluminum particles using laser)

  • 이경철;여재익
    • 한국추진공학회:학술대회논문집
    • /
    • 한국추진공학회 2012년도 제38회 춘계학술대회논문집
    • /
    • pp.429-434
    • /
    • 2012
  • 금속 연료로 사용되는 마이크로/나노 알루미늄 입자를 산화피막에 의한 점화 지연을 최소화 하는 점화 방법을 제시 하였다. 알루미늄 입자를 생성시킴과 동시에 가열하여 입자가 생성된 직후 산소와 접촉시 격렬한 산화 반응을 유도하여 점화를 시키는 방법이다. 1064 nm 파장의 Nd:YAG 펄스 레이저를 이용한 레이저 삭마(laser ablation)를 알루미늄 시편에 발생시켜 입자를 생성하였으며, 산란 기법(scattering method)을 이용하여 입자를 가시화하여 생성을 확인하였다. 10.6 ${\mu}m$ 파장의 $CO_2$ 연속 레이저를 사용하여 알루미늄 시편을 가열하고 생성된 입자의 점화 열원으로 사용하여 알루미늄 입자가 점화되고 연소되어 이동하는 궤적을 확인하였다.

  • PDF