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Fume Particle Dispersion in Laser Micro-Hole Machining with Oblique Stagnation Flow Conditions  

Kim, Kyoungjin (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
Park, Joong-Youn (Department of Mechanical System Engineering, Kumoh National Institute of Technology)
Publication Information
Journal of the Semiconductor & Display Technology / v.20, no.3, 2021 , pp. 77-82 More about this Journal
Abstract
This numerical study focuses on the analysis of fume particle dispersion characteristics over the surface of target workpiece in laser micro-hole machining process. The effects of oblique stagnation flow over fume generating machining point are examined by carrying out a series of three-dimensional random particle simulations along with probabilistic particle generation model and particle drag correlation of low Reynolds number. Present computational model of fume particle dispersion is found to be capable of assessing and quantifying the fume particle contamination in precision hole machining which may influenced by different types of air flow patterns and their flow intensity. The particle size dependence on dispersion distance of fume particles from laser machining point is significant and the effects of increasing flow oblique angle are shown quite differently when slot blowing or slot suction flows are applied in micro-hole machining.
Keywords
Laser Machining; Micro-Hole; Fume Particle Contamination; Stagnation Air Flow; Particle Simulation;
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